JPH031462U

JPH031462U -

Info

Publication number: JPH031462U
Application number: JP5880489U
Authority: JP
Priority date: 1989-05-22
Filing date: 1989-05-22
Publication date: 1991-01-09

Description

[Brief explanation of drawings]

第１図はこの考案の一実施例を示す無声放電式
ガスレーザ装置の原理構成図、第２図ａ，ｂは上
記無声放電式ガスレーザ装置における放電電流と
高周波電圧の周波数の関係、放電電流と誘電体に
かかる電圧の関係をそれぞれ示す関係図、第３図
は従来の無声放電式ガスレーザ装置の原理構成図
、第４図は上記従来の無声放電式ガスレーザ装置
における放電電流とレーザ出力の関係を示す関係
図、第５図ａ，ｂはそれぞれ従来装置の放電電流
が高い場合と、低い場合の無声放電の状態を示す
構成図である。図において、１ａ，１ｂは誘電体電極、２は真
空容器、２ａ，２ｂは金属電極、３ａ，３ｂは誘
電体、４は高周波高電圧電源、５は無声放電、６
は放電電流、７は全反射鏡、８は部分反射鏡、９
はレーザビーム、１０は電流検出器、１１は増幅
器、１２はオフセツト電圧源、１３はＶ／Ｆコン
バータ、１４は制御手段、１５は実施例の特性、
１６は従来装置の特性である。なお各図中、同一
符号は同一、または相当部分を示す。 Fig. 1 is a principle block diagram of a silent discharge gas laser device showing an embodiment of this invention, and Fig. 2 a and b show the relationship between the discharge current and the frequency of the high-frequency voltage in the silent discharge gas laser device, and the relationship between the discharge current and the dielectric A relationship diagram showing the relationship between the voltage applied to the body, Fig. 3 is a diagram showing the principle configuration of a conventional silent discharge gas laser device, and Fig. 4 shows the relationship between discharge current and laser output in the conventional silent discharge gas laser device. The relational diagrams and FIGS. 5a and 5b are configuration diagrams showing the state of silent discharge when the discharge current of the conventional device is high and low, respectively. In the figure, 1a and 1b are dielectric electrodes, 2 is a vacuum container, 2a and 2b are metal electrodes, 3a and 3b are dielectrics, 4 is a high frequency high voltage power supply, 5 is a silent discharge, and 6
is a discharge current, 7 is a total reflection mirror, 8 is a partial reflection mirror, 9
is a laser beam, 10 is a current detector, 11 is an amplifier, 12 is an offset voltage source, 13 is a V/F converter, 14 is a control means, 15 is a characteristic of the embodiment,
16 is the characteristic of the conventional device. In each figure, the same reference numerals indicate the same or corresponding parts.

Claims

[Scope of utility model registration request]

In a silent discharge gas laser device configured to excite the laser by generating a silent discharge by applying a high frequency and high voltage between both electrodes as at least one dielectric, it corresponds to the rise and fall of the discharge current flowing between the two electrodes. A silent discharge type gas laser device characterized by comprising a control means for increasing or decreasing the frequency of the high-frequency voltage.