JPH031478Y2 - - Google Patents

Info

Publication number
JPH031478Y2
JPH031478Y2 JP1983203947U JP20394783U JPH031478Y2 JP H031478 Y2 JPH031478 Y2 JP H031478Y2 JP 1983203947 U JP1983203947 U JP 1983203947U JP 20394783 U JP20394783 U JP 20394783U JP H031478 Y2 JPH031478 Y2 JP H031478Y2
Authority
JP
Japan
Prior art keywords
storage device
substrate
grooves
substrates
auxiliary storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983203947U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60110464U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983203947U priority Critical patent/JPS60110464U/ja
Publication of JPS60110464U publication Critical patent/JPS60110464U/ja
Application granted granted Critical
Publication of JPH031478Y2 publication Critical patent/JPH031478Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1983203947U 1983-12-28 1983-12-28 基板収容装置 Granted JPS60110464U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983203947U JPS60110464U (ja) 1983-12-28 1983-12-28 基板収容装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983203947U JPS60110464U (ja) 1983-12-28 1983-12-28 基板収容装置

Publications (2)

Publication Number Publication Date
JPS60110464U JPS60110464U (ja) 1985-07-26
JPH031478Y2 true JPH031478Y2 (th) 1991-01-17

Family

ID=30766351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983203947U Granted JPS60110464U (ja) 1983-12-28 1983-12-28 基板収容装置

Country Status (1)

Country Link
JP (1) JPS60110464U (th)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715146B2 (ja) * 1987-08-03 1995-02-22 キヤノン株式会社 堆積膜形成方法

Also Published As

Publication number Publication date
JPS60110464U (ja) 1985-07-26

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