JPH0321845U - - Google Patents

Info

Publication number
JPH0321845U
JPH0321845U JP8332989U JP8332989U JPH0321845U JP H0321845 U JPH0321845 U JP H0321845U JP 8332989 U JP8332989 U JP 8332989U JP 8332989 U JP8332989 U JP 8332989U JP H0321845 U JPH0321845 U JP H0321845U
Authority
JP
Japan
Prior art keywords
reaction tube
susceptor
substrate
heating
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8332989U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8332989U priority Critical patent/JPH0321845U/ja
Publication of JPH0321845U publication Critical patent/JPH0321845U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は本考案装置の一実施例を示す断面図、
第２図ａ及びｂは夫々本実施例装置と従来装置を
用いてＡｌＧａＩｎＰ系の半導体レーザを作製し
た時、１枚の基板から得られるレーザの発振しき
い値電流を測定したヒストグラム、第３図は従来
装置を示す断面図である。 １…反応管、２…ガス導入管、３…排気管、５
…ＧａＡｓ基板、６…高周波加熱コイル、９…サ
セプタ、１２…（多結晶の）ＧａＡｓ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応管と、該反応管に連通したガス導入管及び
    排気管と、上記反応管内に配された膜形成用の基
    板を載置するサセプタと、該サセプタを加熱する
    加熱手段と、を備え、上記成長用基板の周縁に砒
    素化合物を配したことを特徴とするＭＯＣＶＤ装
    置。
JP8332989U 1989-07-14 1989-07-14 Pending JPH0321845U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8332989U JPH0321845U (ja) 1989-07-14 1989-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8332989U JPH0321845U (ja) 1989-07-14 1989-07-14

Publications (1)

Publication Number Publication Date
JPH0321845U true JPH0321845U (ja) 1991-03-05

Family

ID=31630906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8332989U Pending JPH0321845U (ja) 1989-07-14 1989-07-14

Country Status (1)

Country Link
JP (1) JPH0321845U (ja)

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