JPH0211165U - - Google Patents

Info

Publication number
JPH0211165U
JPH0211165U JP9013088U JP9013088U JPH0211165U JP H0211165 U JPH0211165 U JP H0211165U JP 9013088 U JP9013088 U JP 9013088U JP 9013088 U JP9013088 U JP 9013088U JP H0211165 U JPH0211165 U JP H0211165U
Authority
JP
Japan
Prior art keywords
compound semiconductor
single crystal
boat
melt
semiconductor single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9013088U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9013088U priority Critical patent/JPH0211165U/ja
Publication of JPH0211165U publication Critical patent/JPH0211165U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図は本考案の化合物半導体単結晶製造装置
の一実施例を示すボートの平面図、第２図は第１
図のＢ―Ｂ′線断面図、第３図は第１図のボート
を用いてＧａＡｓ単結晶を製造する場合の反応容
器断面図、第４図は従来のボートの平面図、第５
図は第４図のＡ―Ａ′線断面図、第６図は第４図
に示すボート形状が異なる場合のＡ―Ａ′線断面
図、第７図及び第８図は断面形状が夫々第５図及
び第６図に示すようなボートから得られた単結晶
より円形ウエハを切削する場合の切削面を示す。 １：ボート、２：反応容器、３：Ｇａ、４：Ａ
ｓ、５：種結晶、６：スリツト。

Claims (1)

    【実用新案登録請求の範囲】
  1. ボートに化合物半導体の構成元素の一つを入れ
    て融液とし、該融液に他方の構成元素の蒸気を接
    触させて反応を生じさせ前記化合物半導体の単結
    晶を育成する化合物半導体単結晶製造装置におい
    て、前記ボートは、その長手方向と直角方向の断
    面が大部分円形であることを特徴とする化合物半
    導体単結晶製造装置。
JP9013088U 1988-07-07 1988-07-07 Pending JPH0211165U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9013088U JPH0211165U (ja) 1988-07-07 1988-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9013088U JPH0211165U (ja) 1988-07-07 1988-07-07

Publications (1)

Publication Number Publication Date
JPH0211165U true JPH0211165U (ja) 1990-01-24

Family

ID=31314662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9013088U Pending JPH0211165U (ja) 1988-07-07 1988-07-07

Country Status (1)

Country Link
JP (1) JPH0211165U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131566U (ja) * 1975-04-12 1976-10-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51131566U (ja) * 1975-04-12 1976-10-23

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