JPH0211167U - - Google Patents

Info

Publication number
JPH0211167U
JPH0211167U JP8677888U JP8677888U JPH0211167U JP H0211167 U JPH0211167 U JP H0211167U JP 8677888 U JP8677888 U JP 8677888U JP 8677888 U JP8677888 U JP 8677888U JP H0211167 U JPH0211167 U JP H0211167U
Authority
JP
Japan
Prior art keywords
epitaxial growth
solute
fixed plate
solvent
solvent metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8677888U
Other languages
English (en)
Other versions
JPH065428Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8677888U priority Critical patent/JPH065428Y2/ja
Publication of JPH0211167U publication Critical patent/JPH0211167U/ja
Application granted granted Critical
Publication of JPH065428Y2 publication Critical patent/JPH065428Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る液相エピタキシヤル成長
用溶媒金属の実施例を示す斜視図、第２図はスラ
イドボード法による液相エピタキシヤル成長法に
用いる装置の概略を示す平面図、第３図は第２図
の縦断面図である。 １……ボード（固定板）、２……基板（半導体
）、４……溶媒収納孔、５……スライダ（可動板
）、６……溶媒金属、７……溶質、８……凹部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 固定板上に摺動自在に装着された可動板の溶媒
    収納孔に挿入され、溶質とともに加熱溶解されて
    、前記固定板上に載置された半導体の表面にエピ
    タキシヤル成長を形成するための液相エピタキシ
    ヤル成長用溶媒金属において、該溶媒金属の上面
    に溶質収容用の複数個の凹部を点対称に配列して
    形成したことを特徴とする液相エピタキシヤル成
    長用溶媒金属。
JP8677888U 1988-06-30 1988-06-30 液相エピタキシャル成長用溶媒金属 Expired - Lifetime JPH065428Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8677888U JPH065428Y2 (ja) 1988-06-30 1988-06-30 液相エピタキシャル成長用溶媒金属

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8677888U JPH065428Y2 (ja) 1988-06-30 1988-06-30 液相エピタキシャル成長用溶媒金属

Publications (2)

Publication Number Publication Date
JPH0211167U true JPH0211167U (ja) 1990-01-24
JPH065428Y2 JPH065428Y2 (ja) 1994-02-09

Family

ID=31311419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8677888U Expired - Lifetime JPH065428Y2 (ja) 1988-06-30 1988-06-30 液相エピタキシャル成長用溶媒金属

Country Status (1)

Country Link
JP (1) JPH065428Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142603U (ja) * 1975-05-12 1976-11-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142603U (ja) * 1975-05-12 1976-11-17

Also Published As

Publication number Publication date
JPH065428Y2 (ja) 1994-02-09

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