JPH0244738B2 - - Google Patents
Info
- Publication number
- JPH0244738B2 JPH0244738B2 JP60267509A JP26750985A JPH0244738B2 JP H0244738 B2 JPH0244738 B2 JP H0244738B2 JP 60267509 A JP60267509 A JP 60267509A JP 26750985 A JP26750985 A JP 26750985A JP H0244738 B2 JPH0244738 B2 JP H0244738B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- arm
- thin plate
- carrier
- take
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Controlling Sheets Or Webs (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60267509A JPS62130938A (ja) | 1985-11-29 | 1985-11-29 | 薄板状物体の取出し装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60267509A JPS62130938A (ja) | 1985-11-29 | 1985-11-29 | 薄板状物体の取出し装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62130938A JPS62130938A (ja) | 1987-06-13 |
| JPH0244738B2 true JPH0244738B2 (de) | 1990-10-05 |
Family
ID=17445827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60267509A Granted JPS62130938A (ja) | 1985-11-29 | 1985-11-29 | 薄板状物体の取出し装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130938A (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01297836A (ja) * | 1988-05-25 | 1989-11-30 | Nec Kyushu Ltd | ウェーハ受け渡し装置 |
| WO1992005920A1 (en) * | 1990-09-27 | 1992-04-16 | Genmark Automation | Scanning end effector assembly |
| JP2564708Y2 (ja) * | 1991-09-20 | 1998-03-09 | 東京応化工業株式会社 | ウェハーの移載装置 |
| JPH06169003A (ja) * | 1992-11-27 | 1994-06-14 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
| US5789890A (en) * | 1996-03-22 | 1998-08-04 | Genmark Automation | Robot having multiple degrees of freedom |
| US6121743A (en) * | 1996-03-22 | 2000-09-19 | Genmark Automation, Inc. | Dual robotic arm end effectors having independent yaw motion |
| JPH1064970A (ja) * | 1996-08-23 | 1998-03-06 | Rohm Co Ltd | ウェハ・サーチ方法およびその装置 |
| US6489741B1 (en) | 1998-08-25 | 2002-12-03 | Genmark Automation, Inc. | Robot motion compensation system |
-
1985
- 1985-11-29 JP JP60267509A patent/JPS62130938A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62130938A (ja) | 1987-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |