JPH0322906Y2 - - Google Patents

Info

Publication number
JPH0322906Y2
JPH0322906Y2 JP1981074185U JP7418581U JPH0322906Y2 JP H0322906 Y2 JPH0322906 Y2 JP H0322906Y2 JP 1981074185 U JP1981074185 U JP 1981074185U JP 7418581 U JP7418581 U JP 7418581U JP H0322906 Y2 JPH0322906 Y2 JP H0322906Y2
Authority
JP
Japan
Prior art keywords
sample piece
opening
storage base
clamp plate
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981074185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57186029U (ar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981074185U priority Critical patent/JPH0322906Y2/ja
Publication of JPS57186029U publication Critical patent/JPS57186029U/ja
Application granted granted Critical
Publication of JPH0322906Y2 publication Critical patent/JPH0322906Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1981074185U 1981-05-22 1981-05-22 Expired JPH0322906Y2 (ar)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981074185U JPH0322906Y2 (ar) 1981-05-22 1981-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981074185U JPH0322906Y2 (ar) 1981-05-22 1981-05-22

Publications (2)

Publication Number Publication Date
JPS57186029U JPS57186029U (ar) 1982-11-26
JPH0322906Y2 true JPH0322906Y2 (ar) 1991-05-20

Family

ID=29869962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981074185U Expired JPH0322906Y2 (ar) 1981-05-22 1981-05-22

Country Status (1)

Country Link
JP (1) JPH0322906Y2 (ar)

Also Published As

Publication number Publication date
JPS57186029U (ar) 1982-11-26

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