JPH0289824U - - Google Patents
Info
- Publication number
- JPH0289824U JPH0289824U JP16835388U JP16835388U JPH0289824U JP H0289824 U JPH0289824 U JP H0289824U JP 16835388 U JP16835388 U JP 16835388U JP 16835388 U JP16835388 U JP 16835388U JP H0289824 U JPH0289824 U JP H0289824U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- manufacturing equipment
- semiconductor wafer
- semiconductor manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Description
第１図は本考案の実施例を示す図、第２図は本
考案の実施例の作用を説明するための図、第３図
は従来のサセプターを縦型ＣＶＤ装置と共に示す
図、第４図は考案が解決しようとする課題を説明
するための図である。
図において、１０はサセプター、１１はＳｉＣ
コーテイング、１２はグラフアイト円板、１３は
支持用孔、１４は支持棒挿通用孔、を示す。
FIG. 1 is a diagram showing an embodiment of the present invention, FIG. 2 is a diagram for explaining the operation of the embodiment of the present invention, FIG. 3 is a diagram showing a conventional susceptor together with a vertical CVD apparatus, and FIG. 4 is a diagram showing an embodiment of the present invention. is a diagram for explaining the problem that the invention attempts to solve. In the figure, 10 is a susceptor, 11 is SiC
12 is a graphite disk, 13 is a support hole, and 14 is a support rod insertion hole.
Claims (1)
装入されるサセプターであつて、 上記サセプター１０は円板状をなし、その中央
に下方から半導体ウエハ１８を持ち上げることが
できる支持棒１７が接触しない様に挿通可能な孔
１４が設けられたことを特徴とする半導体製造装
置用サセプター。[Claims for Utility Model Registration] A susceptor that is loaded into semiconductor manufacturing equipment with a semiconductor wafer 18 placed thereon, the susceptor 10 having a disc shape, and capable of lifting the semiconductor wafer 18 from below into the center of the susceptor 10. A susceptor for semiconductor manufacturing equipment, characterized in that a hole 14 is provided through which a support rod 17 can be inserted without contacting the susceptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16835388U JPH0289824U (en) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16835388U JPH0289824U (en) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289824U true JPH0289824U (en) | 1990-07-17 |
Family
ID=31457459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16835388U Pending JPH0289824U (en) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289824U (en) |
-
1988
- 1988-12-28 JP JP16835388U patent/JPH0289824U/ja active Pending
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