JPH0363571U - - Google Patents
Info
- Publication number
- JPH0363571U JPH0363571U JP12500289U JP12500289U JPH0363571U JP H0363571 U JPH0363571 U JP H0363571U JP 12500289 U JP12500289 U JP 12500289U JP 12500289 U JP12500289 U JP 12500289U JP H0363571 U JPH0363571 U JP H0363571U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- reaction tube
- gas supply
- supply pipe
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001882 dioxygen Inorganic materials 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 5
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000011144 upstream manufacturing Methods 0.000 claims 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案に係る酸化物超伝導薄膜の気相
成長装置を示す全体構成説明図、第２図は従来の
同上気相成長装置を示した要部の構成略示説明図
である。
１……反応管、２……酸素ガスの供給パイプ、
３……原料ガスの供給パイプ、５……吸気パイプ
、６……サセプタ、８……赤外線ランプ、１３…
…吹出口、Ｐ……基板。
FIG. 1 is an explanatory view of the overall configuration of a vapor phase growth apparatus for oxide superconducting thin films according to the present invention, and FIG. 2 is a schematic explanatory view of the main parts of the conventional vapor phase growth apparatus. 1...Reaction tube, 2...Oxygen gas supply pipe,
3... Raw material gas supply pipe, 5... Intake pipe, 6... Susceptor, 8... Infrared lamp, 13...
...Air outlet, P... Board.
Claims (1)
料ガスの供給用パイプが連結されると共に、上記
反応管の下流側に排ガス用の吸気パイプを連結し
、当該反応管内には基板を載置自在としたサセプ
タが配設され、同上反応管外には上記基板を加熱
するための赤外線ランプが隣接されたものにおい
て、前記酸素ガスの供給パイプを当該反応管に貫
設し、その吹出口を前記サセプタ上の基板近傍に
あつて、その上流側で、上記基板側へ向け開口し
てなる酸化物超伝導薄膜の気相成長装置。 An oxygen gas supply pipe and a raw material gas supply pipe are connected to the upstream side of the reaction tube, and an exhaust gas intake pipe is connected to the downstream side of the reaction tube, and a substrate is placed in the reaction tube. A flexible susceptor is provided, and an infrared lamp for heating the substrate is adjacent to the outside of the reaction tube, and the oxygen gas supply pipe is inserted through the reaction tube, and its outlet is connected to the infrared lamp for heating the substrate. A vapor phase growth apparatus for an oxide superconducting thin film, which is located near the substrate on the susceptor and has an opening toward the substrate on the upstream side thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125002U JP2526852Y2 (en) | 1989-10-25 | 1989-10-25 | Apparatus for vapor phase growth of oxide superconducting thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989125002U JP2526852Y2 (en) | 1989-10-25 | 1989-10-25 | Apparatus for vapor phase growth of oxide superconducting thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0363571U true JPH0363571U (en) | 1991-06-20 |
| JP2526852Y2 JP2526852Y2 (en) | 1997-02-26 |
Family
ID=31672891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989125002U Expired - Fee Related JP2526852Y2 (en) | 1989-10-25 | 1989-10-25 | Apparatus for vapor phase growth of oxide superconducting thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2526852Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101231205B1 (en) * | 2011-08-01 | 2013-02-07 | (주)용진일렉콤 | Connector assembly for optical cable |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307277A (en) * | 1987-06-05 | 1988-12-14 | Kawasaki Steel Corp | Photo-mocvd device for preparing thin film of metal oxide |
| JPH01201482A (en) * | 1987-10-01 | 1989-08-14 | Nippon Aneruba Kk | Vacuum vapor growth device |
-
1989
- 1989-10-25 JP JP1989125002U patent/JP2526852Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307277A (en) * | 1987-06-05 | 1988-12-14 | Kawasaki Steel Corp | Photo-mocvd device for preparing thin film of metal oxide |
| JPH01201482A (en) * | 1987-10-01 | 1989-08-14 | Nippon Aneruba Kk | Vacuum vapor growth device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101231205B1 (en) * | 2011-08-01 | 2013-02-07 | (주)용진일렉콤 | Connector assembly for optical cable |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2526852Y2 (en) | 1997-02-26 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |