JPH0367440U - - Google Patents
Info
- Publication number
- JPH0367440U JPH0367440U JP12911289U JP12911289U JPH0367440U JP H0367440 U JPH0367440 U JP H0367440U JP 12911289 U JP12911289 U JP 12911289U JP 12911289 U JP12911289 U JP 12911289U JP H0367440 U JPH0367440 U JP H0367440U
- Authority
- JP
- Japan
- Prior art keywords
- cassette chamber
- static electricity
- semiconductor manufacturing
- installation stand
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005611 electricity Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000003068 static effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Description
第１図、第２図は、それぞれ本考案による半導
体製造装置のキヤリア出し入れ部を示し、第１図
はカセツト室が大気の状態でウエハを搬送し、第
２図はカセツト室を真空状態にしてウエハを搬送
するカセツト室の図である。
１……キヤリア設置台、２……キヤリア、３…
…ウエハ、８……静電気除去装置、５……フイル
タ、６……大気カセツト室、７……真空カセツト
室。
1 and 2 respectively show the carrier loading/unloading section of the semiconductor manufacturing apparatus according to the present invention. In FIG. 1, wafers are transferred with the cassette chamber in an atmospheric condition, and in FIG. 2, the cassette chamber is in a vacuum condition. FIG. 3 is a diagram of a cassette chamber for transporting wafers. 1...Carrier installation stand, 2...Carrier, 3...
...Wafer, 8...Static electricity remover, 5...Filter, 6...Atmospheric cassette chamber, 7...Vacuum cassette chamber.
Claims (1)
おいて、静電気除去装置をカセツト室に設けたこ
とを特徴とする半導体製造装置。 A semiconductor manufacturing device having a carrier installation stand and a wafer transfer system, characterized in that a static electricity eliminator is provided in a cassette chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12911289U JPH0367440U (en) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12911289U JPH0367440U (en) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367440U true JPH0367440U (en) | 1991-07-01 |
Family
ID=31676771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12911289U Pending JPH0367440U (en) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367440U (en) |
-
1989
- 1989-11-06 JP JP12911289U patent/JPH0367440U/ja active Pending