JPH0325569U - - Google Patents
Info
- Publication number
- JPH0325569U JPH0325569U JP8537289U JP8537289U JPH0325569U JP H0325569 U JPH0325569 U JP H0325569U JP 8537289 U JP8537289 U JP 8537289U JP 8537289 U JP8537289 U JP 8537289U JP H0325569 U JPH0325569 U JP H0325569U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- substrate
- beam sources
- holder
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の分子線結晶成長装置の１実施
例の概略構成を示す一部除去斜視図である。 １……真空容器、３……シユラウド、４ａ〜４
ｆ……凹部、５ａ〜５ｃ，５ｅ〜５ｇ……Ｋセル
、５ｄ……電子銃、６……基板ホルダ、７……Ｓ
ｉ基板、１０……ヒータホルダ、１１ａ〜１１ｆ
……ヒータ。
例の概略構成を示す一部除去斜視図である。 １……真空容器、３……シユラウド、４ａ〜４
ｆ……凹部、５ａ〜５ｃ，５ｅ〜５ｇ……Ｋセル
、５ｄ……電子銃、６……基板ホルダ、７……Ｓ
ｉ基板、１０……ヒータホルダ、１１ａ〜１１ｆ
……ヒータ。
Claims (1)
- 【実用新案登録請求の範囲】 単結晶基板上に分子線エピタキシヤル成長法に
より複数の単結晶薄膜を積層形成する分子線結晶
成長装置において、 容器内に配設されたシユラウドの上面に同心円
状に形成された複数個の凹部と、 前記各凹部に配設された複数種類の分子線源と
、 前記容器内の前記シユラウドの上方に回転自在
に配設され前記基板を着脱自在に保持し前記基板
を前記各分子線源の上方へ順次に移動する基板ホ
ルダと、 前記容器内の前記基板ホルダの上方に配設され
たヒータホルダと、 前記ヒータホルダに設けられ前記各分子線源の
上方に位置して前記基板をそれぞれ異なる温度に
加熱する複数個のヒータと を備えた分子線結晶成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8537289U JPH0325569U (ja) | 1989-07-20 | 1989-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8537289U JPH0325569U (ja) | 1989-07-20 | 1989-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325569U true JPH0325569U (ja) | 1991-03-15 |
Family
ID=31634482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8537289U Pending JPH0325569U (ja) | 1989-07-20 | 1989-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325569U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002122297A (ja) * | 2000-10-10 | 2002-04-26 | Toray Ind Inc | 圧力容器用ジグおよび圧力容器 |
| KR20160117235A (ko) | 2015-03-30 | 2016-10-10 | 글로브라이드 가부시키가이샤 | 낚시줄 가이드의 고정 구조, 및 낚싯대 |
-
1989
- 1989-07-20 JP JP8537289U patent/JPH0325569U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002122297A (ja) * | 2000-10-10 | 2002-04-26 | Toray Ind Inc | 圧力容器用ジグおよび圧力容器 |
| KR20160117235A (ko) | 2015-03-30 | 2016-10-10 | 글로브라이드 가부시키가이샤 | 낚시줄 가이드의 고정 구조, 및 낚싯대 |
| EP3078263A1 (en) | 2015-03-30 | 2016-10-12 | Globeride, Inc. | Fixing structure for fishing line guide, and fishing rod |
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