JPH03272004A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH03272004A JPH03272004A JP7157590A JP7157590A JPH03272004A JP H03272004 A JPH03272004 A JP H03272004A JP 7157590 A JP7157590 A JP 7157590A JP 7157590 A JP7157590 A JP 7157590A JP H03272004 A JPH03272004 A JP H03272004A
- Authority
- JP
- Japan
- Prior art keywords
- head
- magnetic
- thin film
- thin films
- magnetic metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000010409 thin film Substances 0.000 claims abstract description 31
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 claims abstract description 19
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 10
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000003381 stabilizer Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims description 30
- 239000002184 metal Substances 0.000 claims description 30
- 238000005304 joining Methods 0.000 abstract description 3
- 229910000734 martensite Inorganic materials 0.000 abstract description 2
- 125000006850 spacer group Chemical group 0.000 abstract description 2
- 230000009466 transformation Effects 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 21
- 239000011521 glass Substances 0.000 description 11
- 229910000702 sendust Inorganic materials 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- QWXYZCJEXYQNEI-OSZHWHEXSA-N intermediate I Chemical compound COC(=O)[C@@]1(C=O)[C@H]2CC=[N+](C\C2=C\C)CCc2c1[nH]c1ccccc21 QWXYZCJEXYQNEI-OSZHWHEXSA-N 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 210000004379 membrane Anatomy 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000029052 metamorphosis Effects 0.000 description 1
- 210000004303 peritoneum Anatomy 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気ヘッドに関し、詳しくはＨＤＤ（ハードデ
ィスクドライブ）装置に使用されるラミネート型磁気ヘ
ッドに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head, and more particularly to a laminated magnetic head used in an HDD (hard disk drive) device.
外部記憶装置として大型コンピュータから小型のパーソ
ナルコンピュータまで用いられるＨＤＤ（ハードディス
クドライブ）装置は、ディスク状の磁気記録媒体が３０
００〜３６００ｒｐｍの高速で回転するため、磁気ヘッ
ドを磁気記録媒体から０．３μｍ程度わずかに浮上させ
た状態で情報の記録・再生を行うようになっている。し
かしながら、上記磁気記録媒体の回転振れにより磁気ヘ
ッドが磁気記録媒体の磁気記録面に接触することがあり
、これによって上記磁気ヘッドが摩耗する虞があった。HDD (Hard Disk Drive) devices, which are used as external storage devices from large computers to small personal computers, have a disk-shaped magnetic recording medium with a capacity of 30 mm.
Since the magnetic head rotates at a high speed of 0.000 to 3600 rpm, information is recorded and reproduced while the magnetic head is slightly elevated by about 0.3 μm above the magnetic recording medium. However, due to the rotational vibration of the magnetic recording medium, the magnetic head may come into contact with the magnetic recording surface of the magnetic recording medium, which may cause the magnetic head to wear out.
そこで、上記磁気ヘッドではへンドコアを保護するヘッ
ド基板の素材として、耐摩耗性を有する硬いアルミナチ
タンカーバイドを使用しているのが現状である。Therefore, in the above-mentioned magnetic head, hard alumina titanium carbide having wear resistance is currently used as a material for the head substrate that protects the hand core.
このアルミナチタンカーバイドからなるヘッド基板を使
用した磁気ヘッドを第４図乃至第６図を参照しながら説
明する。A magnetic head using this head substrate made of alumina titanium carbide will be explained with reference to FIGS. 4 to 6.
この磁気ヘッドＡは、第４図に示すように直方体形状の
スライダ部（１）と、スライダ５（１）の−側壁面に接
着固定された略コ字形状のヘッド部（２）とで構成され
る。上記スライダ部（１）及びヘッド部（２）は、アル
ミナチタンカーバイドからなる一対のスライダブロック
（３）と（４）（以下率１のヘッド基板と称す）及びコ
アブロツク（５）と（６）（以下率２のヘッド基板と称
す）間にセンダスト等の金属磁性薄膜（７）（８）を挾
み込んで接合一体化したものである。As shown in FIG. 4, this magnetic head A is composed of a rectangular parallelepiped-shaped slider section (1) and a substantially U-shaped head section (2) adhesively fixed to the negative side wall surface of the slider 5 (1). be done. The slider part (1) and head part (2) are made of a pair of slider blocks (3) and (4) (hereinafter referred to as a head substrate with a ratio of 1) made of alumina titanium carbide, and core blocks (5) and (6) ( Metal magnetic thin films (7) and (8) such as Sendust are sandwiched between the head substrates (hereinafter referred to as head substrates with a ratio of 2) and are integrally bonded.
上記スライダ部（１）は、第５図に示すように一方の第
１のヘッド基板（３）の接合面に、金属磁性薄膜（７）
をスパッタリング等で被着形威し、更にその上に接着用
ガラス膜（９）を被着させた上で他方の第１のヘッド基
板（４）を衝合し、上記ガラス膜（９）を加熱溶融させ
て接合一体化することにより製造される。また、ヘッド
部（２）も、上述したスライダ部（１）と同様、一対の
第２のヘッド基板（５）（６）を金属磁性￥＃膜（８）
を介してガラス（１０）で接合一体化したものを略コ字
形状に底形した上で巻線処理することにより製造される
。そして、第６図に示すようにこのようにして得られた
ヘッド部（２）をスライダ部（１）の−側壁面にガラス
で接着固定することにより第４図に示す磁気ヘッドＡが
製造される。As shown in FIG.
The adhesive glass film (9) is then deposited on top of it by sputtering or the like, and the other first head substrate (4) is abutted against the adhesive glass film (9). Manufactured by heating, melting, and joining together. Also, in the head part (2), like the slider part (1) described above, a pair of second head substrates (5) and (6) are connected to a metal magnetic film (8).
It is manufactured by integrally bonding with glass (10) through a wire, shaping the bottom into a substantially U-shape, and then winding the wire. Then, as shown in FIG. 6, the magnetic head A shown in FIG. 4 is manufactured by adhesively fixing the head portion (2) thus obtained to the negative side wall surface of the slider portion (1) with glass. Ru.
ところで、上述した従来の磁気ヘッドＡでは、第１、第
２のヘッド基板（３）〜（６）に使用するアルミナチタ
ンカーバイドの熱１１張係数が７８×１０ ／℃程度で
あるのに対して、金属磁性￥＃膜（７）（８）に使用す
るセンダストの熱膨張係数が１３０〜１４０ Ｘ １０
／ ”Ｃ程度であり、両者の熱膨張係数差が５０Ｘ
１０ ／”Ｃ以上もある。そのため、ヘッド部（２）
では第２のへラド基板（５）（６）に金属磁性ｉ膜（８
）を直接被着形成した場合、成膜時には問題がないが、
一対の第２のヘッド基板（５）（６）のガラス接合後や
後工程での加工処理時に、上記第２のヘッド基板（５）
（６）と金属磁性ｖｓ膜 （８〉間で生した内部応力に
より、金属磁性ｖＩ＃膜（８）に歪みが発生して磁気ヘ
ッド特性が大幅に低下し、延いては上記金属磁性薄膜（
８）にクランクが発生して金属磁性薄膜（８）が第２の
ヘッド基板（５）（６）から剥離することがあった。By the way, in the conventional magnetic head A described above, the thermal tensile coefficient of alumina titanium carbide used for the first and second head substrates (3) to (6) is about 78 x 10 /°C. , the thermal expansion coefficient of Sendust used for the metal magnetic ¥# film (7) (8) is 130 to 140 x 10
/ ”C, and the difference in thermal expansion coefficient between the two is 50X
10/”C or more. Therefore, the head part (2)
Now, a metal magnetic i film (8) is placed on the second Herad substrate (5) (6).
) is directly deposited, there is no problem during film formation, but
After glass bonding of the pair of second head substrates (5) and (6) or during processing in a post-process, the second head substrate (5)
(6) and the metal magnetic thin film (8), distortion occurs in the metal magnetic vI# film (8), significantly degrading the magnetic head characteristics, and eventually causing the metal magnetic thin film (8) to become distorted.
8), a crank occurred and the metal magnetic thin film (8) sometimes peeled off from the second head substrate (5) and (6).
そこで、本発明は上記問題点に鑑みて提案されたもので
、その目的とするところは、ヘッド基板と金属磁性ＷＩ
腹膜間生じた内部応力を簡便な手段により可及的に抑制
し得る磁気ヘッドを提供することにある。Therefore, the present invention was proposed in view of the above problems, and its purpose is to connect a head substrate and a metal magnetic WI
It is an object of the present invention to provide a magnetic head capable of suppressing internal stress generated between the peritoneum as much as possible by a simple means.
本発明における上記目的を遠戚するための技術的手段は
、アルミナチタンカーバイドからなる一対のヘッド基板
間にギャップスペーサとなる金属磁性薄膜を挾み込んで
接合一体化したバルク型磁気ヘッドであって、上記ヘッ
ド基板と金属磁性薄膜との間に、ジルコニアに安定化剤
を添加した部分安定化ジルコニアからなる中間薄膜を介
在させたことである。Technical means for achieving the above-mentioned object of the present invention is a bulk type magnetic head in which a metal magnetic thin film serving as a gap spacer is sandwiched between a pair of head substrates made of alumina titanium carbide and joined together. , an intermediate thin film made of partially stabilized zirconia in which a stabilizer is added to zirconia is interposed between the head substrate and the metal magnetic thin film.
本発明に係る磁気ヘッドでは、ヘッド基板と金属磁性ｉ
膜との間に、ジルコニアに安定化剤を添加した部分安定
化ジルコニアからなる中間薄膜を介在させたから、上記
ヘッド基板と金属磁性１ｉｌｌｉ間で生した内部応力に
よって起る部分安定化ジルコニアのアルテンサイド変態
により緩和する。而も、上記部分安定化ジルコニアの熱
膨張係数がヘッド基板と金属磁性膜の中間に位置するの
で上記内部応力を確実に吸収し得る。In the magnetic head according to the present invention, the head substrate and the metal magnetic i
Since an intermediate thin film made of partially stabilized zirconia, which is made by adding a stabilizer to zirconia, is interposed between the film and the zirconia film, the artenside of the partially stabilized zirconia caused by the internal stress generated between the head substrate and the metal magnetic substrate is removed. It is relieved by metamorphosis. Moreover, since the thermal expansion coefficient of the partially stabilized zirconia is located between the head substrate and the metal magnetic film, the internal stress can be reliably absorbed.
本発明を第４図乃至第６図に示す磁気ヘッドに通用した
一実施例を第１図乃至第３図を参照しながら説明する。An embodiment of the present invention applied to the magnetic head shown in FIGS. 4 to 6 will be described with reference to FIGS. 1 to 3.
尚、第４図乃至第６図と同一、又は相当部分には同一参
照符号を付して重複説明は省略する。Note that the same or corresponding parts as in FIGS. 4 to 6 are given the same reference numerals, and redundant explanation will be omitted.
本発明の特徴は、第１図に示すようにスライダ部（１）
及びヘッド部（２）において、アルミナチタンカーバイ
ドからなる第１、第２のヘッド基板（３）〜（６）とセ
ンダスト等からなる金属磁性膜Ｍ （７）（８）との間
に、ジルコニアに安定化剤を添加した部分安定化ジルコ
ニアからなる中間薄ＩＩＩ （１１） （１２）を介
在させたことにある。この中間薄Ｍｌ！ （１１）
（１２）を組成する部分安定化ジルコニアは、純ジルコ
ニア（ＺｒＯ２）に安定化剤として例えばイツトリア（
Ｙ２０ａ ）を２ ｔａｏ １２％以上５ ｓｏ １％
以下で含有させた高靭性セラ宍ソクスで、内在する結晶
相が正方晶相と立方晶相との２籾温合状態となっている
。特にヘッド部（２）での上記中間ＩＦ膜（１２）は、
磁気へフドＢの磁気ギャップとなる金属磁性！膜（８）
の両側に配され、磁気記録媒体がその回転振れにより接
触することがあることから耐摩耗性の点で好適である。The feature of the present invention is that as shown in FIG.
In the head part (2), a zirconia film is formed between the first and second head substrates (3) to (6) made of alumina titanium carbide and the metal magnetic films M (7) and (8) made of sendust or the like. The reason is that intermediate thin film III (11) (12) made of partially stabilized zirconia to which a stabilizer has been added is interposed. This medium thin Ml! (11)
The partially stabilized zirconia constituting (12) is made by adding, for example, itria (ZrO2) as a stabilizer to pure zirconia (ZrO2).
Y20a) 2 tao 12% or more 5 so 1%
In the high-toughness Ceramics contained below, the inherent crystal phases are in a two-monetration state of a tetragonal phase and a cubic phase. In particular, the intermediate IF membrane (12) in the head section (2) is
Metal magnetism that becomes the magnetic gap of magnetic head B! Membrane (8)
This is preferable in terms of wear resistance since the magnetic recording medium may come into contact with the magnetic recording medium due to its rotational runout.
部分安定化ジルコニアに含有される安定化剤がイツトリ
ア（Ｙ２０ａ ）の場合、その含有量が２ｍ。When the stabilizer contained in partially stabilized zirconia is yttoria (Y20a), its content is 2m.
１％よりも少ないと、内在する結晶相がジルコニア単体
の正方晶相となり、逆にＳ ｓｏ １％よりも多くなる
と、安定化ジルコニアの立方晶相となって共に部分安定
化ジルコニアとはならず高靭性が低下するために好まし
くない。上記部分安定化ジルコニアの熱膨張係数は、第
１、第２のヘッド基板（３）〜（６）のアルミナチタン
カーバイドの熱膨張係数７８ Ｘ １０−′７／’ｌ：
と金属磁性薄膜（７）（８）のセンダストの熱膨張係数
１３０〜１４０Ｘ１０／−７℃７
との中間に位置する１００ ＸＩＯ／”Ｃ程度である。If it is less than 1%, the inherent crystal phase will be a tetragonal phase of simple zirconia, and conversely, if it is more than 1%, it will be a cubic phase of stabilized zirconia and will not become partially stabilized zirconia. This is undesirable because the high toughness decreases. The thermal expansion coefficient of the above partially stabilized zirconia is the thermal expansion coefficient of the alumina titanium carbide of the first and second head substrates (3) to (6): 78 x 10-'7/'l:
The coefficient of thermal expansion is about 100 XIO/''C, which is between the Sendust thermal expansion coefficient of 130 to 140 x 10/-7°C for the metal magnetic thin films (7) and (8).
尚、上述した安定化剤としては、イツトリア（Ｙ２ ｏ
３）以外に、マグネシア（ＭｇＯ）やカルシア（Ｃａ
Ｏ）を使用することも可能で、イツトリアの場合とは異
なる所定の含有量でもって部分安定化ジルコニアを組成
する。In addition, as the above-mentioned stabilizer, ittria (Y2 o
In addition to 3), magnesia (MgO) and calcia (Ca
It is also possible to use O) to compose partially stabilized zirconia with a predetermined content different from that of ittria.
本発明の磁気ヘッドＢのスライダ部（１）は、第２図に
示すように一方の第１のヘッド基板（３）の接合面に上
記部分安定化ジルコニアからなる中間薄膜（１１）をス
バ）クランクで被着形威し、その上に金属磁性薄ｌｌ！
（７）をスパッタリング等で被着形威し、更にその上
に再度中間ｉ！Ｅ１！ （１１）を形成した上で接着用
ガラスＩＩ！ （９）を被着する。As shown in FIG. 2, the slider portion (1) of the magnetic head B of the present invention has an intermediate thin film (11) made of the partially stabilized zirconia on the bonding surface of one first head substrate (3). Adhere it to the crank and put a thin metal magnetic layer on it!
(7) is deposited by sputtering, etc., and then the intermediate i! E1! After forming (11), adhesive glass II! (9) is applied.
この時、上記中間ｉ！Ｉｌ！ （１１）の膜厚は０．０
５〜０．５μｍ程度に設定され、最適値としては０．２
μ■が好ましい。この膜厚が０．０５μ■よりも小さい
と部分安定化ジルコニアが十分作用せず、０．５μ蒙よ
りも大きいと成膜時に剥離し易くなって後工程での加工
処理が困難となる。尚、金属磁性薄膜（７〉及び接着用
ガラス膜（９〉の各膜厚は、５〜２０μｍ及び１μｍに
夫々設定されることが好ましい。上述した１ｆ；Ｌ膜後
、上記第１のヘッド基板（３）に他方の第１のヘッド基
板（４）を街合し、上記ガラス膜（９〉を加熱溶融させ
て接合一体化する。また、ヘッド部（２）も、上述した
スライダ部（１）と同様、第２のヘッド基板（５）（６
）で金属磁性ｉ１［！（８）をその両側に中間薄膜（１
２） （１２）を配して挾み込んでガラス（１０）で
接合一体化した上で略コ字形状に底形し巻線処理する。At this time, the above intermediate i! Il! The film thickness of (11) is 0.0
It is set to about 5 to 0.5 μm, and the optimal value is 0.2
μ■ is preferred. If the film thickness is smaller than 0.05 .mu.m, the partially stabilized zirconia will not function sufficiently, and if it is larger than 0.5 .mu.m, it will easily peel off during film formation, making processing in subsequent steps difficult. The thicknesses of the metal magnetic thin film (7) and the adhesive glass film (9) are preferably set to 5 to 20 μm and 1 μm, respectively. After the above-mentioned 1f; L film, the first head substrate (3) is assembled with the other first head substrate (4), and the glass film (9) is heated and melted to integrate the head part (2) with the slider part (1). ), the second head substrate (5) (6
) and metal magnetism i1 [! (8) on both sides of the intermediate thin film (1
2) After placing (12) and sandwiching them together and joining them together with glass (10), the bottom is shaped into a substantially U-shape and wound.
そして、第３図に示すように、このようにして得られた
直方体形状のスライダ部（１）の−側壁面に、上記スラ
イダ部（１）と同様にして得られた巻線処理済みの略コ
字形状のヘッド部（２）をガラスで接着固定する。Then, as shown in FIG. 3, on the negative side wall surface of the rectangular parallelepiped slider section (1) obtained in this way, a substantially wire-wound wire obtained in the same manner as the slider section (1) described above is applied. The U-shaped head portion (2) is adhesively fixed with glass.
上記磁気ヘッドＢのヘッド部（２）では、一対の第２の
ヘッド基板（５）（６）のガラス接合後や後工程での加
工処理時に、上記第２のヘッド基板（５）（６）と金属
磁性１１膜（８）間で生じた内部応力を中間薄膜（１２
）で緩和する。即ち、上記内部応力によりマイクロクラ
ンクが発生すると、中間薄Ｐ （１２）の部分安定化ジ
ルコニアはその結晶相が正方晶（を相）から単斜晶（ｍ
相）に移行するマルテンサイト変態が発現し、これによ
り上記クランクが進行することを阻止する。また、中間
″１ｒＪｉ （１２）の部分安定化ジルコニアの熱膨張
係数が、第２のヘッド基板（５）（６）のアルミナチタ
ンカーバイドと金属磁性薄膜（８）のセンダストとの中
間に位置するので上記内部応力を確実に吸収する。In the head section (2) of the magnetic head B, after the pair of second head substrates (5, 6) are bonded with glass or during processing in a post-process, the pair of second head substrates (5, 6) are The internal stress generated between the metal magnetic 11 film (8) and the intermediate thin film (12
). That is, when a microcrank occurs due to the above-mentioned internal stress, the partially stabilized zirconia with intermediate thinness P (12) changes its crystal phase from tetragonal (phase) to monoclinic (m
A martensitic transformation occurs, which leads to phase), which prevents the crank from progressing. In addition, since the thermal expansion coefficient of the partially stabilized zirconia in the middle "1rJi (12) is located between the alumina titanium carbide of the second head substrate (5) (6) and the sendust of the metal magnetic thin film (8), The above internal stress is reliably absorbed.
尚、上記実施例では、ＨＤＤ装置に使用される磁気ヘッ
ドについて説明したが、本発明はこれに限定されること
なく、一対のヘッド基板で金属磁性ｉ＊ｍを挾み込んだ
構造のラミネート型磁気ヘッドであれば通用可能である
。Although the above embodiment describes a magnetic head used in an HDD device, the present invention is not limited thereto, and may be applied to a laminate type head having a structure in which a pair of head substrates sandwich a metal magnetic i*m. Any magnetic head can be used.
本発明に係る磁気ヘッドによれば、ヘッド基板と金属磁
性ｉｓ間に部分安定化ジルコニアの中間薄膜を介在させ
たから、ヘッド基板と金属磁性薄膜間で生した内部応力
を上記中間薄膜で十分に緩和することが可能となり、金
属磁性ｉ膜が歪むことなく良好な磁気ヘッド特性が得ら
れると共に上記金属磁性ａｌＩＩ！ｊｉが剥離すること
も皆無となり、製品の歩留まりが大幅に向上すると共に
信頼性の高い良品質の磁気ヘッドを提供できる。According to the magnetic head of the present invention, since the intermediate thin film of partially stabilized zirconia is interposed between the head substrate and the metal magnetic IS, the internal stress generated between the head substrate and the metal magnetic thin film can be sufficiently alleviated by the intermediate thin film. This makes it possible to obtain good magnetic head characteristics without distorting the metal magnetic i film, and to obtain the above metal magnetic alII! There is no possibility of the ji peeling off, and the yield of products is greatly improved, and a highly reliable and high quality magnetic head can be provided.
第１図乃至第３図は本発明に係る磁気ヘッドの一実施例
を説明するためのもので、第１図は磁気ヘッドの組立完
了斜視図、第２図は第１図のスライダ部の組立分解斜視
図、第３図は第１図の磁気ヘッドの組立分解斜視図であ
る。
第４図乃至第６図は磁気ヘッドの従来例を説明するため
のもので、第４図は磁気ヘッドの組立完了斜視図、第５
図はｊ８４図のスライダ部の組立分解斜視図、第６図は
第４図の磁気ヘッドの組立分解斜視図である。
（３）〜（６）−・・ヘッド基板、
（７）＜８１−一金属磁性Ｗｉ膜、
（１１） （１２）−一中間ｓｉ＊。
特 許 出 願 人 関西日本電気株式会社代
理 人 江 原 省 吾
２３−1 to 3 are for explaining one embodiment of the magnetic head according to the present invention. FIG. 1 is a perspective view of the completed assembly of the magnetic head, and FIG. 2 is an assembled view of the slider section of FIG. 1. FIG. 3 is an exploded perspective view of the magnetic head shown in FIG. 1. 4 to 6 are for explaining conventional examples of magnetic heads. FIG. 4 is a perspective view of the magnetic head after assembly, and FIG.
The figure is an assembled and disassembled perspective view of the slider portion shown in FIG. j84, and FIG. 6 is an assembled and disassembled perspective view of the magnetic head shown in FIG. 4. (3) to (6)--head substrate, (7)<81-one metal magnetic Wi film, (11) (12)-one intermediate Si*. Patent applicant: Kansai NEC Co., Ltd.
Mr. Gangwon Province Go 23-
Claims (1)
に金属磁性薄膜を挟み込んで接合一体化した磁気ヘッド
であって、 上記ヘッド基板と金属磁性薄膜との間に、ジルコニアに
安定化剤を添加した部分安定化ジルコニアからなる中間
薄膜を介在させたことを特徴とする磁気ヘッド。[Claims] A magnetic head in which a metal magnetic thin film is sandwiched and bonded between a pair of head substrates made of alumina titanium carbide, wherein a stabilizer is added to zirconia between the head substrate and the metal magnetic thin film. A magnetic head characterized by interposing an intermediate thin film made of partially stabilized zirconia doped with .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7157590A JPH03272004A (en) | 1990-03-20 | 1990-03-20 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7157590A JPH03272004A (en) | 1990-03-20 | 1990-03-20 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03272004A true JPH03272004A (en) | 1991-12-03 |
Family
ID=13464637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7157590A Pending JPH03272004A (en) | 1990-03-20 | 1990-03-20 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03272004A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5485332A (en) * | 1992-11-30 | 1996-01-16 | Minebea Co., Ltd. | Floating magnetic head having a chamfered magnetic head core |
| US5548459A (en) * | 1992-12-14 | 1996-08-20 | Minebea Co., Ltd. | Floating magnetic head |
-
1990
- 1990-03-20 JP JP7157590A patent/JPH03272004A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5485332A (en) * | 1992-11-30 | 1996-01-16 | Minebea Co., Ltd. | Floating magnetic head having a chamfered magnetic head core |
| US5548459A (en) * | 1992-12-14 | 1996-08-20 | Minebea Co., Ltd. | Floating magnetic head |
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