JPH02139043U - - Google Patents

Info

Publication number
JPH02139043U
JPH02139043U JP4883989U JP4883989U JPH02139043U JP H02139043 U JPH02139043 U JP H02139043U JP 4883989 U JP4883989 U JP 4883989U JP 4883989 U JP4883989 U JP 4883989U JP H02139043 U JPH02139043 U JP H02139043U
Authority
JP
Japan
Prior art keywords
guide
movement mechanism
fine movement
facing
insulating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4883989U
Other languages
English (en)
Other versions
JPH0724658Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4883989U priority Critical patent/JPH0724658Y2/ja
Publication of JPH02139043U publication Critical patent/JPH02139043U/ja
Application granted granted Critical
Publication of JPH0724658Y2 publication Critical patent/JPH0724658Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F16C32/0674—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play by means of pre-load on the fluid bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/06—Relieving load on bearings using magnetic means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例の正面図、第２図は電
極取付位置を示す説明図、第３図は異なる実施例
の平面図、第４図はその正面図、第５図は電極間
に発生する静電吸引力の説明図、第６図は通電電
極と各軸まわりのテーブルの動きを示す説明図、
第７図は従来機構の一部截断正面図である。 １……テーブル、２……静圧空気軸受、３……
ガイド、４……コイル、５……マグネット、６…
…固定台、７……金属電極、８……帯状電極。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) テーブルが４角柱ガイドを囲繞する静圧空
    気軸受で支持されて直線的に移動する装置におい
    て、ガイドに導電性材料を使用し、かつテーブル
    に絶縁性材料を使用して、ガイドと対向したテー
    ブル内面に一つ、又は、複数の金属電極を設置し
    たことを特徴とする微動機構。 (2) ガイドに絶縁性材料を使用し、ガイド上の
    テーブル内面の金属電極と対向した位置にガイド
    の案内軸方向に長尺を持つ帯状電極を設置して成
    る請求項１記載の微動機構。 (3) テーブルとガイドの対向面に一つ又は、複
    数の変位センサーを埋設してテーブルとガイド間
    の距離を検出し、その変位センサーの信号によつ
    て電極に印加する電圧を制御する請求項１又は２
    記載の微動機構。
JP4883989U 1989-04-27 1989-04-27 微動機構 Expired - Lifetime JPH0724658Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4883989U JPH0724658Y2 (ja) 1989-04-27 1989-04-27 微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4883989U JPH0724658Y2 (ja) 1989-04-27 1989-04-27 微動機構

Publications (2)

Publication Number Publication Date
JPH02139043U true JPH02139043U (ja) 1990-11-20
JPH0724658Y2 JPH0724658Y2 (ja) 1995-06-05

Family

ID=31566008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4883989U Expired - Lifetime JPH0724658Y2 (ja) 1989-04-27 1989-04-27 微動機構

Country Status (1)

Country Link
JP (1) JPH0724658Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108399A1 (ja) * 2006-03-22 2007-09-27 Kyocera Corporation 静圧スライダ、これを備えた搬送装置および処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9227286B2 (en) * 2011-09-20 2016-01-05 Mitutoyo Corporation Precision feeding device and precision transfer equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007108399A1 (ja) * 2006-03-22 2007-09-27 Kyocera Corporation 静圧スライダ、これを備えた搬送装置および処理装置
JP5178507B2 (ja) * 2006-03-22 2013-04-10 京セラ株式会社 静圧スライダ、これを備えた搬送装置および処理装置

Also Published As

Publication number Publication date
JPH0724658Y2 (ja) 1995-06-05

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