JPH0365656B2 - - Google Patents

Info

Publication number
JPH0365656B2
JPH0365656B2 JP58138269A JP13826983A JPH0365656B2 JP H0365656 B2 JPH0365656 B2 JP H0365656B2 JP 58138269 A JP58138269 A JP 58138269A JP 13826983 A JP13826983 A JP 13826983A JP H0365656 B2 JPH0365656 B2 JP H0365656B2
Authority
JP
Japan
Prior art keywords
substrate
vapor phase
film
gas
excitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58138269A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6030142A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58138269A priority Critical patent/JPS6030142A/ja
Publication of JPS6030142A publication Critical patent/JPS6030142A/ja
Publication of JPH0365656B2 publication Critical patent/JPH0365656B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
JP58138269A 1983-07-28 1983-07-28 気相成長方法 Granted JPS6030142A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58138269A JPS6030142A (ja) 1983-07-28 1983-07-28 気相成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58138269A JPS6030142A (ja) 1983-07-28 1983-07-28 気相成長方法

Publications (2)

Publication Number Publication Date
JPS6030142A JPS6030142A (ja) 1985-02-15
JPH0365656B2 true JPH0365656B2 (fr) 1991-10-14

Family

ID=15217974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58138269A Granted JPS6030142A (ja) 1983-07-28 1983-07-28 気相成長方法

Country Status (1)

Country Link
JP (1) JPS6030142A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1726520A2 (fr) 2005-05-23 2006-11-29 Shimano Inc. Dispositif de commande de changement de vitesse pour bicyclette

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1726520A2 (fr) 2005-05-23 2006-11-29 Shimano Inc. Dispositif de commande de changement de vitesse pour bicyclette

Also Published As

Publication number Publication date
JPS6030142A (ja) 1985-02-15

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