JPH0345632U - - Google Patents
Info
- Publication number
- JPH0345632U JPH0345632U JP10680389U JP10680389U JPH0345632U JP H0345632 U JPH0345632 U JP H0345632U JP 10680389 U JP10680389 U JP 10680389U JP 10680389 U JP10680389 U JP 10680389U JP H0345632 U JPH0345632 U JP H0345632U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum port
- pair
- sealing part
- pressure cvd
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920001971 elastomer Polymers 0.000 claims description 4
- 239000000806 elastomer Substances 0.000 claims description 4
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims 2
- 238000012856 packing Methods 0.000 claims 2
- 238000007789 sealing Methods 0.000 claims 2
Description
第１図は本考案装置の第１実施例の構成を示す
要部の断面図、第２図は本考案装置の第２実施例
の構成を示す要部の断面図である。
１……反応管、２……キヤツプ、３……ベース
、４……第１インレツトアダプタ、５……第２イ
ンレツトアダプタ、６……インレツトアダプタ、
７……反応管押さえ、９……第１エラストマパツ
キン（Ｏリング）、１０……第２エラストマパツ
キン（Ｏリング）、１１……第３エラストマパツ
キン（Ｏリング）、１６……真空引きポート、１
７……真空引きポート、１８……端部フランジ。
FIG. 1 is a sectional view of essential parts showing the structure of a first embodiment of the device of the present invention, and FIG. 2 is a sectional view of essential parts showing the structure of a second embodiment of the device of the present invention. DESCRIPTION OF SYMBOLS 1... Reaction tube, 2... Cap, 3... Base, 4... First inlet adapter, 5... Second inlet adapter, 6... Inlet adapter,
7... Reaction tube holder, 9... First elastomer seal (O ring), 10... Second elastomer seal (O ring), 11... Third elastomer seal (O ring), 16... Vacuum port, 1
7... Vacuum port, 18... End flange.
Claims (1)
得ないシール部を施設した減圧ＣＶＤ装置におい
て、シール部を対をなす２重パツキン構造とし、
この対をなすパツキン間に真空引きポートを設け
、この真空引きポートを排気装置に接続してなる
減圧ＣＶＤ装置。 In a low-pressure CVD equipment equipped with a sealing part that requires the use of an elastomer packing in the reaction tube, the sealing part has a double packing structure that forms a pair,
This is a low pressure CVD device in which a vacuum port is provided between the pair of gaskets, and the vacuum port is connected to an exhaust device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10680389U JPH0345632U (en) | 1989-09-11 | 1989-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10680389U JPH0345632U (en) | 1989-09-11 | 1989-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0345632U true JPH0345632U (en) | 1991-04-26 |
Family
ID=31655525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10680389U Pending JPH0345632U (en) | 1989-09-11 | 1989-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345632U (en) |
-
1989
- 1989-09-11 JP JP10680389U patent/JPH0345632U/ja active Pending
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