JPH033764U - - Google Patents
Info
- Publication number
- JPH033764U JPH033764U JP6380989U JP6380989U JPH033764U JP H033764 U JPH033764 U JP H033764U JP 6380989 U JP6380989 U JP 6380989U JP 6380989 U JP6380989 U JP 6380989U JP H033764 U JPH033764 U JP H033764U
- Authority
- JP
- Japan
- Prior art keywords
- abnormality
- laser device
- gas
- pump
- gas laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 6
- 239000012535 impurity Substances 0.000 claims description 5
- 230000005856 abnormality Effects 0.000 claims 7
- 238000001514 detection method Methods 0.000 claims 3
- 230000010355 oscillation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6380989U JPH033764U (2) | 1989-05-31 | 1989-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6380989U JPH033764U (2) | 1989-05-31 | 1989-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH033764U true JPH033764U (2) | 1991-01-16 |
Family
ID=31594187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6380989U Pending JPH033764U (2) | 1989-05-31 | 1989-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033764U (2) |
-
1989
- 1989-05-31 JP JP6380989U patent/JPH033764U/ja active Pending
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