JPH03115668U - - Google Patents
Info
- Publication number
- JPH03115668U JPH03115668U JP2536390U JP2536390U JPH03115668U JP H03115668 U JPH03115668 U JP H03115668U JP 2536390 U JP2536390 U JP 2536390U JP 2536390 U JP2536390 U JP 2536390U JP H03115668 U JPH03115668 U JP H03115668U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- heat treatment
- liquid phase
- phase epitaxial
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000007791 liquid phase Substances 0.000 claims description 5
- 239000002223 garnet Substances 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の熱処理炉付液相エピタキシヤ
ル成長炉の概略図。第２図は従来の液相エピタキ
シヤル成長炉の概略図。第３図は遮蔽板の部品図
。 ａ……上面図、ｂ……側面図、１……アルミナ
棒、２……白金ホルダー、３……基板、４……白
金坩堝、５……溶液、６……ヒーター、１１……
液相エピタキシヤル炉、１２……熱処理炉、１３
……遮蔽板、１４……固定爪、１５……アルミナ
棒固定鋏、１６……レール、１３−１……セラミ
ツク板、１３−２……断熱材。
ル成長炉の概略図。第２図は従来の液相エピタキ
シヤル成長炉の概略図。第３図は遮蔽板の部品図
。 ａ……上面図、ｂ……側面図、１……アルミナ
棒、２……白金ホルダー、３……基板、４……白
金坩堝、５……溶液、６……ヒーター、１１……
液相エピタキシヤル炉、１２……熱処理炉、１３
……遮蔽板、１４……固定爪、１５……アルミナ
棒固定鋏、１６……レール、１３−１……セラミ
ツク板、１３−２……断熱材。
Claims (1)
- 磁性ガーネツト膜の育成用液相エピタキシヤル
炉と、ガーネツト熱処理用の温度制御が独立な熱
処理炉とを移動式遮断板を介して連結一体化し、
炉体上部から双方の炉間で移動可能な懸架支持体
を配置したことを特徴とする熱処理炉付液相エピ
タキシヤル成長炉。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2536390U JPH03115668U (ja) | 1990-03-13 | 1990-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2536390U JPH03115668U (ja) | 1990-03-13 | 1990-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115668U true JPH03115668U (ja) | 1991-11-29 |
Family
ID=31528297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2536390U Pending JPH03115668U (ja) | 1990-03-13 | 1990-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115668U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008079984A (ja) * | 2006-09-28 | 2008-04-10 | Sayama Precision Ind Co | 遊技媒体収納箱 |
-
1990
- 1990-03-13 JP JP2536390U patent/JPH03115668U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008079984A (ja) * | 2006-09-28 | 2008-04-10 | Sayama Precision Ind Co | 遊技媒体収納箱 |