JPH03219406A - Manufacture of magnetic head core - Google Patents
Manufacture of magnetic head coreInfo
- Publication number
- JPH03219406A JPH03219406A JP25647989A JP25647989A JPH03219406A JP H03219406 A JPH03219406 A JP H03219406A JP 25647989 A JP25647989 A JP 25647989A JP 25647989 A JP25647989 A JP 25647989A JP H03219406 A JPH03219406 A JP H03219406A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- core
- magnetic
- jig
- reference surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 229910001004 magnetic alloy Inorganic materials 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 238000010030 laminating Methods 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 7
- 238000005520 cutting process Methods 0.000 abstract description 17
- 230000007547 defect Effects 0.000 abstract description 6
- 239000010408 film Substances 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 4
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 230000004907 flux Effects 0.000 abstract description 3
- 229910000702 sendust Inorganic materials 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract description 3
- 238000003466 welding Methods 0.000 abstract description 3
- 239000011521 glass Substances 0.000 abstract description 2
- 238000005304 joining Methods 0.000 abstract description 2
- 238000000465 moulding Methods 0.000 abstract description 2
- 238000005498 polishing Methods 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 238000003754 machining Methods 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
の1
この発明は、積層型コアを用いる狭トラツク磁気ヘッド
コアの製造方法に関し、特にコアチップ製造時における
加工プロセスの簡素化とアジマス角度の精度向上に関す
る。DETAILED DESCRIPTION OF THE INVENTION (1) The present invention relates to a method for manufacturing a narrow track magnetic head core using a laminated core, and particularly to simplifying the processing process and improving the accuracy of the azimuth angle when manufacturing the core chip.
従】ぴI支術−
最近HDTV等に採用され始め、高密度記録が可能とな
った狭トラツク磁気ヘツドは、コアの形態として、非磁
性体基板に、高飽和磁束密度材料である、センダスト薄
膜を付着形成したものを積層して得られるコアブロック
を用いて作られている。Narrow track magnetic heads, which have recently begun to be adopted in HDTVs and other devices and have become capable of high-density recording, have a core formed by a Sendust thin film, a high saturation magnetic flux density material, on a non-magnetic substrate. It is made using a core block obtained by laminating the core blocks that are adhered and formed.
従来、この種コアブロックの加工方法は、例えば第5図
に示すように磁気へラドウェハ4をアジマス角15の角
度をつけて貼付は板14に貼付け、ウェハ切断用砥石6
で切断するか、もしくは、第6図に示すようにあらかじ
めアジマス角がついたアジマス角付きスライス治具9に
貼付け、ウェハ切断用砥石6で切断し、ブロックを得る
。そのブロックをギャップ形成し、突合わせ溶着後筒7
図に示すようなアジマス角付き合わせ済みコアブロック
16を得る。そのアジマス角付き突合わせ済みコアブロ
ック16を再びアジマス角15の角度をつけて貼付は板
14に貼付はコアブロック切断用砥石IIで切断を行う
か、第7図に示すようにアジマス角がついた、アジマス
角付きスライス治具9に貼付はコアブロック切断用砥石
11で切断を行いコアチップを得ていた。Conventionally, as shown in FIG. 5, the conventional method for processing this type of core block is to attach a magnetic held wafer 4 to a plate 14 at an azimuth angle of 15, and then use a grindstone 6 for cutting the wafer.
Alternatively, as shown in FIG. 6, the wafer is pasted on a slicing jig 9 with an azimuth angle and cut with a wafer cutting grindstone 6 to obtain a block. After forming a gap in the block and butt welding, the cylinder 7
A core block 16 with matched azimuth angles as shown in the figure is obtained. The butted core block 16 with the azimuth angle is again angled at the azimuth angle 15 and attached to the plate 14, and then cut with a core block cutting grindstone II, or the azimuth angle is set as shown in Fig. 7. In addition, the core chips were attached to a slicing jig 9 with an azimuth angle and cut with a core block cutting grindstone 11 to obtain core chips.
しかしながら、上記の方法では、アジマス角度調整を2
回行う為、作業工数がかかるほかに、第8図に示すよう
に1回目、及び2回目のアジマス調整時に起こるアジマ
スずれ13の累積により、本来のアジマス角度規格から
大きくはずれるものが発生し外観不良となり歩留りが低
下するという問題点があった。However, in the above method, the azimuth angle adjustment is
In addition to requiring man-hours to perform the adjustment twice, as shown in Figure 8, due to the accumulation of azimuth deviations 13 that occur during the first and second azimuth adjustments, a large deviation from the original azimuth angle standard occurs, resulting in poor appearance. Therefore, there was a problem that the yield decreased.
° 、の
この発明は上記の解決するために、従来アジマス調整を
2回する方法から、ウェハ状態でのコアブロック切出し
作業はアジマス角をつけずに、あらかじめ、直角のでて
いる治具を使用しウェハを磁性合金膜と直角に切断して
コアブロックを作り、突き合わせ接合後に、磁性合金膜
形成面に対してアジマス角度をつけてスライスすること
を特徴とする。° In order to solve the above problem, this invention has changed from the conventional method of adjusting the azimuth twice to using a jig with a right angle protruding in advance, without setting the azimuth angle, when cutting out the core block in the wafer state. The core block is made by cutting the wafer at right angles to the magnetic alloy film, and after butt joining, the wafer is sliced at an azimuth angle to the surface on which the magnetic alloy film is formed.
作l−
上記の方法によりコアブロック原料であるウェハ状態か
らのブロック切出しはアジマス角を無視することができ
、コアチップスライス時のみでアジマス角度を決定する
ので外観不良、アジマス不良を徹底して減少さすことが
できる。Production I - By the above method, the azimuth angle can be ignored when cutting the block from the wafer state, which is the raw material for the core block, and the azimuth angle is determined only during core chip slicing, so appearance defects and azimuth defects can be thoroughly reduced. be able to.
L直1
第1図から第4図までに、本発明の磁気ヘッド製造方法
の一実施例を示す。以下この発明の一実施例について図
面を参照して説明する。まずはじめに、磁気へラドウェ
ハ4は、従来と同様に、非磁性体基板4aに、トラック
幅寸法の厚さのセンダスト等の高飽和磁束密度材料の薄
膜4bを、スパッタリング付着して得たものを積層形成
したものである。そこで磁気ヘッドを製造するには、あ
らかじめ治具本体1の基準面5に対して直角がでている
スライス治具2の基準面3にコアブロック原料である磁
気へラドウェハ4を貼付け、そのスライス治具2をさら
に治具本体1の基準面5にあてて貼付ける。その後ウェ
ハ切断用砥石6で切断し、第2図に示すコアブロックA
8及びコアプロ・ツクB7を得る。その後第3図のよう
に、ガラスモールド、巻線窓加工、鏡面研磨、ギャップ
形成、突合わせ、溶着完了後突合わせ済みコアブロック
17を得る。この突合わせ済みコアブロック17をアジ
マス角15付きスライス治具9の基準面lOに貼付はコ
アブロック切断用砥石11で切断し、コアチップ12を
得る。L Direction 1 FIGS. 1 to 4 show an embodiment of the magnetic head manufacturing method of the present invention. An embodiment of the present invention will be described below with reference to the drawings. First of all, the magnetic helad wafer 4 is made by laminating a thin film 4b of a high saturation magnetic flux density material such as Sendust with a thickness equal to the track width on a non-magnetic substrate 4a by sputtering, as in the conventional case. It was formed. Therefore, in order to manufacture a magnetic head, a magnetic held wafer 4, which is a core block raw material, is attached in advance to the reference surface 3 of the slicing jig 2, which is perpendicular to the reference surface 5 of the jig body 1, and the slicing jig is The tool 2 is further placed against the reference surface 5 of the jig main body 1 and pasted. After that, the core block A shown in FIG. 2 is cut with a wafer cutting grindstone 6.
8 and Core Pro Tsuk B7. Thereafter, as shown in FIG. 3, after glass molding, winding window processing, mirror polishing, gap formation, butting, and welding are completed, a butted core block 17 is obtained. This butted core block 17 is attached to the reference surface lO of the slicing jig 9 with an azimuth angle 15 and cut by a core block cutting grindstone 11 to obtain a core chip 12.
見匪Δ肱策
以上説明したように、本発明はウェ/%状態でのコアブ
ロック切出し作業はアジマス角をつけず磁性合金膜に対
して直角に切出し、コアチ・ツブスライス時にアジマス
角をつけることにより、従来のアジマス調整を2回する
方法と比較すれば、外観不良とアジマス不良が減少し、
なおかつ製作工数低減も実現できるという優れた効果が
ある。As explained above, in the present invention, the core block cutting operation in the wa/% state is performed by cutting at right angles to the magnetic alloy film without making an azimuth angle, and by adding an azimuth angle when slicing the core block. Compared to the conventional method of adjusting azimuth twice, appearance defects and azimuth defects are reduced.
Furthermore, it has the excellent effect of reducing manufacturing man-hours.
第1図、第2図、第3図は本発明の磁気ヘッド製造方法
の一実施例を示すコアブロック及び切断治具の斜視図。
第4図は、完成コアチップの斜視図。第5図及び第6図
は従来の製造方法を示すコアブロック及び治具の斜視図
。第7図は従来の不良コアチップの斜視図。
1・・・・・・治具本体、
2・・・・・・スライス治具、
3・・・・・・スライス治具基準面、
4・・・・・・磁気へラドウェハ、
4a・・・・・・非磁性体基板、
4b・・・・・・磁性合金膜、
5・・・・・・治具本体基準面、
6・・・・・・ウェハ切断用砥石、
7・・・・・・コアブロックB1
8・・・・・・コアブロックA1
9・・・・・・アジマス角付きスライス治具、IO・・
・・・・アジマス角付きスライス治具基準面、11・・
・・・・コアブロック切断用砥石、5−
6−
l2・・・・・・コアチップ、
13・・・・・・アジマスずれ角、
14・・・・・・貼付は板、
15・・・・・・アジマス角、
16・・・・・・突合わせ済みコアブロック、16・・
・・・・アジマス付き突合わせ済みコアブロック、17
・・・・・・突合わせ済みコアロック。
7−
手続補正書(方式)
平成
3年
4月11日
1、事件の表示
平成1年特 許 願 第25Et479号2、発明の名
称
磁気ヘッドコアの製造方法
3、補正をする者
事件の関係 特許出願人
〒520滋賀県大津市晴嵐2丁目9番1号関西日本電気
株式会社
5、補正の対象
出願明細書の「図面の簡単な説明」の欄。
6、補正の内容
出願明細書第6頁第7行目の「・・・・・・の斜視図。
」を、「・・・・・・の斜視図、第8図は、従来の不良
コアチップの要部拡大斜視図である。」と訂正する。1, 2, and 3 are perspective views of a core block and a cutting jig showing an embodiment of the magnetic head manufacturing method of the present invention. FIG. 4 is a perspective view of the completed core chip. 5 and 6 are perspective views of a core block and a jig showing a conventional manufacturing method. FIG. 7 is a perspective view of a conventional defective core chip. 1...Jig main body, 2...Slice jig, 3...Slice jig reference surface, 4...Magnetic rad wafer, 4a... ...Nonmagnetic substrate, 4b...Magnetic alloy film, 5...Jig body reference surface, 6...Wheelstone for cutting wafer, 7...・Core block B1 8...Core block A1 9...Slice jig with azimuth angle, IO...
...Slice jig reference plane with azimuth angle, 11...
... Grindstone for cutting core block, 5-6-l2 ... Core chip, 13 ... Azimuth deviation angle, 14 ... Paste on board, 15 ... ...Azimuth angle, 16...Butted core block, 16...
...Butted core block with azimuth, 17
...Butted core lock. 7- Procedural amendment (method) April 11, 1991 1. Indication of the case 1999 Patent Application No. 25Et479 2. Title of invention Method for manufacturing magnetic head core 3. Person making the amendment Related to the case Patent application Kansai NEC Co., Ltd. 5, 2-9-1 Seiran, Otsu City, Shiga Prefecture 520, "Brief Description of Drawings" column of the application specification to be amended. 6. Contents of the amendment In the 7th line of page 6 of the application specification, "A perspective view of..." has been changed to "A perspective view of... Figure 8 is a conventional defective core chip. This is an enlarged perspective view of the main parts of the
Claims (1)
得たウェハを切断してコアブロックを作り、上記コアブ
ロックを突き合わせて接合した後、スライスして個々の
コアチップとする磁気ヘッドコアの製造方法において、 上記ウェハを磁性合金膜と直角に切断してコアブロック
を作り、突き合わせ接合後に、磁性合金膜形成面に対し
てアジマス角度をつけてスライスすることを特徴とする
磁気ヘッドコアの製造方法。[Claims] A wafer obtained by laminating a magnetic alloy film on a non-magnetic substrate is cut to make a core block, the core blocks are butted and bonded, and then sliced into individual pieces. A method of manufacturing a magnetic head core used as a core chip is characterized in that the wafer is cut at right angles to the magnetic alloy film to form a core block, and after butt-bonding, the wafer is sliced at an azimuthal angle to the surface on which the magnetic alloy film is formed. A method for manufacturing a magnetic head core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25647989A JPH03219406A (en) | 1989-09-29 | 1989-09-29 | Manufacture of magnetic head core |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25647989A JPH03219406A (en) | 1989-09-29 | 1989-09-29 | Manufacture of magnetic head core |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03219406A true JPH03219406A (en) | 1991-09-26 |
Family
ID=17293210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25647989A Pending JPH03219406A (en) | 1989-09-29 | 1989-09-29 | Manufacture of magnetic head core |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03219406A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR980011056A (en) * | 1996-07-26 | 1998-04-30 | 조희재 | Manufacturing method of magnetic head core |
-
1989
- 1989-09-29 JP JP25647989A patent/JPH03219406A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR980011056A (en) * | 1996-07-26 | 1998-04-30 | 조희재 | Manufacturing method of magnetic head core |
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