JPH0367064U - - Google Patents
Info
- Publication number
- JPH0367064U JPH0367064U JP12795789U JP12795789U JPH0367064U JP H0367064 U JPH0367064 U JP H0367064U JP 12795789 U JP12795789 U JP 12795789U JP 12795789 U JP12795789 U JP 12795789U JP H0367064 U JPH0367064 U JP H0367064U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film forming
- heater
- counter electrode
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例によるプラズマＣＶ
Ｄ装置の断面概略構成図、第２図は従来装置の第
１図に相当する図である。
１……成膜室、３……基板、６……対向電極、
７……ヒータブロツク、１１……高周波電源。
Figure 1 shows a plasma CV according to an embodiment of the present invention.
FIG. 2, a schematic cross-sectional configuration diagram of the device D, corresponds to FIG. 1 of the conventional device. 1... Film forming chamber, 3... Substrate, 6... Counter electrode,
7... Heater block, 11... High frequency power supply.
Claims (1)
する対向電極との間でグロー放電を起こして基板
の成膜処理を行う成膜装置において、 前記ヒータは、前記対向電極の背面側に、前記
対向電極と所定の隙間を介して設けられている成
膜装置。[Claims for Utility Model Registration] In a film forming apparatus that performs a film forming process on a substrate by heating a substrate with a heater and causing glow discharge between the substrate and a counter electrode facing the same, the heater A film forming apparatus provided on the back side of the electrode with a predetermined gap in between and the counter electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12795789U JPH0367064U (en) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12795789U JPH0367064U (en) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367064U true JPH0367064U (en) | 1991-06-28 |
Family
ID=31675691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12795789U Pending JPH0367064U (en) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367064U (en) |
-
1989
- 1989-10-31 JP JP12795789U patent/JPH0367064U/ja active Pending