JPH0254767A - Differential pressure sealing device - Google Patents

Abstract

PURPOSE:To maintain high differential pressure by a simplified structure by enclosing the outside periphery of a guide roll with a sealing attachment practically over a semicircle and forming the barrel of the roll in a foil-laying region into small diameter. CONSTITUTION:In a differential pressure sealing device, a guide roll 2 is formed so that a roll barrel in a region where a long-size foil 1 is laid has a diameter d2 smaller than a diameter (d) in the regions in the vicinities of both ends. The outside periphery of the guide roll 2 is enclosed by a sealing attachment 3 practically over a semicircle. This attachment 3 is provided with a sealing surface S forming a minute clearance (delta) in close vicinity to the roll surface between both ends of the guide roll 2 and the outside surface of the long-size foil 1 in the foil-laying region and an opening (h) communicating with a differential pressure chamber and forming the path of the foil. By this method, the amount of leakage from the minute clearance formed by the guide roll 2 and the sealing attachment 3 is reduced, and high differential pressure sealing can be attained.

Description

Detailed Description of the Invention (Industrial Field of Application) Vacuum deposition and ion blasting while continuously feeding a long ribbon, such as a cold-rolled or hot-rolled steel sheet, to a vacuum area. Alternatively, when surface treatment is performed using the so-called dry rating method such as sputtering, an air-to-air method is used in which the degree of vacuum is sequentially increased and then lowered between multiple spatial regions with different pressures (hereinafter referred to as differential pressure chambers). will be adopted. The present invention relates to a differential pressure sealing device suitable for use when vacuum processing a long ribbon using such an air-to-air method.

(Prior art) Regarding differential pressure sealing devices, for example, Japanese Patent Application No. 12101/1983
Specification No. 6 discloses a structure in which a single guide roll for guiding winding of a long ribbon is combined with a sealing attachment surrounding the single guide roll.

(Problems to be Solved by the Invention) The device disclosed in the above specification has the advantage of being able to maintain a high differential pressure simply by winding a long ribbon around a guide roll, but it requires particularly high processing accuracy. In addition to machining, the production of sealing attachments requires additional processes such as overlaying and thermal spraying, leaving room for further improvement.

It is an object of the present invention to propose a differential pressure sealing device that has a simple structure and can maintain a high differential pressure.

(Means for Solving the Problems) The present invention provides a differential pressure seal that maintains the pressure difference between spatial regions having a pressure difference and guides continuous passage of a long ribbon between the spatial regions. A single guide roll that guides the winding of the long thin strip at the boundary of The roll cylinder has a smaller diameter than the area near both ends, and the sealing attachment is located close to the roll surface up to both ends of the guide roll and the outer surface of the long ribbon wound around the guide roll. This differential pressure sealing device is characterized by having a sealing surface that forms a minute gap and an opening that communicates with the spatial regions to form a passage for the long ribbon.

FIGS. 1(a), (b), (c) and (d) illustrate the configuration of a differential pressure sealing device according to the present invention,
In the figure, 1 is a long thin ribbon, 2 is a single guide roll for guiding the winding of the long thin ribbon 1, and the roll cylinder in the winding area A of the long thin ribbon 1 is located at both ends of the guide roll 2. The diameter (dl) is smaller than the diameter (d) of the area near the area. Reference numeral 3 denotes a sealing attachment that surrounds the outer periphery of the guide roll 2 over approximately half the circumference, and this attachment 3 is close to the roll surface up to both ends of the guide roll 1 and the outer surface of the long thin ribbon 1 in the winding area A. A sealing surface S that forms a minute gap δ, and an opening that communicates with a differential pressure chamber (not shown) and forms a passage for the elongated ribbon 1.

FIG. 2 shows partition walls 4a, 4b, 4c, and 4d of a differential pressure chamber 4 in which a plurality of differential pressure seal devices shown in FIG. 1 above are connected.
An example will be shown in which the long ribbon 1 is transported from the atmosphere to a vacuum chamber (not shown) or from the vacuum chamber to the atmosphere.

(Function) Normally, the guide roll 2 that guides the winding of the long thin ribbon 1 and the sealing attachment 3 are, for example, shown in Fig. 3(a).
It has a structure as shown in b), but in order to maintain a high differential pressure here, the sealing surface SI+ sz of the sealing attachment 3 must be precisely machined and the guide roll 2
The gap formed between the guide roll 2 and the long ribbon 1 wound around the guide roll 2 must be made as small as possible as long as it does not hinder the rotation of the guide roll 2.

However, in the case of the structure shown in FIGS. 3(a) and 3(b), if the sealing surface S2 in the part where the long ribbon 1 passes is not processed, gaps in other areas will become large. Seal surface s.

It is necessary to cut down the necessary 0 copies by -tan.

This driving process only needs to process the sealing surface s2 through which the long ribbon 1 passes, but since it is circular machining, other parts (sealing surface s+ through which the long ribbon 1 does not pass) are processed.
) must also be processed, creating an extra gap and causing a decline in sealing performance. Therefore, the sealing surface s2
After processing, the 0 part must be built up by overlaying or thermal spraying and then machined again, making it extremely difficult to manufacture sealing attachments that require high processing accuracy.

Therefore, in the present invention, the diameter (dl) of the roll body in the region where the thin strip 1 is wound on the guide roll 2 is increased by the thickness and width (including allowance) of the thin strip 1 to the diameter of the end region. (d
), and on the other hand, the sealing attachment 3 is formed with a sealing surface S only by machining, and the surface of the guide roll 1 and the thin strip 1 wound around the guide roll 1 are formed.
The structure was designed so that it could be as close to the outside surface of the body as possible.

The sealing attachment 3 of the differential pressure sealing device illustrated in FIG. After processing the convex arc-shaped sealing surface s(s"), the sealing surface s(s") (broken line in the figure) corresponding to the outer surface of the long ribbon 1 wound around the guide roll 2 is rotated by the rotation of the guide roll 2. It is cut in such a way that it does not cause any problems.

Further, FIG. 4 shows another example of the differential pressure sealing device according to the present invention. In this device, the roll cylinder of the guide rollner has a diameter (d2) smaller than the diameter (d) of the area near both ends thereof, and the sealing attachment 3 has a position facing the winding area A of the long thin strip 1. Also has a convex arc-shaped sealing surface s (s″)
This is a format with a . This type of device provides resistance to air entering from the longitudinal sides of the guide roll 1, and is therefore particularly advantageous in realizing a high differential pressure seal in a viscous flow region.

In addition, this invention has the advantage that the gap area of the minute gap δ formed by the guide roll 2 and the sealing attachment 3 can be reduced by approximately 30% compared to the type shown in FIG. .

(Effects of the Invention) According to the present invention, it is possible to easily and precisely process the sealing attachment, which constitutes the differential pressure sealing device, without going through any extra work steps, and to process the guide roll and the sealing attachment. A higher differential pressure seal can be achieved by reducing the amount of leakage from the small gap formed between the two.

[Brief explanation of the drawing]

Figures 1 (a), (b), (c) and (d) are explanatory diagrams of the configuration of the differential pressure sealing device according to the present invention, Figure 2 is a diagram showing the usage status of the differential pressure sealing device according to the present invention, and Figure 3. (a) (b) are schematic diagrams of a conventional differential pressure sealing device, and FIGS. 4(a), (b), (c), and (d) are diagrams showing other examples of the differential pressure sealing device according to the present invention. It is. 1... Long ribbon 2... Guide roll 3.
...Sealing attachment 4...Differential pressure chamber 4a, 4b, 4c,
4d-Partition wall SI+ sz...Sealing surface h...Opening Figure 1

Claims (1)

[Claims] 1. In a differential pressure seal that maintains the pressure difference between spatial regions with a pressure difference and induces continuous passage of the long thin strip, the long thin strip is wound at the boundary between the spatial regions. It is equipped with a single guide roll that controls cliff guidance, and a sealing attachment that surrounds the outer circumference of this guide roll for approximately half the circumference. The sealing attachment has a sealing surface that forms a minute gap in close proximity to the roll surface up to both ends of the guide roll and the outer surface of the long ribbon wound around the guide roll; A differential pressure sealing device characterized by having an opening that communicates with the spatial regions to form a passageway for the long ribbon.