JPH0289824U - - Google Patents
Info
- Publication number
- JPH0289824U JPH0289824U JP1988168353U JP16835388U JPH0289824U JP H0289824 U JPH0289824 U JP H0289824U JP 1988168353 U JP1988168353 U JP 1988168353U JP 16835388 U JP16835388 U JP 16835388U JP H0289824 U JPH0289824 U JP H0289824U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- manufacturing equipment
- semiconductor wafer
- semiconductor manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988168353U JPH0289824U (pl) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988168353U JPH0289824U (pl) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289824U true JPH0289824U (pl) | 1990-07-17 |
Family
ID=31457459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988168353U Pending JPH0289824U (pl) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289824U (pl) |
-
1988
- 1988-12-28 JP JP1988168353U patent/JPH0289824U/ja active Pending
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