JPH0353552U - - Google Patents

Info

Publication number
JPH0353552U
JPH0353552U JP11547389U JP11547389U JPH0353552U JP H0353552 U JPH0353552 U JP H0353552U JP 11547389 U JP11547389 U JP 11547389U JP 11547389 U JP11547389 U JP 11547389U JP H0353552 U JPH0353552 U JP H0353552U
Authority
JP
Japan
Prior art keywords
evaporation
substances
blocks
multiple types
flight path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11547389U
Other languages
Japanese (ja)
Other versions
JPH069014Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11547389U priority Critical patent/JPH069014Y2/en
Publication of JPH0353552U publication Critical patent/JPH0353552U/ja
Application granted granted Critical
Publication of JPH069014Y2 publication Critical patent/JPH069014Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図及び第２図はこの考案の実施例を示し、
第１図は真空蒸着装置の概略構造を示す縦断面図
、第２図は第１図におけるＡ−Ａ線断面図である
。 ２……真空室、３……蒸着対象、５……蒸着源
、６……シヤツタ機構、１５……シヤツタ、１９
……シヤツタ板、２０……遮閉壁。 1 and 2 show an embodiment of this invention,
FIG. 1 is a vertical cross-sectional view showing a schematic structure of a vacuum evaporation apparatus, and FIG. 2 is a cross-sectional view taken along the line A--A in FIG. 1. 2... Vacuum chamber, 3... Vapor deposition target, 5... Vapor deposition source, 6... Shutter mechanism, 15... Shutter, 19
...Shutter board, 20...Closing wall.

Claims (1)

【実用新案登録請求の範囲】 複数種の蒸着物質を個別に蒸発供給する蒸発源
と、必要時にのみ蒸発物質の飛翔経路を遮つて、
蒸発物質の供給制御を行うシヤツタ機構とを備え
ている真空蒸着装置であつて、 複数種の蒸発物質に対応して設けられる、複数
基の個別操作可能なシヤツタでシヤツタ機構を構
成し、 シヤツタは、それぞれ蒸発物質の飛翔経路を遮
るシヤツタ板を有し、各シヤツタ板の遮閉壁が、
対応する蒸発物質の熱膨張率と一致ないしは近似
する熱膨張率を有する材料で形成されていること
を特徴とする真空蒸着装置。[Claim for Utility Model Registration] An evaporation source that individually evaporates and supplies multiple types of evaporation substances, and an evaporation source that blocks the flight path of the evaporation substances only when necessary,
The vacuum evaporation apparatus is equipped with a shutter mechanism that controls the supply of evaporation substances, and the shutter mechanism is composed of a plurality of individually operable shutters that are provided corresponding to multiple types of evaporation substances, and the shutters are , each has a shutter plate that blocks the flight path of the evaporated substance, and the blocking wall of each shutter plate is
A vacuum evaporation apparatus characterized in that it is formed of a material having a coefficient of thermal expansion that matches or approximates that of a corresponding evaporated substance.
JP11547389U 1989-09-29 1989-09-29 Vacuum deposition equipment Expired - Lifetime JPH069014Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11547389U JPH069014Y2 (en) 1989-09-29 1989-09-29 Vacuum deposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11547389U JPH069014Y2 (en) 1989-09-29 1989-09-29 Vacuum deposition equipment

Publications (2)

Publication Number Publication Date
JPH0353552U true JPH0353552U (en) 1991-05-23
JPH069014Y2 JPH069014Y2 (en) 1994-03-09

Family

ID=31663801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11547389U Expired - Lifetime JPH069014Y2 (en) 1989-09-29 1989-09-29 Vacuum deposition equipment

Country Status (1)

Country Link
JP (1) JPH069014Y2 (en)

Also Published As

Publication number Publication date
JPH069014Y2 (en) 1994-03-09

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