JPH0312437U - - Google Patents
Info
- Publication number
- JPH0312437U JPH0312437U JP7394489U JP7394489U JPH0312437U JP H0312437 U JPH0312437 U JP H0312437U JP 7394489 U JP7394489 U JP 7394489U JP 7394489 U JP7394489 U JP 7394489U JP H0312437 U JPH0312437 U JP H0312437U
- Authority
- JP
- Japan
- Prior art keywords
- guard
- stage structure
- wafer
- shield
- suction tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Jigs For Machine Tools (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例であるステージ構
造を示す正面図およびテスト回路接続図、第２図
は第１図のウエハチヤツク部分の拡大図、第３図
はこの考案のリーク電流の流れの説明図、第４図
は従来のステージ構造を示す正面図、第５図は従
来のリーク電流の流れの説明図である。
図において、１……最上段ステージ、２，４…
…絶縁板、３……ガード、５……シールド、６…
…ウエハ吸着用チユーブ、７……測定器、８……
電流計を示す。なお、図中、同一符号は同一、ま
たは相当部分を示す。
Fig. 1 is a front view and test circuit connection diagram showing the stage structure as an embodiment of this invention, Fig. 2 is an enlarged view of the wafer chuck part of Fig. 1, and Fig. 3 shows the flow of leakage current in this invention. FIG. 4 is a front view showing a conventional stage structure, and FIG. 5 is an explanatory diagram of a conventional flow of leakage current. In the figure, 1...the top stage, 2, 4...
...Insulating plate, 3... Guard, 5... Shield, 6...
...Wafer suction tube, 7...Measuring device, 8...
Ammeter is shown. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
ハチヤツクにおいて、ウエハ吸着用のチユーブを
ガード又はその下のシルド又はグランドに取付た
ことを特徴とするウエハチヤツクのステージ構造
。 A stage structure for a wafer chuck used for testing semiconductor wafers, characterized in that a wafer suction tube is attached to a guard or a shield or ground below the guard.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394489U JPH0312437U (en) | 1989-06-22 | 1989-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7394489U JPH0312437U (en) | 1989-06-22 | 1989-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312437U true JPH0312437U (en) | 1991-02-07 |
Family
ID=31613201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7394489U Pending JPH0312437U (en) | 1989-06-22 | 1989-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312437U (en) |
-
1989
- 1989-06-22 JP JP7394489U patent/JPH0312437U/ja active Pending
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