JPH02188940A - 試料処理用プリアライメント装置 - Google Patents

試料処理用プリアライメント装置

Info

Publication number: JPH02188940A
Authority: JP; Japan
Prior art keywords: specimen; sample; guide rail; wafer; caught
Prior art date: 1989-01-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1008875A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0334218B2 (de

Inventor

Yasuaki Yokoyama

泰顕横山

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SOKUEISHIYA KK

Original Assignee

SOKUEISHIYA KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-01-17

Filing date

1989-01-17

Publication date

1990-07-25

1989-01-17 Application filed by SOKUEISHIYA KK filed Critical SOKUEISHIYA KK

1989-01-17 Priority to JP1008875A priority Critical patent/JPH02188940A/ja

1990-07-25 Publication of JPH02188940A publication Critical patent/JPH02188940A/ja

1991-05-21 Publication of JPH0334218B2 publication Critical patent/JPH0334218B2/ja

Status Granted legal-status Critical Current

Links

230000007246 mechanism Effects 0.000 claims abstract description 26
230000032258 transport Effects 0.000 claims description 15
238000000034 method Methods 0.000 abstract description 11
230000008569 process Effects 0.000 abstract description 9
239000002699 waste material Substances 0.000 abstract description 4
235000012431 wafers Nutrition 0.000 description 48
238000004519 manufacturing process Methods 0.000 description 4
230000007723 transport mechanism Effects 0.000 description 4
239000000463 material Substances 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
238000010586 diagram Methods 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
241000257465 Echinoidea Species 0.000 description 1
230000009471 action Effects 0.000 description 1
230000008901 benefit Effects 0.000 description 1
229910001873 dinitrogen Inorganic materials 0.000 description 1
230000000694 effects Effects 0.000 description 1
230000003028 elevating effect Effects 0.000 description 1
239000007789 gas Substances 0.000 description 1
230000008676 import Effects 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
238000005259 measurement Methods 0.000 description 1
239000000203 mixture Substances 0.000 description 1
229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
238000005192 partition Methods 0.000 description 1
230000004044 response Effects 0.000 description 1
239000007921 spray Substances 0.000 description 1
230000002747 voluntary effect Effects 0.000 description 1

Landscapes

Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

JP1008875A 1989-01-17 1989-01-17 試料処理用プリアライメント装置 Granted JPH02188940A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1008875A JPH02188940A (ja)	1989-01-17	1989-01-17	試料処理用プリアライメント装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1008875A JPH02188940A (ja)	1989-01-17	1989-01-17	試料処理用プリアライメント装置

Publications (2)

Publication Number	Publication Date
JPH02188940A true JPH02188940A (ja)	1990-07-25
JPH0334218B2 JPH0334218B2 (de)	1991-05-21

Family

ID=11704857

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1008875A Granted JPH02188940A (ja)	1989-01-17	1989-01-17	試料処理用プリアライメント装置

Country Status (1)

Country	Link
JP (1)	JPH02188940A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2008074576A (ja) *	2006-09-22	2008-04-03	Olympus Corp	基板搬送システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS495672A (de) *	1972-05-02	1974-01-18

1989
- 1989-01-17 JP JP1008875A patent/JPH02188940A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS495672A (de) *	1972-05-02	1974-01-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2008074576A (ja) *	2006-09-22	2008-04-03	Olympus Corp	基板搬送システム

Also Published As

Publication number	Publication date
JPH0334218B2 (de)	1991-05-21

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