JPH03183783A - 窒化チタン膜の形成方法 - Google Patents

窒化チタン膜の形成方法

Info

Publication number: JPH03183783A
Authority: JP; Japan
Prior art keywords: titanium nitride; film; titanium; alkoxide; solution
Prior art date: 1989-12-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP32177889A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0549754B2 (2

Inventor

Yoshimi Tanaka

義身田中

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

AICHI PREF GOV

Aichi Prefecture

Original Assignee

AICHI PREF GOV

Aichi Prefecture

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-12-11

Filing date

1989-12-11

Publication date

1991-08-09

1989-12-11 Application filed by AICHI PREF GOV, Aichi Prefecture filed Critical AICHI PREF GOV

1989-12-11 Priority to JP32177889A priority Critical patent/JPH03183783A/ja

1991-08-09 Publication of JPH03183783A publication Critical patent/JPH03183783A/ja

1993-07-27 Publication of JPH0549754B2 publication Critical patent/JPH0549754B2/ja

Status Granted legal-status Critical Current

Links

NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 title claims abstract description 41
230000015572 biosynthetic process Effects 0.000 title description 7
238000000034 method Methods 0.000 claims abstract description 36
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 35
229910052751 metal Inorganic materials 0.000 claims abstract description 30
239000002184 metal Substances 0.000 claims abstract description 29
238000010438 heat treatment Methods 0.000 claims abstract description 27
239000000243 solution Substances 0.000 claims abstract description 25
-1 titanium alkoxide Chemical class 0.000 claims abstract description 21
229910052757 nitrogen Inorganic materials 0.000 claims abstract description 17
239000010936 titanium Substances 0.000 claims abstract description 17
229910052719 titanium Inorganic materials 0.000 claims abstract description 17
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 16
239000012298 atmosphere Substances 0.000 claims abstract description 16
229910052799 carbon Inorganic materials 0.000 claims abstract description 16
238000001035 drying Methods 0.000 claims abstract description 9
229910052726 zirconium Inorganic materials 0.000 claims abstract description 8
239000011259 mixed solution Substances 0.000 claims abstract description 6
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 28
239000000758 substrate Substances 0.000 claims description 21
238000000576 coating method Methods 0.000 claims description 15
239000011248 coating agent Substances 0.000 claims description 14
229910052742 iron Inorganic materials 0.000 claims description 14
239000000463 material Substances 0.000 abstract description 10
230000007797 corrosion Effects 0.000 abstract description 5
238000005260 corrosion Methods 0.000 abstract description 5
239000000126 substance Substances 0.000 abstract description 5
CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 abstract description 4
230000003301 hydrolyzing effect Effects 0.000 abstract description 2
150000004703 alkoxides Chemical class 0.000 description 11
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 10
VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 10
229910000831 Steel Inorganic materials 0.000 description 9
239000010959 steel Substances 0.000 description 9
238000002441 X-ray diffraction Methods 0.000 description 7
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
239000000919 ceramic Substances 0.000 description 6
239000002932 luster Substances 0.000 description 6
229910021529 ammonia Inorganic materials 0.000 description 5
238000006243 chemical reaction Methods 0.000 description 5
230000000694 effects Effects 0.000 description 5
238000003980 solgel method Methods 0.000 description 5
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
239000002131 composite material Substances 0.000 description 4
235000019441 ethanol Nutrition 0.000 description 4
238000002474 experimental method Methods 0.000 description 4
239000011521 glass Substances 0.000 description 4
239000000203 mixture Substances 0.000 description 4
239000002904 solvent Substances 0.000 description 4
XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 3
KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
229910001315 Tool steel Inorganic materials 0.000 description 3
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical class [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 3
239000002585 base Substances 0.000 description 3
238000007598 dipping method Methods 0.000 description 3
239000012299 nitrogen atmosphere Substances 0.000 description 3
238000005240 physical vapour deposition Methods 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
150000001412 amines Chemical class 0.000 description 2
238000004040 coloring Methods 0.000 description 2
230000000052 comparative effect Effects 0.000 description 2
229910052802 copper Inorganic materials 0.000 description 2
239000010949 copper Substances 0.000 description 2
239000013078 crystal Substances 0.000 description 2
229910001873 dinitrogen Inorganic materials 0.000 description 2
229910052737 gold Inorganic materials 0.000 description 2
239000010931 gold Substances 0.000 description 2
229910044991 metal oxide Inorganic materials 0.000 description 2
150000004706 metal oxides Chemical class 0.000 description 2
150000004767 nitrides Chemical class 0.000 description 2
IKNCGYCHMGNBCP-UHFFFAOYSA-N propan-1-olate Chemical compound CCC[O-] IKNCGYCHMGNBCP-UHFFFAOYSA-N 0.000 description 2
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
239000010963 304 stainless steel Substances 0.000 description 1
ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
FIPWRIJSWJWJAI-UHFFFAOYSA-N Butyl carbitol 6-propylpiperonyl ether Chemical compound C1=C(CCC)C(COCCOCCOCCCC)=CC2=C1OCO2 FIPWRIJSWJWJAI-UHFFFAOYSA-N 0.000 description 1
239000004215 Carbon black (E152) Substances 0.000 description 1
229910001018 Cast iron Inorganic materials 0.000 description 1
ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
229910000805 Pig iron Inorganic materials 0.000 description 1
229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
239000006061 abrasive grain Substances 0.000 description 1
229910052783 alkali metal Inorganic materials 0.000 description 1
150000001340 alkali metals Chemical class 0.000 description 1
229910052784 alkaline earth metal Inorganic materials 0.000 description 1
150000001342 alkaline earth metals Chemical class 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
238000005422 blasting Methods 0.000 description 1
229910052796 boron Inorganic materials 0.000 description 1
230000003197 catalytic effect Effects 0.000 description 1
229910001567 cementite Inorganic materials 0.000 description 1
239000002738 chelating agent Substances 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
239000010960 cold rolled steel Substances 0.000 description 1
150000001875 compounds Chemical class 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
238000001816 cooling Methods 0.000 description 1
RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
238000005336 cracking Methods 0.000 description 1
238000005034 decoration Methods 0.000 description 1
230000007547 defect Effects 0.000 description 1
238000003618 dip coating Methods 0.000 description 1
229910001651 emery Inorganic materials 0.000 description 1
238000004534 enameling Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
HHFAWKCIHAUFRX-UHFFFAOYSA-N ethoxide Chemical compound CC[O-] HHFAWKCIHAUFRX-UHFFFAOYSA-N 0.000 description 1
239000007789 gas Substances 0.000 description 1
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
239000001307 helium Substances 0.000 description 1
229910052734 helium Inorganic materials 0.000 description 1
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
229930195733 hydrocarbon Natural products 0.000 description 1
150000002430 hydrocarbons Chemical class 0.000 description 1
230000007062 hydrolysis Effects 0.000 description 1
238000006460 hydrolysis reaction Methods 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
150000002500 ions Chemical class 0.000 description 1
239000007788 liquid Substances 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
239000012528 membrane Substances 0.000 description 1
229910052750 molybdenum Inorganic materials 0.000 description 1
239000011733 molybdenum Substances 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
238000005121 nitriding Methods 0.000 description 1
150000002829 nitrogen Chemical class 0.000 description 1
SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical group [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 1
229960005235 piperonyl butoxide Drugs 0.000 description 1
238000005498 polishing Methods 0.000 description 1
229920000642 polymer Polymers 0.000 description 1
NREVZTYRXVBFAQ-UHFFFAOYSA-N propan-2-ol;yttrium Chemical compound [Y].CC(C)O.CC(C)O.CC(C)O NREVZTYRXVBFAQ-UHFFFAOYSA-N 0.000 description 1
150000003839 salts Chemical class 0.000 description 1
229910052710 silicon Inorganic materials 0.000 description 1
239000010703 silicon Substances 0.000 description 1
239000007921 spray Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
239000010935 stainless steel Substances 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
238000004381 surface treatment Methods 0.000 description 1
150000003609 titanium compounds Chemical class 0.000 description 1
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
231100000331 toxic Toxicity 0.000 description 1
230000002588 toxic effect Effects 0.000 description 1
230000001988 toxicity Effects 0.000 description 1
231100000419 toxicity Toxicity 0.000 description 1
MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
239000002699 waste material Substances 0.000 description 1
239000003021 water soluble solvent Substances 0.000 description 1
229910000859 α-Fe Inorganic materials 0.000 description 1

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Chemically Coating (AREA)

JP32177889A 1989-12-11 1989-12-11 窒化チタン膜の形成方法 Granted JPH03183783A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP32177889A JPH03183783A (ja)	1989-12-11	1989-12-11	窒化チタン膜の形成方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP32177889A JPH03183783A (ja)	1989-12-11	1989-12-11	窒化チタン膜の形成方法

Publications (2)

Publication Number	Publication Date
JPH03183783A true JPH03183783A (ja)	1991-08-09
JPH0549754B2 JPH0549754B2 (2)	1993-07-27

Family

ID=18136323

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP32177889A Granted JPH03183783A (ja)	1989-12-11	1989-12-11	窒化チタン膜の形成方法

Country Status (1)

Country	Link
JP (1)	JPH03183783A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19506579A1 (de) *	1995-02-24	1996-08-29	Fraunhofer Ges Forschung	Verfahren zur Herstellung von TiN-Schichten und die mit diesem Verfahren hergestellte Schicht
JP2006027941A (ja) *	2004-07-14	2006-02-02	Univ Kanagawa	窒化物薄膜の製造方法
JP2013244534A (ja) *	2012-05-29	2013-12-09	Toyota Motor Corp	表面処理方法および塗型剤

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02259080A (ja) *	1989-03-31	1990-10-19	Shoei Chem Ind Co	金属窒化物薄膜の形成方法

1989
- 1989-12-11 JP JP32177889A patent/JPH03183783A/ja active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH02259080A (ja) *	1989-03-31	1990-10-19	Shoei Chem Ind Co	金属窒化物薄膜の形成方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19506579A1 (de) *	1995-02-24	1996-08-29	Fraunhofer Ges Forschung	Verfahren zur Herstellung von TiN-Schichten und die mit diesem Verfahren hergestellte Schicht
JP2006027941A (ja) *	2004-07-14	2006-02-02	Univ Kanagawa	窒化物薄膜の製造方法
JP2013244534A (ja) *	2012-05-29	2013-12-09	Toyota Motor Corp	表面処理方法および塗型剤

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JPH0549754B2 (2)	1993-07-27

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JPH03183783A - 窒化チタン膜の形成方法 - Google Patents

Info

Links

Landscapes

Priority Applications (1)

Applications Claiming Priority (1)

Publications (2)

Family

ID=18136323

Family Applications (1)

Country Status (1)

Cited By (3)

Citations (1)

Patent Citations (1)

Cited By (3)

Also Published As

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