JPH0245631U - - Google Patents
Info
- Publication number
- JPH0245631U JPH0245631U JP12617788U JP12617788U JPH0245631U JP H0245631 U JPH0245631 U JP H0245631U JP 12617788 U JP12617788 U JP 12617788U JP 12617788 U JP12617788 U JP 12617788U JP H0245631 U JPH0245631 U JP H0245631U
- Authority
- JP
- Japan
- Prior art keywords
- lower electrode
- top surface
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は一実施例を示す部分断面図、第２図は
本考案が適用されるブラズマＣＶＤ装置を概略的
に示す斜視図、第３図及び第４図は従来の下部電
極を示す部分断面図である。 １０……下部電極、２，３……ウエハ、１８，
１８ａ，１８ｂ……凹部。
本考案が適用されるブラズマＣＶＤ装置を概略的
に示す斜視図、第３図及び第４図は従来の下部電
極を示す部分断面図である。 １０……下部電極、２，３……ウエハ、１８，
１８ａ，１８ｂ……凹部。
Claims (1)
- 上面に多重の円形凹部が、内側の円ほど深さが
深くなるように形成されている半導体製造装置の
下部電極。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988126177U JPH0713217Y2 (ja) | 1988-09-24 | 1988-09-24 | 半導体製造装置の下部電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988126177U JPH0713217Y2 (ja) | 1988-09-24 | 1988-09-24 | 半導体製造装置の下部電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0245631U true JPH0245631U (ja) | 1990-03-29 |
| JPH0713217Y2 JPH0713217Y2 (ja) | 1995-03-29 |
Family
ID=31377453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988126177U Expired - Lifetime JPH0713217Y2 (ja) | 1988-09-24 | 1988-09-24 | 半導体製造装置の下部電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713217Y2 (ja) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522140U (ja) * | 1978-07-28 | 1980-02-13 | ||
| JPS6054449A (ja) * | 1983-09-05 | 1985-03-28 | Toshiba Corp | 半導体ウエハ搬送治具 |
| JPS6167922A (ja) * | 1984-09-12 | 1986-04-08 | Fujitsu Ltd | プラズマ処理装置 |
-
1988
- 1988-09-24 JP JP1988126177U patent/JPH0713217Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5522140U (ja) * | 1978-07-28 | 1980-02-13 | ||
| JPS6054449A (ja) * | 1983-09-05 | 1985-03-28 | Toshiba Corp | 半導体ウエハ搬送治具 |
| JPS6167922A (ja) * | 1984-09-12 | 1986-04-08 | Fujitsu Ltd | プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713217Y2 (ja) | 1995-03-29 |