JPH0217860U - - Google Patents

Info

Publication number
JPH0217860U
JPH0217860U JP1988095959U JP9595988U JPH0217860U JP H0217860 U JPH0217860 U JP H0217860U JP 1988095959 U JP1988095959 U JP 1988095959U JP 9595988 U JP9595988 U JP 9595988U JP H0217860 U JPH0217860 U JP H0217860U
Authority
JP
Japan
Prior art keywords
laminate
electrode layers
side end
electrode
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988095959U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988095959U priority Critical patent/JPH0217860U/ja
Priority to US07/381,285 priority patent/US4978881A/en
Publication of JPH0217860U publication Critical patent/JPH0217860U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【図面の簡単な説明】
第１図Ａは本考案の積層型アクチユエータの縦
断面図、同図Ｂはその要部の拡大図、第２図は従
来の積層型アクチユエータの縦断面図である。 １……電歪素子、１ａ，１ｂ……電極層、１ａ
′，１ｂ′……絶縁間隔、２……弾性体、３ａ，
３ｂ……外部電極。

Claims (1)

    【実用新案登録請求の範囲】
  1. 表面に電極層を形成した複数の薄板状電歪素子
    の焼結された積層体からなり、該電極層を互い違
    いに積層体の一方の側端との間に絶縁間隔を残す
    ように短かく設定し、該側端の絶縁間隔によつて
    積層方向に形成される薄層の空間部を弾性体によ
    つて封塞した後、該積層体の対向する側端に露出
    する電極と接続する正、負一対の外部電極を設け
    たことを特徴とする積層型アクチユエータ。
JP1988095959U 1988-07-20 1988-07-20 Pending JPH0217860U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1988095959U JPH0217860U (ja) 1988-07-20 1988-07-20
US07/381,285 US4978881A (en) 1988-07-20 1989-07-18 Piezoelectric actuator of lamination type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988095959U JPH0217860U (ja) 1988-07-20 1988-07-20

Publications (1)

Publication Number Publication Date
JPH0217860U true JPH0217860U (ja) 1990-02-06

Family

ID=14151768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988095959U Pending JPH0217860U (ja) 1988-07-20 1988-07-20

Country Status (2)

Country Link
US (1) US4978881A (ja)
JP (1) JPH0217860U (ja)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02240977A (ja) * 1989-03-14 1990-09-25 Toshiba Corp 変位発生装置
DE69031839T2 (de) * 1989-04-07 1998-05-07 Mitsui Petrochemical Ind Geschichtete Keramikanordnung und Verfahren zur deren Herstellung
US5163209A (en) * 1989-04-26 1992-11-17 Hitachi, Ltd. Method of manufacturing a stack-type piezoelectric element
US5260723A (en) * 1989-05-12 1993-11-09 Ricoh Company, Ltd. Liquid jet recording head
DE68926166T2 (de) * 1989-11-14 1996-12-12 Battelle Memorial Institute Verfahren zur Herstellung einer piezoelektrischen Stapelantriebsvorrichtung
US5089739A (en) * 1990-03-19 1992-02-18 Brother Kogyo Kabushiki Kaisha Laminate type piezoelectric actuator element
DE4201937C2 (de) * 1991-01-25 1997-05-22 Murata Manufacturing Co Piezoelektrisches laminiertes Stellglied
DE4103657A1 (de) * 1991-02-07 1992-08-13 Tridelta Ag Translatorstapel und verfahren zu dessen herstellung
US5350639A (en) * 1991-09-10 1994-09-27 Matsushita Electric Industrial Co., Ltd. Dielectric ceramic for use in microwave device, a microwave dielectric ceramic resonator dielectric ceramics
US5168189A (en) * 1991-09-18 1992-12-01 Caterpillar Inc. Solderless connector for a solid state motor stack
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
TW241363B (ja) * 1991-12-05 1995-02-21 Hoechst Ceram Tec Ag
DE69315767T2 (de) * 1992-08-25 1998-05-07 Canon Kk Verfahren zur Herstellung einer laminierten piezoelektrischen Anordnung und Polarisationsverfahren und vibrationswellengetriebener Motor
US6050679A (en) * 1992-08-27 2000-04-18 Hitachi Koki Imaging Solutions, Inc. Ink jet printer transducer array with stacked or single flat plate element
US5493165A (en) * 1993-10-14 1996-02-20 At&T Corp. Force generator for electrostrictive actuators
US5730429A (en) * 1993-10-29 1998-03-24 Lord Corporation Decouplers for active devices
WO1998024296A2 (en) * 1996-11-20 1998-06-11 The Regents Of The University Of California Multilaminate piezoelectric high voltage stack
US6175182B1 (en) * 1998-03-18 2001-01-16 Penn State Research Foundation Pseudo-shear mode actuator
US6465931B2 (en) * 2000-03-29 2002-10-15 Qortek, Inc. Device and method for driving symmetric load systems
US6437487B1 (en) * 2001-02-28 2002-08-20 Acuson Corporation Transducer array using multi-layered elements and a method of manufacture thereof
DE10201641A1 (de) * 2002-01-17 2003-08-07 Epcos Ag Piezoelektrisches Bauelement und Verfahren zu dessen Herstellung
DE10207530A1 (de) * 2002-02-22 2003-09-11 Epcos Ag Piezoaktor mit strukturierter Außenelektrode
US7019438B2 (en) * 2002-06-21 2006-03-28 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film device
US7067961B2 (en) * 2002-07-12 2006-06-27 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film device, and manufacturing method of the device
US20040051763A1 (en) * 2002-09-13 2004-03-18 Shogo Matsubara Piezoelectric thin film element, actuator, ink-jet head and ink-jet recording apparatus therefor
JP4483275B2 (ja) * 2003-02-05 2010-06-16 株式会社デンソー 積層型圧電素子及びその製造方法
JP2004297041A (ja) * 2003-03-12 2004-10-21 Denso Corp 積層型圧電体素子
US7651587B2 (en) 2005-08-11 2010-01-26 Applied Materials, Inc. Two-piece dome with separate RF coils for inductively coupled plasma reactors
JP4657082B2 (ja) * 2005-10-28 2011-03-23 オリンパスメディカルシステムズ株式会社 超音波治療装置
JP5211553B2 (ja) * 2006-06-27 2013-06-12 コニカミノルタアドバンストレイヤー株式会社 アクチュエータ素子、及びアクチュエータ素子の製造方法
JP6828331B2 (ja) * 2016-09-09 2021-02-10 Tdk株式会社 圧電駆動装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142780A (ja) * 1984-12-17 1986-06-30 Toshiba Corp 積層型変位発生素子及びその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140173A (ja) * 1982-02-15 1983-08-19 Seiko Epson Corp 固体変位装置
JPS59204288A (ja) * 1983-05-04 1984-11-19 Nippon Soken Inc 積層セラミツク圧電体
JPS59231884A (ja) * 1983-06-15 1984-12-26 Nippon Soken Inc 積層形圧電体
JPS60176282A (ja) * 1984-02-22 1985-09-10 Toyota Motor Corp 積層型圧電磁器およびその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142780A (ja) * 1984-12-17 1986-06-30 Toshiba Corp 積層型変位発生素子及びその製造方法

Also Published As

Publication number Publication date
US4978881A (en) 1990-12-18

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