JPH0279030U - - Google Patents
Info
- Publication number
- JPH0279030U JPH0279030U JP15881088U JP15881088U JPH0279030U JP H0279030 U JPH0279030 U JP H0279030U JP 15881088 U JP15881088 U JP 15881088U JP 15881088 U JP15881088 U JP 15881088U JP H0279030 U JPH0279030 U JP H0279030U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- gas
- semiconductor pellets
- blowing
- sucking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Die Bonding (AREA)
Description
第１図は本考案の一実施例の概略構成図である
。
１……引き伸ばしリング、２……半導体ペレツ
ト、３……吸着ノズル、４……窒素ブローノズル
、５……流量計。
FIG. 1 is a schematic diagram of an embodiment of the present invention. 1... Stretching ring, 2... Semiconductor pellet, 3... Adsorption nozzle, 4... Nitrogen blow nozzle, 5... Flow meter.
Claims (1)
半導体ペレツト上の異物を吹き飛ばすためのガス
ブロー用ノズルを有し、さらにノズルからの前記
ガス量を制御する制御機構を有することを特徴と
するダイボンダ。 A die bonder comprising: a gas blowing nozzle for blowing off foreign matter on the semiconductor pellets near a vacuum suction part for sucking the semiconductor pellets; and further comprising a control mechanism for controlling the amount of the gas from the nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15881088U JPH0279030U (en) | 1988-12-05 | 1988-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15881088U JPH0279030U (en) | 1988-12-05 | 1988-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0279030U true JPH0279030U (en) | 1990-06-18 |
Family
ID=31439474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15881088U Pending JPH0279030U (en) | 1988-12-05 | 1988-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0279030U (en) |
-
1988
- 1988-12-05 JP JP15881088U patent/JPH0279030U/ja active Pending