JPH0281630U - - Google Patents

Info

Publication number
JPH0281630U
JPH0281630U JP16049188U JP16049188U JPH0281630U JP H0281630 U JPH0281630 U JP H0281630U JP 16049188 U JP16049188 U JP 16049188U JP 16049188 U JP16049188 U JP 16049188U JP H0281630 U JPH0281630 U JP H0281630U
Authority
JP
Japan
Prior art keywords
valve
pressure
liquid
suction valve
discharged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16049188U
Other languages
English (en)
Other versions
JPH059074Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16049188U priority Critical patent/JPH059074Y2/ja
Publication of JPH0281630U publication Critical patent/JPH0281630U/ja
Application granted granted Critical
Publication of JPH059074Y2 publication Critical patent/JPH059074Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の回路図、第２図は
その吸引弁の断面図、第３図は本実施例装置を用
いた場合の被吐出液体が吸引される状態をあらわ
すノズルの断面図、第４図は圧力室内の圧力と流
通室の容積との関係をあらわすグラフであり、第
５図は従来装置を用いた場合の液だれを生じる状
態をあらわすノズルの断面図である。 １：タンク、８：ノズル、９：開閉弁、１０：
制御装置、１２：吸引弁、１６，２３：ダイヤフ
ラム、１８：流通室、２２：圧力室、３１：電空
比例弁、Ｌ：被吐出液体。

Claims (1)

    【実用新案登録請求の範囲】
  1. 被吐出液体の圧送源と下向きに開口して被吐出
    液体を吐出させるノズルとの間に開閉弁を介設す
    るとともに、該開閉弁と前記ノズルとの間に、被
    吐出液体が流通する流通室の容積が該流通室とダ
    イヤフラムによつて仕切られた圧力室に供給され
    るパイロツトエアの圧力によつて増減する吸引弁
    を介設し、該吸引弁に、通電されるパイロツト電
    流の電圧値または電流値に略比例する圧力の前記
    パイロツトエアを該吸引弁に供給する電空比例弁
    を接続し、該電空比例弁を、前記パイロツト電流
    の制御と前記開閉弁の開閉の制御とを互いに独立
    させて行う制御装置に接続したことを特徴とする
    液だれ防止装置。
JP16049188U 1988-12-09 1988-12-09 Expired - Lifetime JPH059074Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16049188U JPH059074Y2 (ja) 1988-12-09 1988-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16049188U JPH059074Y2 (ja) 1988-12-09 1988-12-09

Publications (2)

Publication Number Publication Date
JPH0281630U true JPH0281630U (ja) 1990-06-25
JPH059074Y2 JPH059074Y2 (ja) 1993-03-05

Family

ID=31442600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16049188U Expired - Lifetime JPH059074Y2 (ja) 1988-12-09 1988-12-09

Country Status (1)

Country Link
JP (1) JPH059074Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11333359A (ja) * 1998-05-27 1999-12-07 Tokyo Electron Ltd 塗布膜形成方法
JP2004138178A (ja) * 2002-10-18 2004-05-13 Ckd Corp 流体供給制御装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11333359A (ja) * 1998-05-27 1999-12-07 Tokyo Electron Ltd 塗布膜形成方法
JP2004138178A (ja) * 2002-10-18 2004-05-13 Ckd Corp 流体供給制御装置

Also Published As

Publication number Publication date
JPH059074Y2 (ja) 1993-03-05

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