JPH0243090Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] This invention relates to a sample holder positioning device such as an electron beam exposure apparatus.

[Prior art]

In electron beam exposure equipment, a sample holder with a sample such as a glass mask or silicon wafer mounted on a stage inside a vacuum chamber is used for exposure.
Positional accuracy and reproducibility accuracy of the sample are essential for improving drawing accuracy, and it is necessary not only to position the sample to the holder but also to position the sample holder to the stage.

FIG. 1 is a plan view showing a conventional sample holder positioning device. In the figure, reference numeral 1 denotes a holder for mounting a sample, which is adapted to be mounted on a stage 2. The stage 2 has a guide 3 for mounting the holder 1, a stopper 4 provided at the front end of one guide 3 and the holder 1 in the direction of movement, and a spring 5 provided on the other guide 3. There is.

In the above configuration, the holder 1 with the sample attached
is inserted in the X direction along the guide 3 of the stage 2, and is fixed against the stopper 4. In the installed state, the holder 1 is held against the stopper 4 by the spring 5.
is pressed and positioned.

However, in the above-mentioned conventional apparatus, since there is no pressing force by the spring in the The drawback was that accuracy decreased.

[Purpose of invention]

This idea is intended to improve the above drawbacks.
Two stoppers are provided on one side of the sample holder or the stage, and a V that engages with these stoppers is provided on the other side.
Positioning accuracy in both the X and Y directions is improved by providing a letter-shaped opposing surface and a flat opposing surface, as well as a two-position switching mechanism that presses the peripheral edge of the holder at the mounting position of the holder and releases the pressure when the holder is pulled out. It is an object of the present invention to provide a sample holder positioning device that can increase the height of the sample and maintain the flatness accuracy of the sample.

[Structure of the idea]

This idea consists of a holder for mounting a sample, a stage for mounting this holder, two stoppers provided on the holder or the stage, and a V-shape provided on the other side of the holder or stage to face these stoppers. When the holder is attached, the stopper and the opposing surface are switched to a position where the peripheral edge of the holder is pressed, and when the holder is pulled out, the pressure is released. This is a sample holder positioning device characterized by comprising a two-position switching mechanism.

[Example of idea]

This invention will be explained below with reference to embodiments of the drawings. FIG. 2 is a plan view showing a sample positioning device according to an embodiment of the invention, FIG. 3 is a sectional view taken along line A-A, and FIGS.
This is a corresponding sectional view, and the same reference numerals as in FIG. 1 indicate the same or corresponding parts.

In the figure, two stoppers 4 are provided at the front end of the stage 2 in the advancing direction (X direction) of the holder 1. Opposed to this stopper 4, the holder 1
An engaging member 7 having a V-shaped opposing surface 6 and an engaging member 9 having a flat opposing surface 8 are disposed at the distal end thereof.
is not set up. The stage 2 is provided with a two-position switching mechanism 10 that presses the peripheral edge of the holder 1 in the X direction at the mounting position of the holder 1.
The pressure is released at the pulled out position.

The two-position switching mechanism 10 includes a base 11 fixed to the stage 2, a rotary plate 13 attached to the base 11 with a pin 12 so as to be rotatable back and forth, and two rods extending in the same direction from both ends of the rotary plate 13. arms 14, 15 of the rotating plate 13,
The tension spring 16 provided between the point on the 15 side and the base 11 and the tension spring 16 provided between the point on the 15 side and the base 11,
A roller 18 is provided at the tip of the arm 14 on the stage 2 side so as to be in contact with the outside of the pressing part 17 formed on the peripheral edge of the holder 1 when the holder 1 is attached.
a roller 20 provided on the opposite arm 15 so as to contact the inner surface of the pressing portion 17 through the hole 19;
a stopper 21 for regulating the rotation range of the rotating plate 13;
22.

Reference numeral 23 denotes a stopper that restricts the upper surface of the holder 1, and the holder 1 is configured to rise from the moving surface 24 and abut against the stopper 23 in the mounting position, but the vertical mechanism is not shown.

In the above configuration, FIGS. 2 and 3 show a state in which the holder 1 is attached to the stage 2. To install the holder 1, insert the holder 1 in the X direction along the guide 3 of the stage 2, press the outside of the pressing part 17 of the holder 1 against the roller 18, and then remove the holder 1 is advanced in the X direction, the pressing portion 17 pushes the roller 18, the spring 15 expands, and the rotary plate 13 reaches the neutral point as shown in FIG. When the holder 1 is further pushed, the spring 16 turns to the contraction direction, and the roller 2
0 hits the inner surface of the pressing part 17, and the spring 16
The holder 1 advances further due to the tensile force of , and stops at the mounting position shown in FIGS. 2 and 3. At this position, the holder 1 is moved to the moving surface 24 by a vertical mechanism (not shown).
It is pushed up and positioned from the position indicated by the solid line in FIG.

In the mounted state shown in FIGS. 2 and 3, the roller 20 presses the pressing part 17 of the holder 1 due to the tensile force of the spring 16, so the V of the engaging member 7
The holder 1 is positioned in both the X and Y directions because the letter-shaped opposing surface 6 engages with one stopper 4 and the flat opposing surface 8 of the engaging member 9 engages with the other stopper 4. . Positioning in the vertical direction is performed by a stopper 23.

When pulling out the holder 1, perform the reverse operation and pull out the holder 1 in the opposite direction to the X direction.
pushes the roller 20, and when the neutral point shown in FIG.

In this way, the holder 1 is pressed and released at the two switching positions of the two-position switching mechanism 10, and when the holder 1 is in the pressed state, the stopper 4
By engaging the V-shaped and flat facing surfaces 6 and 8, positioning in the X and Y directions can be performed.
Positioning in the X and Y directions is possible with the stopper 4 and the V-shaped facing surface 6, but if the V-shaped facing surfaces 6 are formed on both the engaging members 7 and 9, the engaging members 7,
Positioning accuracy in the X and Y directions will decrease due to variations in the mounting positions of the mounting points 9, but by making one side a flat opposing surface 8, even if there are variations,
Positioning can be performed with good reproducibility.

In the above description, the number of the stoppers 4 and the engaging members 7, 9 may be at least two, and may be three or more. In addition, in the above embodiment, stage 2
Although the stopper 4 is provided on the side and the engaging members 7 and 9 are provided on the holder 1 side, one or both of them may be reversed. The structure of the stopper 4 can be pin-shaped, protrusion-shaped, or other structures. Further, the structure of the two-position switching mechanism 10 may also be changed.

The present invention is applicable not only to an electron beam exposure apparatus but also to a sample holder positioning apparatus for other apparatuses in which a flat sample is attached to a holder and processed.

[Effect of idea]

According to the present invention, the periphery of the holder is pressed by the two-position switching mechanism, and the V-shaped opposing surface and the flat opposing surface that engage with the stopper in the pressed state position the holder.
In addition to being able to accurately position the sample in both the X and Y directions, there is no need to press the outside of the holder, and the flatness of the sample can be maintained.

[Brief explanation of drawings]

Fig. 1 is a plan view showing a conventional sample holder positioning device, Fig. 2 is a plan view showing an embodiment of this invention, Fig. 3 is a sectional view taken along line A-A, and Figs. 4 and 5 show operation. It is a sectional view corresponding to A-A showing a state. In each figure, the same reference numerals indicate the same or corresponding parts, 1 is the holder, 2 is the stage, 4, 21, 2
2 and 23 are stoppers, 6 is a V-shaped opposing surface, 8 is a flat opposing surface, 10 is a two-position switching mechanism, 11 is a base, 13 is a rotating plate, 14 and 15 are arms, 1
6 is a spring, and 18 and 20 are rollers.

Claims (1)

[Claims for Utility Model Registration] (1) A holder for mounting a sample, a stage for mounting this holder, two stoppers provided on the holder or stage, and a stopper on the holder or stage opposite to these stoppers. When the holder is attached, the holder is switched to a position where the peripheral edge of the holder is pressed so that the V-shaped opposing surface and the flat opposing surface provided on the other side are engaged with the stopper and the opposing surface, and when the holder is pulled out, A sample holder positioning device comprising: a two-position switching mechanism that switches to a position where pressure is released. (2) The sample holder positioning device according to claim 1, wherein the V-shaped opposing surface and the flat opposing surface are formed on an engaging member attached to the holder. (3) The sample holder positioning device according to claim 1 or 2, wherein the two-position switching mechanism presses the peripheral edge of the holder through a hole formed in the holder. (4) The two-position switching mechanism includes a base fixed to the stage, a rotary plate attached to this base,
Two arms that push from both sides of this rotating plate,
A utility model registered as claimed in any one of claims 1 to 3, comprising a tension spring provided between a rotary plate and a base, and a roller provided at the tip of the arm and in contact with the holder in the pressing direction or the pulling direction. The sample holder positioning device described in .