JPH0219959Y2 - - Google Patents

Info

Publication number
JPH0219959Y2
JPH0219959Y2 JP1985083910U JP8391085U JPH0219959Y2 JP H0219959 Y2 JPH0219959 Y2 JP H0219959Y2 JP 1985083910 U JP1985083910 U JP 1985083910U JP 8391085 U JP8391085 U JP 8391085U JP H0219959 Y2 JPH0219959 Y2 JP H0219959Y2
Authority
JP
Japan
Prior art keywords
boat
diffusion
wafer
attached
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985083910U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61201340U (sr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985083910U priority Critical patent/JPH0219959Y2/ja
Publication of JPS61201340U publication Critical patent/JPS61201340U/ja
Application granted granted Critical
Publication of JPH0219959Y2 publication Critical patent/JPH0219959Y2/ja
Expired legal-status Critical Current

Links

JP1985083910U 1985-06-05 1985-06-05 Expired JPH0219959Y2 (sr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985083910U JPH0219959Y2 (sr) 1985-06-05 1985-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985083910U JPH0219959Y2 (sr) 1985-06-05 1985-06-05

Publications (2)

Publication Number Publication Date
JPS61201340U JPS61201340U (sr) 1986-12-17
JPH0219959Y2 true JPH0219959Y2 (sr) 1990-05-31

Family

ID=30632962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985083910U Expired JPH0219959Y2 (sr) 1985-06-05 1985-06-05

Country Status (1)

Country Link
JP (1) JPH0219959Y2 (sr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0519951Y2 (sr) * 1987-10-20 1993-05-25

Also Published As

Publication number Publication date
JPS61201340U (sr) 1986-12-17

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