Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Sanwa Kagaku Kenkyusho Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Sanwa Kagaku Kenkyusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd, Sanwa Kagaku Kenkyusho Co LtdfiledCriticalShin-Etsu Chemical Co Ltd
Priority to JP18178382ApriorityCriticalpatent/JPS5970693A/ja
Publication of JPS5970693ApublicationCriticalpatent/JPS5970693A/ja
Publication of JPH0322395B2publicationCriticalpatent/JPH0322395B2/ja