JPH0316656U - - Google Patents

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Publication number
JPH0316656U
JPH0316656U JP7734989U JP7734989U JPH0316656U JP H0316656 U JPH0316656 U JP H0316656U JP 7734989 U JP7734989 U JP 7734989U JP 7734989 U JP7734989 U JP 7734989U JP H0316656 U JPH0316656 U JP H0316656U
Authority
JP
Japan
Prior art keywords
inductively coupled
plasma
frequency inductively
high frequency
mass spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7734989U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7734989U priority Critical patent/JPH0316656U/ja
Publication of JPH0316656U publication Critical patent/JPH0316656U/ja
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案実施例の構成説明図、第２図は
新シールド機構の構成断面図、第３図は高周波誘
導結合プラズマ質量分析計の全体的な構成説明図
である。 １…プラズマトーチ、２…高周波誘導コイル、
４…高周波誘導結合プラズマ、５…ノズル、６…
スキマー、１６…フオアチヤンバー、１８…セン
ターチヤンバー、１９…質量分析計検出器、２１
…リチヤンバー、２３…信号処理部、２４…シー
ルド板、２５…新シールド機構、２５ａ…シール
ド、２５ｂ…覆い、２５ｃ…脚部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高周波誘導結合プラズマを用いて試料を励起し
    生じたイオンを真空中に導入し質量分析計検出器
    に導いて検出することにより前記試料中の被測定
    元素を分析する分析計において、前記高周波誘導
    結合プラズマを生じさせるプラズマトーチと該プ
    ラズマトーチに巻回される高周波誘導コイルとの
    間に前記高周波誘導結合プラズマの後方からシー
    ルドを挿設することを特徴とする高周波誘導結合
    プラズマ質量分析計。
JP7734989U 1989-06-30 1989-06-30 Pending JPH0316656U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7734989U JPH0316656U (ja) 1989-06-30 1989-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7734989U JPH0316656U (ja) 1989-06-30 1989-06-30

Publications (1)

Publication Number Publication Date
JPH0316656U true JPH0316656U (ja) 1991-02-19

Family

ID=31619654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7734989U Pending JPH0316656U (ja) 1989-06-30 1989-06-30

Country Status (1)

Country Link
JP (1) JPH0316656U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0511933U (ja) * 1991-07-25 1993-02-19 パラマウントベツド株式会社 歩行補助器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398948A (ja) * 1986-10-14 1988-04-30 Yokogawa Electric Corp 高周波誘導結合プラズマ・質量分析計

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398948A (ja) * 1986-10-14 1988-04-30 Yokogawa Electric Corp 高周波誘導結合プラズマ・質量分析計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0511933U (ja) * 1991-07-25 1993-02-19 パラマウントベツド株式会社 歩行補助器

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