JPH0180927U - - Google Patents
Info
- Publication number
- JPH0180927U JPH0180927U JP1987176633U JP17663387U JPH0180927U JP H0180927 U JPH0180927 U JP H0180927U JP 1987176633 U JP1987176633 U JP 1987176633U JP 17663387 U JP17663387 U JP 17663387U JP H0180927 U JPH0180927 U JP H0180927U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- retention means
- peripheral surface
- reaction tube
- vertical semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176633U JPH0180927U (pl) | 1987-11-19 | 1987-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176633U JPH0180927U (pl) | 1987-11-19 | 1987-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0180927U true JPH0180927U (pl) | 1989-05-30 |
Family
ID=31468356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176633U Pending JPH0180927U (pl) | 1987-11-19 | 1987-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0180927U (pl) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS614426B2 (pl) * | 1977-08-26 | 1986-02-10 | Nippon Zeon Co |
-
1987
- 1987-11-19 JP JP1987176633U patent/JPH0180927U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS614426B2 (pl) * | 1977-08-26 | 1986-02-10 | Nippon Zeon Co |