JPH0549754B2 - - Google Patents
Info
- Publication number
- JPH0549754B2 JPH0549754B2 JP1321778A JP32177889A JPH0549754B2 JP H0549754 B2 JPH0549754 B2 JP H0549754B2 JP 1321778 A JP1321778 A JP 1321778A JP 32177889 A JP32177889 A JP 32177889A JP H0549754 B2 JPH0549754 B2 JP H0549754B2
- Authority
- JP
- Japan
- Prior art keywords
- titanium nitride
- film
- nitride film
- alkoxide
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Chemically Coating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32177889A JPH03183783A (ja) | 1989-12-11 | 1989-12-11 | 窒化チタン膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32177889A JPH03183783A (ja) | 1989-12-11 | 1989-12-11 | 窒化チタン膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03183783A JPH03183783A (ja) | 1991-08-09 |
| JPH0549754B2 true JPH0549754B2 (2) | 1993-07-27 |
Family
ID=18136323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32177889A Granted JPH03183783A (ja) | 1989-12-11 | 1989-12-11 | 窒化チタン膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03183783A (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19506579C2 (de) * | 1995-02-24 | 1996-12-12 | Fraunhofer Ges Forschung | Verfahren zur Herstellung von TiN-Schichten und die mit diesem Verfahren hergestellte Schicht |
| JP4501110B2 (ja) * | 2004-07-14 | 2010-07-14 | 学校法人神奈川大学 | 窒化物薄膜の製造方法 |
| JP5953940B2 (ja) * | 2012-05-29 | 2016-07-20 | トヨタ自動車株式会社 | 表面処理方法および塗型剤の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2627803B2 (ja) * | 1989-03-31 | 1997-07-09 | 昭栄化学工業株式会社 | 金属窒化物薄膜の形成方法 |
-
1989
- 1989-12-11 JP JP32177889A patent/JPH03183783A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03183783A (ja) | 1991-08-09 |
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