JPH03116029U - - Google Patents
Info
- Publication number
- JPH03116029U JPH03116029U JP2605290U JP2605290U JPH03116029U JP H03116029 U JPH03116029 U JP H03116029U JP 2605290 U JP2605290 U JP 2605290U JP 2605290 U JP2605290 U JP 2605290U JP H03116029 U JPH03116029 U JP H03116029U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- crystals
- vapor phase
- crystal growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 5
- 239000012808 vapor phase Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 230000001376 precipitating effect Effects 0.000 claims 1
Description
第１図はこの考案の一実施例による気相結晶成
長装置の反応管を示す断面図、第２図は従来の気
相結晶成長装置の反応管を示す断面図である。
図において、１……原料ガス入口、２……反応
管、３……サセプタ、４……基板、５……ＲＦコ
イル、６……排気ガス出口、７……残留ガス排気
口、８……排気バルブを示す。なお、図中、同一
符号は同一、又は相当部分を示す。
FIG. 1 is a sectional view showing a reaction tube of a vapor phase crystal growth apparatus according to an embodiment of the invention, and FIG. 2 is a sectional view showing a reaction tube of a conventional vapor phase crystal growth apparatus. In the figure, 1... Raw material gas inlet, 2... Reaction tube, 3... Susceptor, 4... Substrate, 5... RF coil, 6... Exhaust gas outlet, 7... Residual gas exhaust port, 8... Exhaust valve is shown. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
るための反応管において、原料ガス入口と、結晶
を折出させるべき基板との間に、反応管内のガス
を除去するための排気口を設けたことを特徴とす
る気相結晶成長装置。 In a reaction tube for reacting multiple types of gases and precipitating them as crystals, an exhaust port is provided between the raw material gas inlet and the substrate from which the crystals are to be precipitated to remove the gas in the reaction tube. A vapor phase crystal growth apparatus characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2605290U JPH03116029U (en) | 1990-03-13 | 1990-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2605290U JPH03116029U (en) | 1990-03-13 | 1990-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116029U true JPH03116029U (en) | 1991-12-02 |
Family
ID=31528963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2605290U Pending JPH03116029U (en) | 1990-03-13 | 1990-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116029U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007312742A (en) * | 2006-05-29 | 2007-12-06 | Masahiko Sato | Preventing tool for perching of birds, small animal or the like |
-
1990
- 1990-03-13 JP JP2605290U patent/JPH03116029U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007312742A (en) * | 2006-05-29 | 2007-12-06 | Masahiko Sato | Preventing tool for perching of birds, small animal or the like |