JPH02273952A - Method of inserting wire into a capillary - Google Patents
Method of inserting wire into a capillaryInfo
- Publication number
- JPH02273952A JPH02273952A JP1096949A JP9694989A JPH02273952A JP H02273952 A JPH02273952 A JP H02273952A JP 1096949 A JP1096949 A JP 1096949A JP 9694989 A JP9694989 A JP 9694989A JP H02273952 A JPH02273952 A JP H02273952A
- Authority
- JP
- Japan
- Prior art keywords
- capillary
- wire
- vibrator
- vibration
- bonding arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07141—Means for applying energy, e.g. ovens or lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07168—Means for storing or moving the material for the connector
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07502—Connecting or disconnecting of bond wires using an auxiliary member
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
- H10W72/07531—Techniques
- H10W72/07532—Compression bonding, e.g. thermocompression bonding
- H10W72/07533—Ultrasonic bonding, e.g. thermosonic bonding
Landscapes
- Wire Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は半導体部品の第1ボンド点(例えばベレット)
と第2ボンド点(例えばリード)との間にワイヤをキャ
ピラリで接続するワイヤボンダにおけるキャピラリへの
ワイヤ通し方法に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a first bonding point (for example, a bullet) of a semiconductor component.
The present invention relates to a method for passing a wire through a capillary in a wire bonder that connects a wire with a capillary between a wire and a second bond point (for example, a lead).
[従来の技術]
ワイヤが巻回されたスプールを交換する時及びワイヤボ
ンダの作動中にワイヤが切れてキャピラリより抜けた時
は、ワイヤの先端をキャピラリの穴へ通して該キャピラ
リの下端に突出させる作業を必要とする。[Prior Art] When replacing the spool on which the wire is wound or when the wire breaks and comes out of the capillary during operation of the wire bonder, the tip of the wire is passed through the hole in the capillary and protrudes from the lower end of the capillary. Requires work.
従来、かかるワイヤ通し作業は、ワイヤの先端部を手で
持って挿入している。Conventionally, such a wire threading operation is performed by holding the tip of the wire by hand.
[発明が解決しようとする課題]
上記従来技術は、ワイヤをキャピラリに通す時に、ワイ
ヤがキャピラリの内面にくっついてスムースに挿入され
なく、多大の時間を要すると共に、熟練を必要とすると
いう問題があった。[Problems to be Solved by the Invention] The above conventional technology has the problem that when passing the wire through the capillary, the wire sticks to the inner surface of the capillary and cannot be inserted smoothly, which takes a lot of time and requires skill. there were.
本発明の目的は、ワイヤをキャピラリにスムースに通す
ことができるキャピラリへのワイヤ通し方法を提供する
ことにある。An object of the present invention is to provide a method for passing a wire through a capillary, which allows the wire to be passed through the capillary smoothly.
[課題を解決するための手段]
上記目的は、ワイヤをキャピラリに通す時に、該キャピ
ラリに超音波振動を与えることにより達成される。[Means for Solving the Problem] The above object is achieved by applying ultrasonic vibration to the capillary when passing the wire through the capillary.
[作用]
ワイヤを通す時にキャピラリに振動を与えると、キャピ
ラリへのワイヤのくっつきが防止され、また両者の摩擦
抵抗も少なくなるので、スムースに通すことができる。[Function] Applying vibration to the capillary when passing the wire through the wire prevents the wire from sticking to the capillary and also reduces the frictional resistance between the two, allowing the wire to pass through the capillary smoothly.
[実施例]
以下、本発明の一実施例を第1図により説明する。XY
子テーブル上にはボンディングヘッド2が搭載されてお
り、このボンディングヘッド2には図示しない駆動手段
で上下動又は回動させられるポンディングアーム3が設
けられている。ボンディングアーム3には、一端にキャ
ピラリ4が固定され、他端に振動子5が固定されている
。前記キャピラリ4には、スプール6に巻回されたワイ
ヤ7がガイド8.クランパ9を経てキャピラリ4に挿通
されている。また前記振動子5には振動源lOが接続さ
れている。[Example] Hereinafter, an example of the present invention will be described with reference to FIG. XY
A bonding head 2 is mounted on the child table, and this bonding head 2 is provided with a bonding arm 3 that can be moved up and down or rotated by a drive means (not shown). A capillary 4 is fixed to one end of the bonding arm 3, and a vibrator 5 is fixed to the other end. A wire 7 wound around a spool 6 is attached to the capillary 4 through a guide 8. It is inserted into the capillary 4 via the clamper 9. Further, a vibration source lO is connected to the vibrator 5.
ところで、キャピラリ4にワイヤ7を通す時は、振動源
lOのスイッチをONにする。これにより、振動子5に
電圧・電流が印加され、ポンディングアーム3を介して
キャピラリ4は振動する。このキャピラリ4の超音波振
動により、ワイヤ7がキャピラリ4の内面にくっつくの
が防止され、またワイヤ7とキャピラリ4との摩擦抵抗
が軽減されるので、ワイヤ7をスムースにキャピラリ4
に通すすることができる。By the way, when passing the wire 7 through the capillary 4, the vibration source lO is turned on. As a result, voltage and current are applied to the vibrator 5, and the capillary 4 vibrates via the pounding arm 3. This ultrasonic vibration of the capillary 4 prevents the wire 7 from sticking to the inner surface of the capillary 4, and also reduces the frictional resistance between the wire 7 and the capillary 4, so that the wire 7 can be smoothly inserted into the capillary 4.
can be passed through.
なお、超音波方式のワイヤボンダにおいては、振動子5
及び振動源lOを備えているので、それを用いることに
より容易に行える。超音波方式ではない例えば熱圧着方
式のワイヤボンダにおいては、振動源10に接続された
振動子5をポンディングアーム3に取付けるか、又は振
動子5をポンディングアーム3に当てて用いることによ
り実施できる。In addition, in the ultrasonic wire bonder, the vibrator 5
Since it is equipped with a vibration source 10 and a vibration source 10, it can be easily performed by using it. For example, in a thermocompression type wire bonder that is not an ultrasonic type, this can be carried out by attaching the vibrator 5 connected to the vibration source 10 to the bonding arm 3, or by applying the vibrator 5 to the bonding arm 3. .
[発明の効果]
以上の説明から明らかなように、本発明によれば、ワイ
ヤをキャピラリに通す時に、該キャピラリに超音波振動
を与えるので、短時間にしかも熟練を要することなくス
ムースに挿入できる。[Effects of the Invention] As is clear from the above description, according to the present invention, when a wire is passed through a capillary, ultrasonic vibration is applied to the capillary, so that the wire can be inserted smoothly in a short time and without requiring any skill. .
第1図は本発明の一実施例の方法に用いるワイヤボンダ
の一例を示す説明図である。
3:ポンディングアーム、
:キャビラリ。
5:振動子。
ニスプール。
7:ワイヤ、
O:振動源。
第1図
3:庄2ンテ′°イ〉デフーム
4:キャビうり
5:挿tfi+
6:スプール
7:ワイヤ
10:像釧n厭FIG. 1 is an explanatory diagram showing an example of a wire bonder used in a method according to an embodiment of the present invention. 3: Ponding arm, : Cavillary. 5: Vibrator. Nispur. 7: Wire, O: Vibration source. Fig. 1 3: Sho 2 te'°i〉Deform 4: Cab ridge 5: Insertion tfi+ 6: Spool 7: Wire 10: Image holder
Claims (1)
し、半導体部品の第1ボンド点と第2ボンド点間にワイ
ヤをキャピラリで接続するワイヤボンダにおいて、ワイ
ヤをキャピラリに通す時に、該キャピラリに超音波振動
を与えることを特徴とするキャピラリへのワイヤ通し方
法。(1) In a wire bonder that inserts a wire wound around a spool into a capillary and connects the wire between the first bond point and the second bond point of a semiconductor component using the capillary, when the wire is passed through the capillary, the capillary A method for passing a wire through a capillary, characterized by applying sonic vibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1096949A JPH02273952A (en) | 1989-04-17 | 1989-04-17 | Method of inserting wire into a capillary |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1096949A JPH02273952A (en) | 1989-04-17 | 1989-04-17 | Method of inserting wire into a capillary |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02273952A true JPH02273952A (en) | 1990-11-08 |
Family
ID=14178549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1096949A Pending JPH02273952A (en) | 1989-04-17 | 1989-04-17 | Method of inserting wire into a capillary |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02273952A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5136052A (en) * | 1990-06-05 | 1992-08-04 | U C B, S.A. | Process for the manufacture of n-phenylmaleimide |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131744A (en) * | 1982-01-29 | 1983-08-05 | Shinkawa Ltd | Method of passing wire through capillary in wire bonder |
-
1989
- 1989-04-17 JP JP1096949A patent/JPH02273952A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58131744A (en) * | 1982-01-29 | 1983-08-05 | Shinkawa Ltd | Method of passing wire through capillary in wire bonder |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5136052A (en) * | 1990-06-05 | 1992-08-04 | U C B, S.A. | Process for the manufacture of n-phenylmaleimide |
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