JPH0224535U - - Google Patents
Info
- Publication number
- JPH0224535U JPH0224535U JP10106788U JP10106788U JPH0224535U JP H0224535 U JPH0224535 U JP H0224535U JP 10106788 U JP10106788 U JP 10106788U JP 10106788 U JP10106788 U JP 10106788U JP H0224535 U JPH0224535 U JP H0224535U
- Authority
- JP
- Japan
- Prior art keywords
- radicals
- ashing
- photoresist
- processing gas
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004380 ashing Methods 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10106788U JPH0224535U (2) | 1988-07-29 | 1988-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10106788U JPH0224535U (2) | 1988-07-29 | 1988-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0224535U true JPH0224535U (2) | 1990-02-19 |
Family
ID=31329721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10106788U Pending JPH0224535U (2) | 1988-07-29 | 1988-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0224535U (2) |
-
1988
- 1988-07-29 JP JP10106788U patent/JPH0224535U/ja active Pending
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