JPH0366147U - - Google Patents

Info

Publication number
JPH0366147U
JPH0366147U JP12730289U JP12730289U JPH0366147U JP H0366147 U JPH0366147 U JP H0366147U JP 12730289 U JP12730289 U JP 12730289U JP 12730289 U JP12730289 U JP 12730289U JP H0366147 U JPH0366147 U JP H0366147U
Authority
JP
Japan
Prior art keywords
nozzle
sample
inductively coupled
coupled plasma
cooling water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12730289U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12730289U priority Critical patent/JPH0366147U/ja
Publication of JPH0366147U publication Critical patent/JPH0366147U/ja
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案実施例の要部裁断構成斜視図、
第２図は高周波誘導結合プラズマ質量分析計の全
体的な構成説明図、第３図は従来例の要部構成説
明図である。 １……プラズマトーチ、３……アルゴンガス供
給源、７……高周波誘導結合プラズマ、８……ノ
ズル、９……スキマー、１６……マスフイルタ、
１９……光電子増倍管、２０……信号処理部、２
１……ノズル基盤、２２……冷却水導出入口、２
３……流量調節弁、２４……流量制御部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高周波誘導結合プラズマを用いて試料を励起さ
    せ生じたイオンをノズルとスキマーからなるイン
    ターフエイスを介して質量分析計検出器に導いて
    検出することにより前記試料中の被測定元素を分
    析する分析計において、前記ノズルを冷却するた
    めノズル基盤に冷却水を供給する冷却水導入流路
    の途中に流量調節弁を設け、該調節弁を前記試料
    に応じて調節することによつて前記ノズルを一定
    温度に保つことを特徴とする高周波誘導結合プラ
    ズマ質量分析計。
JP12730289U 1989-10-31 1989-10-31 Pending JPH0366147U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12730289U JPH0366147U (ja) 1989-10-31 1989-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12730289U JPH0366147U (ja) 1989-10-31 1989-10-31

Publications (1)

Publication Number Publication Date
JPH0366147U true JPH0366147U (ja) 1991-06-27

Family

ID=31675062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12730289U Pending JPH0366147U (ja) 1989-10-31 1989-10-31

Country Status (1)

Country Link
JP (1) JPH0366147U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101988755B1 (ko) * 2017-12-19 2019-06-12 주식회사 포스코 벨트식 반응로

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63254639A (ja) * 1987-04-11 1988-10-21 Nissin Electric Co Ltd イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63254639A (ja) * 1987-04-11 1988-10-21 Nissin Electric Co Ltd イオン源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101988755B1 (ko) * 2017-12-19 2019-06-12 주식회사 포스코 벨트식 반응로

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