JPH0338843U - - Google Patents

Info

Publication number
JPH0338843U
JPH0338843U JP9917989U JP9917989U JPH0338843U JP H0338843 U JPH0338843 U JP H0338843U JP 9917989 U JP9917989 U JP 9917989U JP 9917989 U JP9917989 U JP 9917989U JP H0338843 U JPH0338843 U JP H0338843U
Authority
JP
Japan
Prior art keywords
cylinders
pressure
outlets
pressure reduction
tilting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9917989U
Other languages
English (en)
Other versions
JPH0748574Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989099179U priority Critical patent/JPH0748574Y2/ja
Publication of JPH0338843U publication Critical patent/JPH0338843U/ja
Application granted granted Critical
Publication of JPH0748574Y2 publication Critical patent/JPH0748574Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Delivering By Means Of Belts And Rollers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例の側面図、第２図は
第１図の−矢視図、第３図は搬送物品の搬送
状態を示す作動状態図、第４図は搬送物品の停止
状態を示す作動状態図である。 １は筒体、２は軸受架台、２′は案内部、３は
加圧源、４は減圧源、５は加圧筒、６は減圧筒、
７は吹出口、８は吸引口、１２は傾動駆動装置、
１３は吹出口傾動調節装置、１７は傾動駆動装置
、１８は吸引口傾動調節装置、１９は搬送物品、
２０は流体を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 上方に向けて略同一平面内で開口し気体を吹き
    出す複数の吹出口を有する複数の加圧筒と、上方
    に向けて前記吹出口と略同一平面内で開口し気体
    を吸引する複数の吸引口を有し、前記複数の加圧
    筒と混在配置された複数の減圧筒と、前記複数の
    加圧筒の夫々に接続した加圧源と、前記複数の減
    圧筒の夫々に接続した減圧源と前記吹出口のすべ
    てを同方向に同時に傾動するための吹出口傾動調
    節装置と、前記吹出口の傾動方向と平行に左右側
    部に配置した案内部とを備えて物品を前記吹出口
    から吹き出される流体により浮遊状態にて搬送す
    るようにしたことを特徴とする搬送装置。
JP1989099179U 1989-08-25 1989-08-25 搬送装置 Expired - Lifetime JPH0748574Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989099179U JPH0748574Y2 (ja) 1989-08-25 1989-08-25 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989099179U JPH0748574Y2 (ja) 1989-08-25 1989-08-25 搬送装置

Publications (2)

Publication Number Publication Date
JPH0338843U true JPH0338843U (ja) 1991-04-15
JPH0748574Y2 JPH0748574Y2 (ja) 1995-11-08

Family

ID=31648237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989099179U Expired - Lifetime JPH0748574Y2 (ja) 1989-08-25 1989-08-25 搬送装置

Country Status (1)

Country Link
JP (1) JPH0748574Y2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006237097A (ja) * 2005-02-23 2006-09-07 Tokyo Electron Ltd ステージ装置および塗布処理装置
JP2008246286A (ja) * 2007-03-29 2008-10-16 Matsushita Electric Ind Co Ltd 空気清浄機
JP2013098576A (ja) * 2011-11-02 2013-05-20 Research And Business Foundation Sankyunquan Univ 移送方向転換が可能な基板移送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832869U (ja) * 1971-08-27 1973-04-20
JPS5016679U (ja) * 1973-04-28 1975-02-21
JPS592733U (ja) * 1982-06-28 1984-01-09 株式会社日立製作所 エアベアリング搬送装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832869U (ja) * 1971-08-27 1973-04-20
JPS5016679U (ja) * 1973-04-28 1975-02-21
JPS592733U (ja) * 1982-06-28 1984-01-09 株式会社日立製作所 エアベアリング搬送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006237097A (ja) * 2005-02-23 2006-09-07 Tokyo Electron Ltd ステージ装置および塗布処理装置
JP2008246286A (ja) * 2007-03-29 2008-10-16 Matsushita Electric Ind Co Ltd 空気清浄機
JP2013098576A (ja) * 2011-11-02 2013-05-20 Research And Business Foundation Sankyunquan Univ 移送方向転換が可能な基板移送装置

Also Published As

Publication number Publication date
JPH0748574Y2 (ja) 1995-11-08

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