JPH0364461U - - Google Patents
Info
- Publication number
- JPH0364461U JPH0364461U JP12589589U JP12589589U JPH0364461U JP H0364461 U JPH0364461 U JP H0364461U JP 12589589 U JP12589589 U JP 12589589U JP 12589589 U JP12589589 U JP 12589589U JP H0364461 U JPH0364461 U JP H0364461U
- Authority
- JP
- Japan
- Prior art keywords
- case
- oven
- stores
- solid element
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本考案に係るイオン注入装置のイオン
源の断面図である。第２図はイオン注入装置全体
の概略構成図、第３図は従来のイオン注入装置の
イオン源の断面図である。
７……半導体ウエーハ、１０……ケース、１０
ａ……先端側、２０……オーブン、３０……アー
クチヤンバ、３１……フイラメント、Ｅ……固定
元素。
FIG. 1 is a sectional view of an ion source of an ion implantation apparatus according to the present invention. FIG. 2 is a schematic diagram of the entire ion implantation device, and FIG. 3 is a cross-sectional view of the ion source of the conventional ion implantation device. 7... Semiconductor wafer, 10... Case, 10
a... Tip side, 20... Oven, 30... Arc chamber, 31... Filament, E... Fixed element.
Claims (1)
して気化させるオーブンと、前記オーブンを収納
するケースと、前記ケースの先端側に連設し、架
設したフイラメントによつて、上記気化したガス
をイオン化させるアークチヤンバとを具備したイ
オン注入装置において、 上記ケース内に複数のオーブンを収納したこと
を特徴とするイオン注入装置。[Claims for Utility Model Registration] An oven that stores a solid element and heats and vaporizes the solid element, a case that stores the oven, and a filament that is connected to and installed on the tip side of the case. Accordingly, an ion implantation apparatus comprising an arc chamber for ionizing the vaporized gas is characterized in that a plurality of ovens are housed in the case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12589589U JPH0364461U (en) | 1989-10-27 | 1989-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12589589U JPH0364461U (en) | 1989-10-27 | 1989-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0364461U true JPH0364461U (en) | 1991-06-24 |
Family
ID=31673745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12589589U Pending JPH0364461U (en) | 1989-10-27 | 1989-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0364461U (en) |
-
1989
- 1989-10-27 JP JP12589589U patent/JPH0364461U/ja active Pending
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