JPH0184440U - - Google Patents
Info
- Publication number
- JPH0184440U JPH0184440U JP1987180728U JP18072887U JPH0184440U JP H0184440 U JPH0184440 U JP H0184440U JP 1987180728 U JP1987180728 U JP 1987180728U JP 18072887 U JP18072887 U JP 18072887U JP H0184440 U JPH0184440 U JP H0184440U
- Authority
- JP
- Japan
- Prior art keywords
- sioxny
- film
- utility
- semiconductor device
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910020286 SiOxNy Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
図は本考案装置の一例の略線的断面図、１１は
半導体基体、１および２１はアルミニウム配線層
、２および２２はシリコンナイトライド膜である
。
The figure is a schematic cross-sectional view of an example of the device of the present invention, in which 11 is a semiconductor substrate, 1 and 21 are aluminum wiring layers, and 2 and 22 are silicon nitride films.
Claims (1)
イトライド（ＳｉＯｘＮｙ）膜で覆つた配線を有
してなる半導体装置。 A semiconductor device having a wiring containing aluminum covered with a silicon oxynitride (SiOxNy) film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180728U JPH0184440U (en) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180728U JPH0184440U (en) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184440U true JPH0184440U (en) | 1989-06-05 |
Family
ID=31472234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987180728U Pending JPH0184440U (en) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184440U (en) |
-
1987
- 1987-11-27 JP JP1987180728U patent/JPH0184440U/ja active Pending