JPH0455584U - - Google Patents
Info
- Publication number
- JPH0455584U JPH0455584U JP9863690U JP9863690U JPH0455584U JP H0455584 U JPH0455584 U JP H0455584U JP 9863690 U JP9863690 U JP 9863690U JP 9863690 U JP9863690 U JP 9863690U JP H0455584 U JPH0455584 U JP H0455584U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- under test
- electrical characteristics
- casing
- measuring electrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図ａ，ｂは、本考案の実施例の評価治具を
示した平面図及び断面図である。第２図ａ，ｂは
従来の評価治具の一例を示した平面図及び断面図
である。
図において、１はマイクロ波集積回路測定用基
板、３は被測定素子、８は本発明による吸引用の
穴である。なお、各図中、同一符号は同一または
相当部分を示す。
FIGS. 1a and 1b are a plan view and a sectional view showing an evaluation jig according to an embodiment of the present invention. FIGS. 2a and 2b are a plan view and a sectional view showing an example of a conventional evaluation jig. In the figure, 1 is a substrate for measuring a microwave integrated circuit, 3 is an element to be measured, and 8 is a suction hole according to the present invention. In each figure, the same reference numerals indicate the same or corresponding parts.
Claims (1)
関し、被測定素子と電気的に接続される電極を有
するマイクロ波集積回路測定用基板と、この基板
及び被測定素子を収容する筐体とを備え、前記被
測定素子を、筐体上部のふたに、外部から吸引す
ることにより被測定素子を固定することを特徴と
する半導体素子の電気的特性測定装置。 An apparatus for measuring electrical characteristics of a field effect transistor, comprising: a microwave integrated circuit measuring substrate having an electrode electrically connected to a device under test; and a casing housing the substrate and the device under test; An apparatus for measuring electrical characteristics of a semiconductor device, characterized in that a device to be measured is fixed to a lid at the top of a casing by suctioning the device from the outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9863690U JPH0455584U (en) | 1990-09-18 | 1990-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9863690U JPH0455584U (en) | 1990-09-18 | 1990-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455584U true JPH0455584U (en) | 1992-05-13 |
Family
ID=31839956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9863690U Pending JPH0455584U (en) | 1990-09-18 | 1990-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455584U (en) |
-
1990
- 1990-09-18 JP JP9863690U patent/JPH0455584U/ja active Pending
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