JPS6430355U - - Google Patents
Info
- Publication number
- JPS6430355U JPS6430355U JP12499387U JP12499387U JPS6430355U JP S6430355 U JPS6430355 U JP S6430355U JP 12499387 U JP12499387 U JP 12499387U JP 12499387 U JP12499387 U JP 12499387U JP S6430355 U JPS6430355 U JP S6430355U
- Authority
- JP
- Japan
- Prior art keywords
- heating source
- rotating
- holder
- horizontally
- evaporation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図、第２図はこの考案の一実施例による真
空蒸着装置を示す部分断面図であり、加熱源に対
して各々異なる位置での状態を示す。第３図はこ
の考案の一実施例における被蒸着物の蒸着膜厚を
示す分布図である。第４図は従来の真空蒸着装置
を示す断面図、第５図は従来の真空蒸着装置で真
空蒸着された被蒸着物の蒸着膜厚を示す分布図で
ある。
図において３は加熱源、４は蒸発物、７は被蒸
着物、８は固定板、９はホルダ本体、１６は遊星
歯車、１７は内歯大歯車、１８，２０は回転軸、
１９は軸受板である。なお各図中同一符号は同一
または相当部分を示す。
FIGS. 1 and 2 are partial cross-sectional views showing a vacuum evaporation apparatus according to an embodiment of the invention, each showing the state at different positions with respect to the heating source. FIG. 3 is a distribution diagram showing the thickness of a vapor-deposited material in an embodiment of this invention. FIG. 4 is a sectional view showing a conventional vacuum evaporation apparatus, and FIG. 5 is a distribution diagram showing the thickness of a deposited material vacuum-deposited using the conventional vacuum evaporation apparatus. In the figure, 3 is a heating source, 4 is an evaporated material, 7 is a deposited material, 8 is a fixed plate, 9 is a holder body, 16 is a planetary gear, 17 is an internal gear, 18 and 20 are rotating shafts,
19 is a bearing plate. Note that the same reference numerals in each figure indicate the same or corresponding parts.
Claims (1)
と異なる位置に配置され被蒸着物を保持しながら
水平に回転するホルダーと、このホルダーの回転
軸を保持し別の回転軸により水平に回転する軸受
板とを真空チヤンバー内に設けたことを特徴とす
る真空蒸着装置。 A heating source for the deposition material, a holder placed above the heating source at a different position from directly above and rotating horizontally while holding the material to be deposited, and a rotating shaft that holds the holder's rotational axis and rotates horizontally using another rotational shaft. A vacuum evaporation apparatus characterized in that a rotating bearing plate is provided within a vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12499387U JPS6430355U (en) | 1987-08-17 | 1987-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12499387U JPS6430355U (en) | 1987-08-17 | 1987-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430355U true JPS6430355U (en) | 1989-02-23 |
Family
ID=31375203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12499387U Pending JPS6430355U (en) | 1987-08-17 | 1987-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430355U (en) |
-
1987
- 1987-08-17 JP JP12499387U patent/JPS6430355U/ja active Pending