JPH02149759U - - Google Patents
Info
- Publication number
- JPH02149759U JPH02149759U JP5833989U JP5833989U JPH02149759U JP H02149759 U JPH02149759 U JP H02149759U JP 5833989 U JP5833989 U JP 5833989U JP 5833989 U JP5833989 U JP 5833989U JP H02149759 U JPH02149759 U JP H02149759U
- Authority
- JP
- Japan
- Prior art keywords
- processing object
- forming apparatus
- opening
- film forming
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の一実施例に係る成膜装置の全
体構成を示す概略図、第２図は第１図に円で囲ん
だ部分の拡大図、第３図は同実施例の被処理体保
持具と保持具カバーとの取付状態を示す一部斜視
図、第４図は従来の成膜装置の全体構成を示す大
略図である。
１……チヤンバ、２……被処理体（半導体ウエ
ーハ）、３……被処理体保持具、３ａ……開口、
１２……保持具カバー、１２ａ……開口部。
Fig. 1 is a schematic diagram showing the overall configuration of a film forming apparatus according to an embodiment of the present invention, Fig. 2 is an enlarged view of the part circled in Fig. 1, and Fig. 3 is a processed object of the same embodiment. FIG. 4 is a partial perspective view showing how the body holder and the holder cover are attached, and a schematic diagram showing the overall configuration of a conventional film forming apparatus. 1... Chamber, 2... Processed object (semiconductor wafer), 3... Processed object holder, 3a... Opening,
12... Holder cover, 12a... Opening.
Claims (1)
処理体保持具を設けてなる成膜装置において、 上記被処理体保持具に該保持具の開口を塞がな
いで、かつ着脱自在のセラミツク製保持具カバー
を嵌着したことを特徴とする成膜装置。[Scope of Claim for Utility Model Registration] In a film forming apparatus comprising a processing object holder for holding a processing object within an opening in a chamber, the opening of the processing object holder is closed. 1. A film forming apparatus characterized in that a removable ceramic holder cover is fitted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5833989U JPH02149759U (en) | 1989-05-19 | 1989-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5833989U JPH02149759U (en) | 1989-05-19 | 1989-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02149759U true JPH02149759U (en) | 1990-12-21 |
Family
ID=31583859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5833989U Pending JPH02149759U (en) | 1989-05-19 | 1989-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02149759U (en) |
-
1989
- 1989-05-19 JP JP5833989U patent/JPH02149759U/ja active Pending