JPH0340943B2 - - Google Patents
Info
- Publication number
- JPH0340943B2 JPH0340943B2 JP59185444A JP18544484A JPH0340943B2 JP H0340943 B2 JPH0340943 B2 JP H0340943B2 JP 59185444 A JP59185444 A JP 59185444A JP 18544484 A JP18544484 A JP 18544484A JP H0340943 B2 JPH0340943 B2 JP H0340943B2
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- chute
- air passage
- electronic components
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、IC(集積回路)デバイス等の電子部
品を低温の雰囲気中で動作試験をするために恒温
槽部内の測定部へ被測定電子部品を搬送する電子
部品搬送装置に関し、特に電子部品のジヤミング
を防止すると共に処理個数を増大することができ
る電子部品搬送装置に関する。[Detailed Description of the Invention] Industrial Application Field The present invention is a method for moving electronic components to be measured into a measurement section in a constant temperature chamber in order to test the operation of electronic components such as IC (integrated circuit) devices in a low-temperature atmosphere. The present invention relates to an electronic component transport device that transports electronic components, and particularly relates to an electronic component transport device that can prevent jamming of electronic components and increase the number of electronic components that can be processed.
従来の技術
従来のこの種の電子部品搬送装置は、第4図に
示すように、マガジン1に収納された被測定電子
部品2を恒温槽部3内の測定部4へ供給する適宜
の傾斜角の分類シユート5を有すると共に、上記
測定部4の測定結果により電子部品2を分類して
マガジン6に収納する適宜の傾斜角の分類シユー
ト7を有していた。なお、符号4′は、電子部品
テスタに接続するケーブルである。そして、低温
試験をするには、上記恒温槽部3内に液体窒素を
導入して槽内を設定温度な保つが、このとき該恒
温槽部3の入口8又は出口9から低温の窒素ガス
が流出することがある。例えば、第5図に示すよ
うに、恒温槽部3の出口9側において、上下動す
るシヤツタ10の部分から矢印A,A′のように
窒素ガスが流出し、分類シユート7の表面が結露
することがあつた。このとき、上記分類シユート
7の滑走面を滑る電子部品2が結露部分に吸着し
て滑らなくなりジヤミングを起こすことがあつ
た。そこで、従来は、第5図に示すように、分類
シユート7の終端部に設けられたストツパ11の
部分から、矢印Bのように斜め下から斜め上方に
向けて圧力エアを吹き出し、上記窒素ガスの流出
による結露を乾燥又は吹き飛ばし、ジヤミングを
防止していた。BACKGROUND TECHNOLOGY As shown in FIG. 4, a conventional electronic component transport device of this type has an appropriate inclination angle for supplying an electronic component 2 to be measured stored in a magazine 1 to a measuring section 4 in a constant temperature oven section 3. It also had a sorting chute 7 with an appropriate inclination angle for sorting the electronic components 2 and storing them in the magazine 6 according to the measurement results of the measuring section 4. Note that the reference numeral 4' is a cable connected to the electronic component tester. In order to perform a low temperature test, liquid nitrogen is introduced into the thermostatic chamber 3 to maintain the temperature within the chamber at the set temperature. It may leak out. For example, as shown in FIG. 5, nitrogen gas flows out as shown by arrows A and A' from the shutter 10 that moves up and down on the exit 9 side of the thermostatic chamber 3, and dew condenses on the surface of the classification chute 7. Something happened. At this time, the electronic component 2 sliding on the sliding surface of the classification chute 7 was attracted to the dew condensation portion and became unable to slide, causing jamming. Therefore, conventionally, as shown in FIG. 5, pressurized air is blown from a stopper 11 provided at the terminal end of the classification chute 7 from diagonally downward to diagonally upward as shown by arrow B to remove the nitrogen gas. This prevents jamming by drying or blowing away condensation caused by water leakage.
発明が解決しようとする問題点
しかし、上記の従来技術においては、ジヤミン
グ防止のための圧力エアの吹き出し方向は、矢印
Bのように電子部品2の滑走方向Cに対して鋭角
で交わつており、上記圧力エアは上記滑走方向C
と反対方向のベクトル成分B′を有していた。し
たがつて、分類シユート7上を矢印Cのように滑
走してくる電子部品2に上記ベクトル成分B′に
よつてブレーキがかかり、滑走速度が小さくなる
ものであつた。このことから、分類シユート7で
分類してマガジン6に収納する処理個数が低下す
るものであつた。そこで、本発明はこのような問
題点を解決することを目的とする。Problems to be Solved by the Invention However, in the above-mentioned prior art, the blowing direction of the pressurized air to prevent jamming intersects with the sliding direction C of the electronic component 2 at an acute angle as shown by arrow B. The above pressure air is in the above sliding direction C.
It had a vector component B′ in the opposite direction. Therefore, the electronic component 2 sliding on the classification chute 7 in the direction of arrow C is braked by the vector component B', and its sliding speed is reduced. As a result, the number of items to be sorted by the sorting chute 7 and stored in the magazine 6 is reduced. Therefore, an object of the present invention is to solve such problems.
問題点を解決するための手段
そして上記の問題点は本発明によれば、マガジ
ンに収納された被測定電子部品を低温試験用の恒
温槽部内の測定部へ供給する適宜の傾斜角の分類
シユートを有すると共に、上記測定部の測定結果
により電子部品をマガジンに分類収納する適宜の
傾斜角の分類シユートを有する電子部品搬送装置
において、上記分類シユートの恒温槽部入口近傍
又は分類シユートの恒温槽部出口近傍のいずれか
に、その下面側から電子部品の滑走面側に向けて
該電子部品の滑走方向と鋭角で交わる吹き出し方
向を有するエア通路を穿設し、このエア通路を介
して電子部品の滑走方向Cに沿うベクトル成分を
有する圧力エアを斜め上向きに吹き出すようにし
たことを特徴とする電子部品搬送装置を提供する
ことによつて解決される。Means for Solving the Problems According to the present invention, the above-mentioned problems can be solved by a classification chute having an appropriate inclination angle for supplying electronic components to be measured stored in a magazine to a measuring section in a thermostatic chamber section for low-temperature testing. and a sorting chute with an appropriate inclination angle for sorting and storing electronic components in magazines according to the measurement results of the measuring section, in the vicinity of the inlet of the thermostatic oven section of the sorting chute or the thermostatic oven section of the sorting chute. An air passage whose blowing direction intersects the sliding direction of the electronic component at an acute angle from the lower surface side toward the sliding surface side of the electronic component is bored somewhere near the outlet, and the electronic component is flown through this air passage. The problem is solved by providing an electronic component transport device characterized in that pressure air having a vector component along the sliding direction C is blown out diagonally upward.
作 用
本発明による電子部品搬送装置は、分配シユー
ト又は分類シユートの下面側から電子部品の滑走
面側に向けて該電子部品の滑走方向と鋭角で交わ
る吹出し方向を有するエア通路を穿設し、このエ
ア通路を介して電子部品の滑走方向に沿うベクト
ル成分を有する圧力エアを斜め上向きに吹き出す
ことにより、分配シユート又は分類シユートの表
面に付着した結露を乾燥又は吹き飛ばすと共に、
上記分配シユート又は分類シユート上を滑走する
電子部品をその滑走方向に沿つて押し出すもので
ある。Function The electronic component conveying device according to the present invention has an air passage formed from the lower surface side of the distribution chute or the sorting chute toward the sliding surface side of the electronic component and having a blowing direction that intersects at an acute angle with the sliding direction of the electronic component, By blowing out pressure air having a vector component along the sliding direction of the electronic components obliquely upward through this air passage, condensation adhering to the surface of the distribution chute or classification chute is dried or blown away, and
Electronic components sliding on the distribution chute or sorting chute are pushed out along the sliding direction.
実施例
以下、本発明の実施例を添付図面に基いて詳細
に説明する。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
本発明による電子部品搬送装置は、第4図に示
す従来例と同様に、マガジン1に収納されたIC
デバイス等の被測定電子部品2を低温試験用の恒
温槽部3内の測定部4へ供給する適宜の傾斜角の
分配シユート5を有すると共に、上記測定部4の
測定結果により電子部品2を分類してマガジン6
に収納する適宜の傾斜角の分類シユート7を有し
ている。 The electronic component transport device according to the present invention is similar to the conventional example shown in FIG.
It has a distribution chute 5 with an appropriate inclination angle for supplying electronic components 2 to be measured such as devices to a measuring section 4 in a constant temperature chamber section 3 for low-temperature testing, and classifies the electronic components 2 based on the measurement results of the measuring section 4. magazine 6
It has a sorting chute 7 with an appropriate angle of inclination to accommodate the classification chute 7.
上記分配シユート5は、第1図に示すように、
恒温槽部3の入口8側に位置されており、マガジ
ン1内に収納された被測定電子部品2を自動滑走
により、上記恒温槽部3へ供給するものである。
そして、この分配シユー5の恒温槽部3の入口8
へ向う近傍には、その下面側から上面の電子部品
2の滑走面側に向けて(第2図参照)エア通路1
2が穿設されている。このエア通路12は、上記
分配シユート5の滑走面な部分へ矢印Dのように
斜め上向きに圧力エアを吹き出すもので、この圧
力エアの吹き出し方向Dは分配シユート5上の電
子部品2の滑走方向Eと鋭角で交わるようにされ
ている。上記分配シユート5の下面側には、上記
エア通路12と連続するノズル13が形成された
ノズル部材14が設けられると共に、絞り弁15
が設けられている。この絞り弁15は、圧力エア
の供給管16と上記ノズル13とを連結すると共
に、圧力エアの流量を調節するものである。 The distribution chute 5, as shown in FIG.
It is located on the entrance 8 side of the thermostatic oven section 3, and supplies the electronic components 2 to be measured stored in the magazine 1 to the thermostatic oven section 3 by automatic sliding.
The inlet 8 of the constant temperature bath section 3 of this distribution shoe 5
In the vicinity toward
2 is drilled. This air passage 12 blows out pressurized air obliquely upward as shown by arrow D to the sliding surface of the distribution chute 5, and the blowing direction D of this pressure air is the sliding direction of the electronic component 2 on the distribution chute 5. It intersects with E at an acute angle. A nozzle member 14 in which a nozzle 13 continuous with the air passage 12 is formed is provided on the lower surface side of the distribution chute 5, and a throttle valve 15 is provided.
is provided. This throttle valve 15 connects the pressure air supply pipe 16 and the nozzle 13, and also adjusts the flow rate of the pressure air.
そして、上記絞り弁15を開いて供給管16か
ら圧力エアを供給すると、ノズル13及びエア通
路12を介して矢印D方向に圧力エアが吹き出さ
れる。このとき、上記圧力エアの斜め上向きの吹
き出し方向は、矢印Dのように電子部品2の滑走
方向Eと鋭角で交わつているので、上記圧力エア
はその滑走方向Eに沿う方向のベクトル成分
D′を有している。したがつて、上記圧力エアの
矢印D方向の吹き出しにより、恒温槽部3の入口
8のシヤツタ10の部分から矢印A,A′のよう
に流出する低温の窒素ガスによつて上記分配シユ
ート5の表面に付着した結露を乾燥又は吹き飛ば
すことができると共に、滑走方向Eに沿う方向の
ベクトル成分D′により分配シユー5上を滑走す
る電子部品2を押し出し、その滑走速度を大きく
することができる。 When the throttle valve 15 is opened to supply pressurized air from the supply pipe 16, the pressurized air is blown out in the direction of arrow D through the nozzle 13 and air passage 12. At this time, since the diagonally upward blowing direction of the pressurized air intersects the sliding direction E of the electronic component 2 at an acute angle as shown by arrow D, the pressure air has a vector component in the direction along the sliding direction E.
It has D′. Therefore, by blowing out the pressurized air in the direction of arrow D, the distribution chute 5 is heated by the low temperature nitrogen gas flowing out from the shutter 10 at the inlet 8 of the thermostatic chamber 3 as shown by the arrows A and A'. Condensation adhering to the surface can be dried or blown away, and the electronic component 2 sliding on the distribution shoe 5 can be pushed out by the vector component D' along the sliding direction E, increasing its sliding speed.
上記分類シユート7は、第3図に示すように、
恒温槽部3の出口9側に位置されており、測定部
4の測定結果により電子部品2を適宜分類して、
自動滑走によりマガジン6内へ収納するものであ
る。そして、この分類シユート7の恒温槽部3の
出口近傍には、第1図及び第2図に示す分配シユ
ート5の場合と同様に、その下面側から上面の電
子部品2の滑走面側に向けてエア通路12′が穿
設されている。このエア通路12′は、上記分類
シユート7の滑走面の部分へ矢印Fのように斜め
上向きに圧力エアを吹き出すもので、この圧力エ
アの吹き出し方向Fは分類シユート7上の電子部
品2の滑走方向Cと鋭角で交わるようにされてい
る。ノズル部材14′、絞り弁15′及び圧力エア
の供給管16′は、第1図の分配シユート5の場
合と同様に構成されている。したがつて、上記絞
り弁15′を開いて供給管16′から圧力エアを供
給すると、ノズル13′及びエア通路12′を介し
て矢印F方向に斜め上向き圧力エアが吹き出さ
れ、その圧力エアには電子部品2の滑走方向Cに
沿う方向のベクトル成分F′が含まれることとな
る。 As shown in FIG. 3, the classification shot 7 is as follows:
It is located on the outlet 9 side of the thermostatic oven section 3, and the electronic components 2 are classified as appropriate based on the measurement results of the measurement section 4.
It is stored in the magazine 6 by automatic sliding. In the vicinity of the outlet of the constant temperature chamber section 3 of the classification chute 7, there is provided a cable extending from the lower surface side to the sliding surface side of the electronic components 2 on the upper surface, as in the case of the distribution chute 5 shown in FIGS. 1 and 2. An air passage 12' is bored therein. This air passage 12' blows out pressurized air obliquely upward as shown by arrow F toward the sliding surface of the classification chute 7. It intersects direction C at an acute angle. The nozzle member 14', the throttle valve 15' and the pressure air supply pipe 16' are constructed in the same manner as in the distribution chute 5 of FIG. Therefore, when the throttle valve 15' is opened and pressure air is supplied from the supply pipe 16', pressure air is blown out obliquely upward in the direction of arrow F through the nozzle 13' and the air passage 12', and the pressure air includes a vector component F' in the direction along the sliding direction C of the electronic component 2.
なお、本発明は、分配シユート5又は分類シユ
ート7のいずれか一方にのみエア通路12又は1
2′を設けて圧力エアを吹き出してもよいが、分
配シユート5及び分類シユート7の両方にそれぞ
れエア通路12,12′を設け各々のエア通路1
2,12′から圧力エアを吹き出してもよい。後
者の場合は、恒温槽部3の入口8及び出口9の両
方においてジヤミングを防止すると共に、電子部
品2を滑走速度を大きくして処理個数を大幅に向
上することができる。 Note that the present invention does not provide air passages 12 or 1 only in either the distribution chute 5 or the classification chute 7.
Although air passages 12 and 12' may be provided in both the distribution chute 5 and the classification chute 7 to blow out pressurized air, air passages 12 and 12' may be provided in each air passage 1.
Pressure air may be blown out from 2, 12'. In the latter case, jamming can be prevented at both the inlet 8 and the outlet 9 of the thermostatic chamber 3, and the sliding speed of the electronic components 2 can be increased to greatly increase the number of electronic components processed.
発明の効果
本発明は以上のように構成されたので、低温試
験用の恒温槽部3の入口8又は出口9のシヤツタ
10の部分から流出する低温の窒素ガスによつて
分配シユート5又は分類シユート7の表面に付着
した結露を、上記それぞれのシユート5,7に穿
設されたエア通路12,12′からの斜め上向き
の圧力エアの吹き出しにより、乾燥又は吹き飛ば
すことができると共に、電子部品2の滑走方向に
沿うベクトル成分により分配シユート5又は分類
シユート7上を滑走する電子部品2を積極的に押
し出すことができる。従つて、上記電子部品2の
それぞれのシユート5,7上でのジヤミング防止
効果を向上することができる。Effects of the Invention Since the present invention is configured as described above, the distribution chute 5 or the classification chute is controlled by the low temperature nitrogen gas flowing out from the shutter 10 at the inlet 8 or outlet 9 of the constant temperature chamber section 3 for low temperature testing. The dew condensation adhering to the surface of the electronic component 7 can be dried or blown off by blowing diagonally upward pressure air from the air passages 12 and 12' formed in the respective chutes 5 and 7. The electronic component 2 sliding on the distribution chute 5 or the sorting chute 7 can be actively pushed out by the vector component along the sliding direction. Therefore, the jamming prevention effect on each chute 5, 7 of the electronic component 2 can be improved.
また、上記圧力エアの電子部品2の滑走方向に
沿うベクトル成分によつて分配シユート5又は分
類シユート7上を滑走する電子部品2をその滑走
方向に沿つて押し出すことができ、その滑走速度
を大きくすることができる。したがつて、被測定
電子部品2を速やかに測定部4へ供給したり、測
定後の電子部品2を速やかにマガジン6に分類収
納することができ、電子部品2の測定の処理個数
を増大して測定能率を向上することができる。 Furthermore, the vector component of the pressure air along the sliding direction of the electronic component 2 can push out the electronic component 2 sliding on the distribution chute 5 or the classification chute 7 along the sliding direction, increasing the sliding speed. can do. Therefore, the electronic components 2 to be measured can be promptly supplied to the measurement section 4, and the electronic components 2 after measurement can be promptly classified and stored in the magazine 6, increasing the number of electronic components 2 to be processed for measurement. measurement efficiency can be improved.
第1図は本発明による電子部品搬送装置の分配
シユートの部分を示す正面説明図、第2図はその
要部を示す断面図、第3図は分類シユートの部分
を示す正面説明図、第4図は従来及び本発明の電
子部品搬送装置の全体を示す正面図、第5図は従
来の電子部品搬送装置の分類シユートの部分を示
す正面説明図である。
1……マガジン、2……電子部品、3……恒温
槽部、4……測定部、5……分配シユート、6…
…マガジン、7……分類シユート、8……恒温槽
部入口、9……恒温槽部出口、12……エア通
路、13……ノズル。
FIG. 1 is a front explanatory view showing the distribution chute portion of the electronic component transfer device according to the present invention, FIG. 2 is a sectional view showing the main part thereof, FIG. 3 is a front explanatory view showing the classification chute portion, The figure is a front view showing the entirety of the conventional electronic component transport device and the present invention, and FIG. 5 is a front explanatory view showing the sorting chute portion of the conventional electronic component transport device. DESCRIPTION OF SYMBOLS 1...Magazine, 2...Electronic components, 3...Thermostat section, 4...Measurement section, 5...Distribution chute, 6...
... Magazine, 7 ... Classification chute, 8 ... Inlet of constant temperature chamber section, 9 ... Outlet of constant temperature chamber section, 12 ... Air passage, 13 ... Nozzle.
Claims (1)
試験用の恒温槽部内の測定部へ供給する適宜の傾
斜角の分配シユートを有すると共に、上記測定部
の測定結果により電子部品をマガジンに分類収納
する適宜の傾斜角の分類シユートを有する電子部
品搬送装置において、上記分配シユートの恒温槽
部入口近傍又は分類シユートの恒温槽部出口近傍
のいずれかに、その下面側から電子部品の滑走面
側に向けて該電子部品の滑走方向と鋭角で交わる
吹き出し方向を有するエア通路を穿設し、このエ
ア通路を介して電子部品の滑走方向に沿うベクト
ル成分を有する圧力エアを斜め上向きに吹き出す
ようにしたことを特徴とする電子部品搬送装置。 2 上記エア通路を、分配シユートの恒温槽部入
口近傍及び分類シユートの恒温槽部出口近傍の両
方に穿設し、それぞれのエア通路から圧力エアを
吹き出すようにしたことを特徴とする特許請求の
範囲第1項記載の電子部品搬送装置。[Scope of Claims] 1. A distribution chute with an appropriate inclination angle for supplying electronic components to be measured stored in a magazine to a measuring section in a thermostatic chamber section for low-temperature tests; In an electronic component transfer device having a sorting chute with an appropriate inclination angle for sorting and storing electronic components in magazines, the electronic components are placed either near the inlet of the thermostatic oven section of the distribution chute or near the outlet of the thermostatic oven section of the sorting chute from the bottom side. An air passage whose blowing direction intersects the sliding direction of the electronic component at an acute angle is bored toward the sliding surface of the electronic component, and through this air passage, pressure air having a vector component along the sliding direction of the electronic component is directed diagonally upward. An electronic component conveying device characterized by blowing out air. 2. The above-mentioned air passage is provided both in the vicinity of the inlet of the constant temperature chamber part of the distribution chute and in the vicinity of the outlet of the constant temperature chamber part of the classification chute, and pressurized air is blown out from each air passage. The electronic component transport device according to scope 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59185444A JPS6164134A (en) | 1984-09-06 | 1984-09-06 | Carrier device of electron parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59185444A JPS6164134A (en) | 1984-09-06 | 1984-09-06 | Carrier device of electron parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6164134A JPS6164134A (en) | 1986-04-02 |
| JPH0340943B2 true JPH0340943B2 (en) | 1991-06-20 |
Family
ID=16170898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59185444A Granted JPS6164134A (en) | 1984-09-06 | 1984-09-06 | Carrier device of electron parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6164134A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0434462Y2 (en) * | 1985-03-13 | 1992-08-17 | ||
| JPS6318279A (en) * | 1986-07-11 | 1988-01-26 | Minato Electron Kk | Method and apparatus for conveying ic handler |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS542073A (en) * | 1977-06-07 | 1979-01-09 | Canon Inc | Alignment unit |
| JPS58168250A (en) * | 1982-03-30 | 1983-10-04 | Toshiba Corp | Testing head unit |
-
1984
- 1984-09-06 JP JP59185444A patent/JPS6164134A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6164134A (en) | 1986-04-02 |
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