JPH0318171U - - Google Patents

Info

Publication number
JPH0318171U
JPH0318171U JP7649289U JP7649289U JPH0318171U JP H0318171 U JPH0318171 U JP H0318171U JP 7649289 U JP7649289 U JP 7649289U JP 7649289 U JP7649289 U JP 7649289U JP H0318171 U JPH0318171 U JP H0318171U
Authority
JP
Japan
Prior art keywords
light receiving
light
processor
output
melt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7649289U
Other languages
English (en)
Other versions
JP2512705Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989076492U priority Critical patent/JP2512705Y2/ja
Publication of JPH0318171U publication Critical patent/JPH0318171U/ja
Application granted granted Critical
Publication of JP2512705Y2 publication Critical patent/JP2512705Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例を示す融液面レベル測
定装置の模式図、第２図ａは受光位置検出器の出
力波形図、第２図ｂは入力制限処理器の出力波形
図、第２図ｃは平均化処理器の出力波形図、第３
図ａは入力制限処理器の動作を示す波形図、第３
図ｂは平均化処理器の動作を示す波形図、第４図
は従来の融液面レベル測定装置の模式図、第５図
は融液面レベル測定の測定原理を示す模式図であ
る。 Ａ……投射光、Ｂ……反射光、１……融液面、
２……揺ぎ、３……受光素子、４……光源、５…
…受光位置検出器、７……入力制限処理器、９…
…平均化処理器、１１……融液面レベル演算器。

Claims (1)

    【実用新案登録請求の範囲】
  1. 融液面に向けて斜方から光を投射する光源と、
    融液面からの反射光を受光する受光素子を有し、
    該受光素子が受光した反射光の受光位置を検出す
    る受光位置検出器と、該受光位置検出器の出力に
    制限幅を設ける入力制限処理器と、該入力制限処
    理器の出力を平滑化する平均化処理器と、該平均
    化処理器の出力に基づいて融液面レベルを求める
    融液面レベル演算器とを備えることを特徴とする
    融液面レベル測定装置。
JP1989076492U 1989-06-29 1989-06-29 融液面レベル測定装置 Expired - Fee Related JP2512705Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989076492U JP2512705Y2 (ja) 1989-06-29 1989-06-29 融液面レベル測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989076492U JP2512705Y2 (ja) 1989-06-29 1989-06-29 融液面レベル測定装置

Publications (2)

Publication Number Publication Date
JPH0318171U true JPH0318171U (ja) 1991-02-22
JP2512705Y2 JP2512705Y2 (ja) 1996-10-02

Family

ID=31618012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989076492U Expired - Fee Related JP2512705Y2 (ja) 1989-06-29 1989-06-29 融液面レベル測定装置

Country Status (1)

Country Link
JP (1) JP2512705Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4713437U (ja) * 1971-03-18 1972-10-17
JPS5612204U (ja) * 1979-07-06 1981-02-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4713437U (ja) * 1971-03-18 1972-10-17
JPS5612204U (ja) * 1979-07-06 1981-02-02

Also Published As

Publication number Publication date
JP2512705Y2 (ja) 1996-10-02

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Legal Events

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LAPS Cancellation because of no payment of annual fees