JPH0394002A - Method and apparatus for manufacturing capsule in warm or hot isostatic pressing method - Google Patents

Abstract

PURPOSE:To prevent uneven deformation of a capsule at the time of pressurizing with isostatic pressing by enclosing a material to be treated in metal foil and welding the metal foil to seal the material to be treated. CONSTITUTION:The material 1 to be treated of powder or powder forming body, etc., is wrapped by rolling up the metal foil 12 having 30-300mum thickness. The metal foil 12 is seal-welded 13 to form gas exhaust hole 14. By inserting a gas exhaust pipe 15 into the gas exhaust hole 14, the air is exhausted with a pump 16 and the gas exhaust hole 14 part is seam-welded 13A to make the sealed metal capsule 10, in which the material 11 to be treated is sealed and evacuation is executed. HIP treatment is executed to this metal capsule 10. The powder forming body in the capsule 10 is compacted. The capsule 10 is shrunk following to the material to be treated at the time of pressurizing with the isostatic pressing. After executing the isostatic pressing, the capsule 10 is easily removed.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention is applicable to ceramic powders such as alumina, partially stabilized zirconia, halium titanate, zinc oxide, molybdenum disulfide, etc. High-density sintered bodies are produced by applying high fluid pressure to intermetallic compound powder bodies at high temperatures, or those made by stacking two or more different types of metal plates, metal plates or ceramic plates. The warm isostatic pressing method is used for diffusion bonding two or more materials, such as those with a sprayed layer of metal or ceramics on the surface, by applying high fluid pressure at high temperatures. The present invention relates to a capsule manufacturing method using the WIP method (WIP method) or the hot isostatic pressing method (HIP method), and an apparatus therefor.

(Conventional technology) The HIP method and WIP method are
This is a compression process using a high-pressure fluid of f/cml as a pressure medium, and compared to other methods, it has the characteristics of a high processing pressure value and isotropic compression, making it difficult to process. This technology is rapidly becoming popular in recent years as a high-density sintering technology for solid powder materials or as a solid-phase diffusion bonding technology. In the HIP method, high pressure gas is used as a pressure medium, so it is possible to generate high temperatures of over 2000°C.
The WIP method uses heat-resistant oil, so the temperature is 30°C.
The upper limit is about 0°C. However, in both methods, when performing high-density sintering or solid phase diffusion bonding of powder materials, pretreatment is required to coat the entire surface with an airtight material to prevent the pressure medium from entering the material. It becomes necessary.

A common method for this pretreatment is to encapsulate the material to be treated in a metal capsule.
The method is presented in No. 08 and Japanese Unexamined Patent Publication No. 1167/1983 (No. 12).

FIG. 16 is an example presented in Japanese Patent Application Laid-Open No. 47-16308. In this example, first, a plate-shaped material to be treated 201 is overlapped with a metal foil 2 (12), and then it is placed inside a metal tube material 2 (14) with a wall thickness of 3 to 6 cm to which the bottom part 2 (13 is welded). Next, the lid 2 (16) having a vacuum pipe 205 is welded to the tube material 2 (14). After this, the lid 2 (16) having a vacuum pipe 205 is evacuated and degassed and sealed to produce a capsule.

FIG. 17 is an example presented in JP-A-57-1167 (No. 12. Material 21
1 does not come into contact with the tube material 212. Next, the space between the material to be treated 211 and the pipe material 212 is filled with the secondary pressure medium 213, and the chamber to be treated 211 is filled with the secondary pressure medium 213.
13, the lid 214 is circumferentially welded at the weld 215. Thereafter, the vacuum is removed through the exhaust pipe 216, and the middle part of the exhaust pipe 216 is welded to produce a capsule. In this example, the degree of freedom in the shape of the capsule relative to the shape of the material to be processed 211 is greater than in the case of FIG. 16, so that it is possible to handle materials with complex shapes.

(Problems to be Solved by the Invention) The conventional capsule shown in FIGS. 16 and 17 has the following problems.

(2): Figures 18 (1) and 18 (2) illustrate the treated body before and after the hydrostatic pressure treatment, and the problems of the prior art will be explained with reference to these figures. The capsules according to the prior art are manufactured from metal tubes or plates with a wall thickness of 3 to 61 m, and the peripheral part of the capsule (the part indicated by 221 to 224 in Fig. 18) and , since the rigidity is not uniform in the central part (the part indicated by 225 to 227 in Fig. 18 (1)), it cannot deform uniformly in response to the increase in pressure during the pressure increase process, and the rigidity is small. Since the portion is deformed first, the uniformity of pressure transmission to the material to be treated is inhibited, and as a result, there is a problem in that the material to be treated is distorted. For example, in Figure 18 (2
), the entire object to be processed shrinks into a concave shape.

For this reason, if the material to be treated is a thin plate material such as In, it is difficult to ensure flatness and it is practically impossible to apply this method.

9 10 ■; When enclosing the material to be treated, in the case of Fig. 16, if the gap between the material to be treated and the capsule is too narrow, it will not be possible to insert the capsule, and if it is too wide, pressure transmission will be inhibited. It is necessary to accurately match the outer diameter of the material to be treated and the inner diameter of the capsule so that there is a certain amount of clearance between them, and the dimensions of the capsule must be determined in accordance with the dimensions of the material to be treated.

This not only complicates the process of manufacturing the capsules, but also makes it difficult to manufacture the capsules if the material to be treated has a complicated shape.

On the other hand, even in the case of FIG. 17, the space between the capsule and the material to be treated must be filled with a powder secondary pressure medium that does not inhibit pressure transmission, which also complicates the process.

■; Because the capsule undergoes uneven deformation and distortion due to pressure, and because the capsule is thick, it is difficult to remove the material after hydrostatic pressure treatment by scraping it off with a lathe or using strong acid. The only method that can be applied is to melt and remove the material, and it is not easy to remove the material to be processed. Therefore, the process becomes complicated.

①; Since the rigid pipe part used for vacuum deaeration is sealed by welding or the like, it is difficult to obtain a good sealing condition and the sealing performance is lacking.

Further, in the case shown in FIG. 17, it is necessary to take measures to prevent the secondary pressure medium from being sucked during vacuum degassing, which poses a problem in productivity.

In view of the problems of the prior art, the present invention prevents the capsule from being unevenly deformed and distorting the material to be treated during hydrostatic pressurization, and the process of encapsulating the material to be treated in the capsule is simple. The first object is to provide a method for manufacturing a capsule in warm or hot isostatic pressing, which can be used even when the material to be treated has a complicated shape and which makes it easy to take out the material after being subjected to isostatic pressure. shall be.

In order to put the method into practical use, a second object is to provide an apparatus for efficiently manufacturing capsules.

(Means for Solving the Problems) The present invention takes the following technical means to achieve the above-mentioned first object.

12 That is, the present method invention includes the first step of storing a material to be treated, such as a powder or a powder compact, in a metal foil having a thickness of 30 μm to 300 μm; welding the metal foil within the metal foil; The second step is to encapsulate and create a capsule.
(Claim (l)
)).

In addition, the material to be treated, such as powder or powder compact, is
A first step of housing the material in a metal foil having a thickness of m to 300 μm; A second step of manufacturing a capsule by enclosing the material to be treated in the metal foil by welding the metal foil in an inert gas atmosphere; (Claim)
2)).

Furthermore, the material to be treated, such as powder or powder compact, is
A first step of placing the metal foil containing the material to be treated in a vacuum chamber having an irradiation window; A third step of drawing a vacuum inside the vacuum chamber. Step: A fourth step of manufacturing a capsule by welding the metal foil with a beam incident through the irradiation window and encapsulating the material to be treated within the metal foil. 3))
.

In addition, the material to be treated, such as powder or powder compact, is
A first step of storing the metal foil in a metal foil having a thickness of m to 300 μm; a second step of closely adhering the metal foil around the peripheral portion of the material to be treated so that the gap is 1710 mm or less of the thickness of the metal foil; A third step of manufacturing a capsule by encapsulating the material to be treated in a metal foil by welding the close contact part of the metal foil.
(Claim 14)
)).

Furthermore, the material to be treated, such as powder or powder compact, is
The first container is housed in a bag-shaped metal foil with a thickness of m to 300 μm.
Step: A second step of inserting a vacuum degassing pipe into the opening of the bag-shaped metal foil and hermetically sealing the opening;
A third step of vacuum degassing through the vacuum deaeration pipe; the metal foil is overlapped and welded between the material to be treated and the vacuum deaeration pipe, the material to be treated is encapsulated within the metal foil, and a capsule is manufactured. Claim (5)).

Further, when the opening of the bag-shaped metal foil is sealed, the metal foil and the vacuum degassing pipe are sealed using an l3 14 adhesive (Claim (6)).

Furthermore, when the material to be treated is housed in the metal foil, a coating layer made of hard-to-sinter ceramics is interposed between the material to be treated and the metal foil.
7)).

Further, when the material to be treated is housed in the metal foil, the material to be treated is covered with ceramic paper (claim (claim)
8)).

Furthermore, when the material to be treated is housed in the metal foil, the zirconium foil is housed in the metal foil together with the material to be treated (Claim (9)).

Furthermore, when the material to be treated is housed in the metal foil, the titanium foil is housed in the metal foil together with the material to be treated (claim 00).

Furthermore, the metal foil is a container-shaped metal foil having a storage recess,
It is characterized by consisting of a flat metal foil (Claim 0
υ).

Furthermore, in order to achieve the above-mentioned second object, the present device invention takes the following technical means.

In other words, the wooden device invention includes: a clamping means for closely contacting a metal foil containing a material to be treated; a beam welding means for welding; connected to either the beam welding means or the workpiece in one direction, and welding the beam welding means or the workpiece on a plane substantially parallel to the foil surface of the metal foil; It is characterized by the fact that it is a means of transportation that allows people to move.

Further, a clamp means for closely contacting the metal foil containing the material to be treated; a vacuum chamber having an irradiation window and capable of housing the clamp means therein; a beam welding means for welding the metal foil by irradiating the metal foil with a beam through the irradiation window with the axis of the beam substantially perpendicular to the foil; the beam welding means or the processed object; moving means connected to either one of the metal foils and moving the beam welding means or the workpiece on a plane substantially parallel to the foil surface of the metal foil; (Claim α)

Furthermore, the beam welding means is a light beam welder (Claim α4)).

Further, the beam welding means is a laser beam welding machine (claim 05)).

Furthermore, the beam welding means is an electron beam welder (claim (16)).

Further, it is characterized in that the clamping means utilizes the magnetic force of the magnet 1 (claim 01).

(Function) In the method of the present invention described above, since the capsule is surrounded by a thin metal foil with a thickness of 30 to 300 μm, the capsule uniformly contracts following the material to be treated during hydrostatic pressurization.

Therefore, distortion due to non-uniform shrinkage is not caused in the processed grain. In addition, since it can be easily cut with a metal foil, metal scissors, etc., and it can be easily peeled off from the material to be treated, it is easy to remove the capsule after the hydrostatic pressure treatment.

In addition, since the capsule is constructed by sandwiching the material to be treated between metal foils, making the peripheral portions of the material closely adhere to each other, and then welding the adhered portions, there is a high degree of freedom in the shape of the metal foil relative to the shape of the material to be treated. is large, and there is no need to manufacture capsules for each material to be treated.

Furthermore, since the metal foil is in close contact with the material to be treated, there is no need to fill the area around the material to be treated with a secondary pressure medium.

The thickness of the metal foil used in the present invention is determined based on the flexibility, plastic deformability, cutting strength, etc. of the material, and specifically, it is 30 to 300 μm.

This is because when the thickness of the metal foil is less than 30 μm, pinholes may be included in the metal foil, and the airtightness of the material itself may not be strictly ensured. Furthermore, even if it is slightly scratched during transportation, there is a possibility that it will be damaged and a hole will be formed, which is impractical.

Furthermore, if the thickness exceeds 300 μm, it cannot be cut with a simple method such as scissors, and it becomes difficult to remove the capsule after HIP, requiring the use of a lathe or the like. Meliso 1- is gone.

More specifically, the metal foil is recommended to have a diameter of 100 μm or less 17 18 because it is easy to cut from the viewpoint of removing the capsule after HIP treatment.

According to the present apparatus invention described above, the present method invention can be implemented efficiently.

(Example) Fig. 1 (1) f2) (3) 141 is the first example of the present invention.
A specific example of how to make a capsule 10 is shown, in which a cylindrical treatment material 11 is sandwiched between a folded sheet of metal foil 12 and molded.

As shown in FIG. 1 (1), the material to be treated 1 is shown as a powder shape
1 is wrapped by folding back a metal foil 12 having a thickness of 30 μm to 300 μm, and the metal foil 12 is sealed by welding 13 to form a deaeration hole 14, as shown in FIG. 1 (2). After inserting the degassing pipe 15 and degassing with the pump 16, the degassing hole 14 is seam welded 13A as shown in FIG. The metal capsule 10 has a shape.

This metal capsule 10 is constructed as shown in FIG.
It is supplied to the processing chamber 178 of the IP device 17 and subjected to HIP processing.

That is, the powder compact 11 within the capsule 10 is compressed or shaped by the synergistic action of the pressurized gas and heat.

In FIG. 14), 18 is a high-pressure cylinder, 19 is a lid, 20 is a heat insulating cylinder, 21 is a heater, and 22 is a press frame.

Fig. 2 fil 421 +31 shows the manner of making the metal capsule 30 according to the second embodiment of the present invention, in which a cylindrical workpiece 31 is sandwiched between two metal foils 32, 32a and molded. shows.

FIG. 2 (2) is a sectional view taken in the direction of arrow A in FIG. 2 (1),
FIG. 2 (3) is a diagram showing the capsule after discipline.

The metal foils 32 and 32a with a thickness of 30 to 300 μm are the material to be treated 3
1, and the metal (aluminum) presser fitting 34 surrounding it
It is fastened with a bolt 35, and when it is vacuum degassed through a deaeration hole 36, it is sealed 33 by electron beam welding.

The capsule 30 created as described above is subjected to HIP processing in the same manner as described above.

FIG. 3 (11 f21 (31 f41) shows the creation of a capsule according to a third specific example of the present invention, in which a disc-shaped material to be treated is sandwiched between two metal foils and shaped into a certain shape.

FIG. 3(1) shows a disc-shaped processed material 41 to be subjected to HIP or WIP processing, and FIG. 3(2) shows two metal foils 42, 42a that will become capsules. and
FIG. 3 shows a state in which the material to be processed 41 is sandwiched between two metal foils 42 and 42a, and the metal foils 42 and 42a around the material to be processed 41 are brought into close contact with each other by a clamping device 43.
3).

After that, the metal foils 42 and 4 are brought into close contact with each other using a clamping device 43.
FIG. 3+41 shows a state in which the close contact portion of 2a is welded by the light beam welder 44.

In FIG. 3(3), 41 is a disc-shaped material to be processed, which is sandwiched between metal foils 42 and 42a. The clamp device 43 includes a ring-shaped upper clamp 45 and a lower clamp 46 that are arranged opposite to each other, and upper and lower clamps 45.
．． A plurality of bolts 47 passing through 46 and a bolt 48
By tightening and releasing these bolts 47 and Nantes 48, the metal foils 42 and 4 around the material 41 to be processed are removed.
2a are brought into close contact with each other.

In Fig. 3 14), 49 is a metal Ffi42, 42a
A moving device that moves on a plane parallel to the surface of the foil, and in this embodiment, it is a turntable. The moving device 49 has a structure in which a cylindrical rotary table 50a is placed on a cylindrical rotary table base 50b, and a motor (not shown) in the rotary table base 50b moves the material 4 to be processed.
1 sandwiched between metal foils 42. 42a and clamp device 4
3 is placed on the rotary table 50a. 51
is a support that holds the material to be processed 4l and the metal foil 42. on the rotary table 50a. 42a is supported in a stable state.

The mobile device W49 is installed on a base 52.

Further, in addition to the moving device 49, a support column 53 is erected on the base 52 on the side of the moving device 49. Support pillar 5
3 is a metal pipe, and a cylindrical Y-axis direction moving shaft 54 is fitted into an opening in the upper part of the pipe. The Y-axis direction movement axis 54 is moved relative to the support column 53 in the Y-axis direction in FIG.
- It is attached movably in the Y' direction.

Further, an adjustment screw 55 is attached to the upper part of the support column 53. The adjustment screw 55 and the Y-axis direction moving shaft 54 are arranged in a rack and pinion relationship. A support 56 is fixed to the upper part of the Y-axis direction moving shaft 54. An X-axis moving shaft 57 is attached to the support 56 so as to be movable in the xx' direction in FIG. 3 21 22 14).

A lamp house 58 of the light beam welding machine 44 is fixed to an end of the moving device 49 for the X-axis direction moving shaft 57.

The lamp house 58 is arranged on top of the metal foil 42. Further, the axis of the light beam 59 is substantially perpendicular to the foil surface of the metal foil 42 .

The light beam welding machine 44 consists of a lamp house 58 and a lamp lighting starter 60 attached to the side surface of the lamp house 58 on the support column 53 side.

Here, the moving device may move either the capsule or the welding machine. In other words, consider the size and weight of the capsule and welding machine, and move the one that is easier to move. If the capsule is a small item, move the capsule, and if the capsule is a large item, move the welding machine. Also, "substantially parallel plane" means that it is desirable that the moving surface of the moving device be parallel to the foil surface, but there is no problem even if it deviates slightly, and "substantially perpendicular" means that the moving surface of the moving device is preferably parallel to the foil surface. It is desirable that it be perpendicular, but there is no problem if it is slightly off.

In the invention according to claim 4, when the metal foil around the peripheral part of the material to be treated is closely attached, the gap is 1710 mm thicker than the thickness of the metal foil.
It is important to do the following: This is because it is necessary to weld seamlessly by light beam welding, laser welding, or electron beam welding.

If the gap between the metal foils is 1710 mm or more, some parts will not be welded, and sealing may not be possible. Welding methods used in the present invention include light beam welding, laser welding, and electron beam welding. 3
These welding methods are suitable for overlapping welding of metal foils of about 0 to 300 μm, and other welding methods are difficult to apply because they cause burn-through and poor fusion.

Next, based on FIG. 3 (1) to FIG. 3 14), the capsule manufacturing method using the warm or hot isostatic pressing method of the present invention will be explained in order of steps.

First, the material to be treated 41 and two metal foils 42 and 428 are prepared in advance.
(FIGS. 3(1) and 3(2)), and then, at 23 24 , the material to be treated 41 is sandwiched between the metal foils 42 and 42a.

After that, the metal foils 42 and 42a around the material 41 to be treated are
are inserted into the gap between the upper clamp 45 and the lower clamp 46 of the clamp device 43. Next, the bolts 1 and 47 and the nant 4B are tightened to bring the metal foils 42 and 42a into close contact (FIG. 3 (3)).

In this state, the material to be treated 41, the metal foil 42. 42a and the clamping device 43 are fixed on a rotary table 50a (the fixing means is not shown), and the material to be treated 41 and the metal foils 42 and 42a are held in a stable state with a support 51 made of a smoother or the like. .

Next, the position of the lamp house 58 of the light beam welding machine 44 in the XX° direction is adjusted by moving the X-axis movement shaft 57. Next, adjust the lamp house 58 to Y-Y' using the adjustment screw 55.
to focus the light beam 59. Thereafter, the rotary table 50a is rotated, and the lamp lighting starter 60 starts irradiating the light beam 59, welds the contact parts of the metal foils 42 and 42a, and encapsulates the material 41 to be treated (see FIG. 3). 14)).

The capsule made as above is similar to that described above.
HIP processed.

Figure 4 (11 +21 (31 141 is the fourth figure of the present invention)
This shows the production of a capsule according to a specific example, and the size of the capsule is 30μ.
The material to be treated 72 is wrapped in lead fIi 71 of 300 pm to 300 pm, and the opening 73 of the bag made of lead foil is clamped with a copper clamp jig 75 having a copper clamp plate 74 and fixed with a bolt 76. , the protruding portion of the opening section 73, that is, the sealing portion, is placed under an inert gas atmosphere by supplying an inert gas such as argon gas from the nozzle 77 as shown in FIG. 4(2). The capsule is irradiated with a light beam 78 and sealed to create a capsule.

The capsules created as described above are subjected to HIP processing in the same manner as described above.

The lead foil 7l surrounding the workpiece 72 supported by the clamp device 79 shown in FIG. It will be sealed.

9 et al. 26 In this FIG. 4 14), the illumination window 80 to the vacuum chamber is made airtight by installing a transparent partition plate 81 made of quartz glass or the like via an O-ring, and the light beam 78 is Incident (irradiation) from the welding machine 82 through the transparent partition plate 81
Further, the vacuum chamber 80 is movable by a traveling device 83 and the like, and the welding machine 82 is vertically adjustable by an adjustment screw mechanism 84.

A device for performing light beam welding within a vacuum chamber will be described in more detail with reference to FIG.

FIG. 5 shows the capsule manufacturing apparatus shown in FIG. 3 (14), in which a vacuum chamber X90 is placed on a rotary table 50a, a clamping device 43 is placed in the vacuum chamber 90, and a workpiece is clamped by the clamping device W43. 41, metal foil 42.42a is accommodated, and a capsule is manufactured in a vacuum state using a light beam welding machine 44.

Note that in FIG. 5, the same numbers as those in FIG. 3 (14) indicate the same components, so the explanation will be omitted.

In FIG. 5, a vacuum chamber 90 consists of a ring-shaped lid part 92 in which a disc-shaped glass light transmitting window 91 is fitted, and a bottomed cylindrical container part 93, which can be opened and closed. The structure is

Between the lid part 92 and the container part 93, an O ring 94 is buried on the side of the container part 93 to maintain airtightness. 9
A fixture 5 fixes the clamp device 43 within the vacuum chamber 90.

In this example, the clamping device 4 is located within the vacuum chamber 90.
3 and the clamped workpiece 41 and metal foils 42, 42a are placed in the clamp device 43, and the inside of the vacuum chamber 90 is vacuumed (the vacuum evacuation means is not shown).
. In this state, the glass light transmitting window 9 of the vacuum chamber 90
A light beam 59 is emitted from the rotary table 5.
0a is rotated and welded in a circular manner, and the material to be processed 41 is encapsulated in a capsule in a vacuum.

In this embodiment, a glass window was used as the light transmitting window, but quartz is more preferable because it has excellent light transmittance and is easily available.

When the capsule is manufactured in a vacuum as in the example shown in FIG. 5, no air remains in the extra space inside the capsule or in the pores of the material to be treated, so the material to be treated is not oxidized. It can prevent product quality from deteriorating,
Higher quality products can be obtained.

Fig. 6 (1) f2) f31 shows a fifth specific example of the present invention, in which a notch 1 is provided in a copper clamp surface plate 101-h.
A pair of copper clamp plates 1 (13, 1 (
13' with a bolt (not shown) inserted through the bolt insertion hole 1 (14).
The material to be treated 1 (16 is 30 μm to
It is wrapped with 300 μm thick stainless steel foil or lead fffl (17), and the pair of clamp plates 1 (13 with slits 1
08 is irradiated with a light beam or a laser beam and the overlapping metal foils are melt-sealed to form a capsule.

In this fifth specific example as well, as shown in FIG. 6(2), the seal portion is sealed by a beam 78 in an inert atmosphere by supplying argon gas or the like from a nozzle 77.

FIG. 6(3) is an enlarged view of the area surrounded by a circle in FIG. 6(2).

In the specific example described below, a bolt-and-nut type clamping device is used, but a clamping device using a magnet is more desirable because it allows for easier clamping.

Figure 7 (11 F2+ is an example of a clamping device using a magnet, Figure 7 (11 is a front sectional view, Figure 7 (
2) is a plan view.

In FIG. 7, 41 is a material to be treated, and 42 and 42a are metal foils. 111 and 112 are a pair of upper and lower dish-shaped inner clamps, which are arranged facing each other with metal foils 42 and 42a sandwiched between them.

A magnet 113 is placed on the upper part of the inner upper clamp 111, and the inner upper clamp 111 and the inner lower clamp 112 are brought into close contact with each other with the metal R% 42 and 42a in between. On the other hand, 114 and 115 are the outer two lower clamps of the pair of -1 lower clamps, the outer upper clamp 114 is paring-shaped, the outer lower clamp 115 is dish-shaped, and the outer lower clamp 11
A ring-shaped outer upper clamp 114 is disposed on the upper peripheral edge of the concave side of the ring 5 with the metal foils 42 and 428 interposed therebetween.

A ring-shaped magnet l- is placed on the outer upper clamp 114.
116 is placed, and the outer upper clamp 114 and the outer lower clamp 115 are brought into close contact with each other with the metal foils 42 and 42a in between. With these two pairs of clamps, the metal foils 42 and 42a are
Since it is in close contact with the

``Inside'' 2nd/Lower Clamp]. The IL 112 and the outer upper and lower clamps 114 and 115 are arranged concentrically, and there is a ring-shaped gap 117 between the inner upper clamp 111 and the outer -1 clamp 114. A light beam or laser beam is guided through this gap 117 to perform welding.

Figure 7 (11 +21 shows the clamping device for circular welding in the case of the third specific example, but a clamp using Magneso 1. Needless to say, the device can be applied.

Fig. 8fl) f21 F31 F4) is the sixth embodiment of the present invention.
A specific example will be shown.

In FIG. 8 (1), 121 is a metal capsule for HIP processing, which has a pair of upper and lower rectangular metal foils 122, 122a.
It is formed into a bag shape with an opening 123 left on one side and the remaining three sides seam welded 124 to each other.

The material of the metal foils 122, 122a is I-I I
The material may be appropriately selected in consideration of the P treatment temperature, reactivity with the treatment material, etc., and a soft material is preferable in order to more effectively eliminate the conventional drawbacks. For example, aluminum
Lead, mild steel, stainless steel, platinum, molybdenum, etc. may be used.

The thickness of the metal foils 122, 122a (7) is suitably 300 μm or less, preferably 100 μm or less from the viewpoint of flexibility, and preferably 30 μm or more from the viewpoint of ease of welding.

The sealing by welding 124 may be performed by electro beam welding, light beam welding, YAG laser beam welding, or the like.

126 is a material to be treated for H I }), which consists of a ceramic sock shaped by a mold or a molding method, a molded body of resin powder or metal powder, or two or more types of plate-shaped samples to be joined. .

Then, the material to be treated 126 is stored in the capsule 31 32 121 through the opening 123, and then, as shown in FIG. Hermetically seal it with adhesive or soldering 128 or the like. The pipe 127 may be made of metal or resin, and it is convenient to use a resin adhesive such as epoxy to seal it, but if the pipe 127 is made of metal, soldering 128 may be performed.

Next, as shown in FIG. 8(3), a vacuum hose 129 such as a vacuum pump is connected to the pipe 127, and the capsule is
The inside of 21 is vacuum degassed. After reaching a predetermined degree of vacuum, the metal foil 122122a under -L of the capsule 121 is sealed by overlapping welding 125 at the part between the material to be treated 126 and the pipe 127, and the side of the pipe 127 that is no longer used is sealed. If the cutting is done at an appropriate position using a sharpener etc., the cut will be shifted by 130 mm (Fig. 8, 14).
As shown in FIG. 2, a capsule 121 in which a material to be treated 126 is encapsulated is obtained.

As lap welding 125 after vacuuming, light beam welding, Y
Welding may be performed by AG laser beam welding, electron beam welding, or the like. During this overlap welding 126, in order to obtain an airtight welded state, the overlapped metal Ti 122, 122a must be
It is preferable that they be brought into close contact so that the gap between them is 1/10 or less of the thickness of the metal foil 122.

In addition, since there is a risk of wrinkles occurring due to thermal expansion accompanying the temperature rise of the welded part, for example, as shown in FIG.
With 131a clamped from above and below, place Y at the welding position.
It is preferable to perform welding by irradiating with an AG laser beam 132 or the like.

According to the invention according to claim 5, since the capsule is shaped with metal foil, if the material to be treated is stored inside and vacuum degassed, the capsule is easily deformed and the material to be treated is removed. The shape follows the surface, allowing efficient vacuum degassing.

After vacuum degassing, when lap welding is performed between the material to be treated and the pipe, the metal foils of the capsule come into contact with each other due to the vacuum degassing, making the welding work easier and providing a good seal.

If there is a possibility that the metal foil material of the capsule may adhere to the material to be treated during the HIP treatment, as shown in FIG. It is preferable that a coating layer 143 made of hard-to-sinter ceramics or the like be applied or thermally sprayed on the surface.

Also, instead of this coating layer 143, the material to be treated 141
A ceramic paper may be interposed between the capsule 142 and the capsule 142.

On the other hand, when the capsule 142 material is bonded to the material to be treated 141 and used as part of a product, it is necessary to keep the surface of the material to be treated 141 and the inner surface of the capsule 142 clean.
A foil of zirconium, titanium, or the like is placed at an appropriate location within the capsule 142 as a gas or two for oxygen, nitrogen, etc. to be treated on the material 14.
It is preferable to store it together with 1.

In the third and sixth specific examples, two sheets of metal foil are stacked, but one sheet may be folded and used as in the first specific example, or it may be used alternately with the material to be treated. You may use multiple sheets by stacking them. Furthermore, if the material to be processed is thick, the metal foil may wrinkle during clamping and welding may not be successful, so it is desirable to shape the metal foil into a container shape in advance. Further, even when starting hydrostatic pressure treatment on the material to be treated in a powder state without forming it in advance, it is desirable to form the metal foil into a container shape in the same way.

Such a case is shown in FIG. 1l. In Figure 11,
Reference numeral 151 denotes a disk-shaped material to be processed, which is inserted into a metal foil container 152 having a flange portion. A metal foil 153 is overlap-welded to the metal foil container 152 at the flange portion of the metal foil container 152 to enclose the material 151 to be processed.

When processing a large number of small materials to be processed, a metal foil 16 with a large number of storage recesses 161 is used, as shown in FIG.
After storing the materials to be treated in each of the storage recesses 161 of 2,
Processing can be carried out efficiently if the metal foil 163 is polymerized from above and seam welded around the entire outer periphery to form a bag-shaped capsule 164.

FIG. 13 shows another specific example of the apparatus for carrying out the present invention, in which a laser welder is used as the welder and the welder is operated.

In Figure 13, the same number as Figure 3 14) is the same as 3.
5 36 Since it is the same, the explanation will be omitted.

In FIG. 13, a laser welding machine 171 includes a YAG laser device 172, an optical fiber 173 whose one end is connected to the output part of the YAG laser device 172, and an optical fiber 173.
Optical fiber tip 174 connected to the other end of 73
It consists of.

The optical fiber tip 174 is moved by a moving device 175 that moves it on a plane substantially parallel to the foil surface of the metal foil 42.42a so that the axis of the laser beam is substantially perpendicular to the foil surface of the metal foil 42.42a. It is installed.

The mobile device W175 consists of ball screw 76 and ball screw 1.
It consists of a pair of roller houses 176a, 176b connected to both ends of the roller house 76 and having rollers inside thereof, and a U-shaped pedestal 177 on which the roller houses 176a, 176b are mounted.

The optical fiber tip 174 is connected to the ball screw 176 and the thirteenth
Movable body 178 screwed together so as to be movable in the Y-Y' direction in the figure
installed on. Also, roller house 176a and L
By rotating the roller inside 76b on the pedestal 177, the optical fiber tip 174 is also movable on the pedestal 177 in a direction perpendicular to the paper plane of FIG. Reference numeral 179 denotes a support base on which the workpiece 41 and the metal foil 42.42a clamped by the clamp '4843 are supported.

The apparatus shown in FIG. 13 uses an NC control device (not shown) to move the optical fiber tip 174 to the pole screw 176 and roller house 176a while irradiating the laser beam. 176b, the metal foil 42. around the workpiece 41 is moved. 42a are overlapped and welded, and the material to be treated 41 is encapsulated in a capsule.

The laser beam is generated by a YAG laser device 172 installed at a position away from the material to be processed 41, and is transmitted through the optical fiber 1.
73 and is irradiated from the optical fiber tip 174.

As shown in the specific example shown in Fig. 13, using optical fibers not only allows the laser welding machine to be placed freely;
Branching is possible and multiple welding heads can be obtained from one laser oscillator.

In addition, welding can be performed by moving the tip of the light optical fiber instead of a heavy welding machine or the object to be welded, which simplifies the moving device and reduces the cost of the entire device. Furthermore, it is suitable for robosotoization.

FIG. 14 shows another specific example of the apparatus for carrying out the present invention, in which the vacuum chamber 90 shown in FIG. 5 is placed on the pedestal 177 in the capsule manufacturing apparatus shown in FIG. Place the clamping device 4 into the vacuum chamber 90
3, the processed material 41 and metal foil 42, 42a clamped by the clamp device 43 are accommodated, and a capsule is manufactured in a vacuum state using laser welding a175.

FIG. 15 shows another specific example of the apparatus for carrying out the present invention, in which an electron beam welder is used as the welder. In FIG. 15, the electron beam welding machine consists of a hollow body 181 and an electron gun 190 disposed on the upper part of the eight-beam body 181.

The space at the bottom of the body 181 is a vacuum chamber 182, and the vacuum chamber 182 is evacuated by a degassing tube 185, and a sample 183 (
A metal foil containing the material to be processed) is placed on the sample moving table 184. The sample moving table 184 is movable in the direction of the arrow in the figure and in the direction perpendicular to the plane of the paper.

In addition, in the space above the body 181, a first reflecting mirror 18A is provided on the extension of the collimation axis of the observation telescope 188, and a second reflecting mirror 188B is provided on the reflection line of the first reflecting mirror 188A.
A focusing lens 187 and a deflection coil 186 are provided. On the other hand, the electron gun 190 has a cathode 19l at its muzzle.
, an anode 193 and a glisode 192, and generates an electron beam 194. Note that the reference numeral 189 indicates an adjustment screw.

To explain the operation of the apparatus shown in FIG. 15, first, sample 1
83 is placed on the sample stage 184, and the inside of the vacuum chamber 182 is evacuated. At this time, the degree of vacuum within the vacuum chamber 182 is normally maintained at 10-' Torr or higher.

Next, an electron beam is generated by the electron gun 190, and the sample 183 in the vacuum chamber 182 is irradiated with the electron beam 194 through the irradiation window 195 to weld the metal foil of the sample 183. At this time, the welding position is 1st and 2nd reflecting mirror 1.
It is reflected to 39 40 as shown by the broken line in the figure via 88A and 188B, and while being monitored by the observation telescope 188, it is coarsely adjusted by the sample stage 184 and finely adjusted by the deflection mirror 186.

In the above specific examples, the target materials to be treated include alumina, partially stabilized zirconia, barium titanate, zinc oxide, molybdenum disulfide, etc. High melting point metal powder particles such as molybdenum and tungsten, Ti-AI, N
Examples include intermetallic compound powder forms such as i-AI, two or more different types of metal plates stacked on top of each other, and metal plates or Ceramicox plates with a sprayed layer of metal or Ceramicox on their surfaces. It will be done.

In addition, materials to be processed during WIP processing include polymeric materials such as ultra-high molecular weight polyethylene, polyamide (nylon), and cellulose, and their powders or shapes, or those whose warm isostatic pressing temperature is 300°C or lower. Things can be given.

Next, specific examples and comparative examples of the present invention will be listed.

(First Example) Figure 1 fil (21) As shown in (3), the following procedure is performed.

■ Fill alumina-based ceramic sox powder into a rubber mold, hold a molding pressure of 1,500 kgf/c+dl, and mold it into a mold of 30φXIOO1! A molded body with the same dimensions was produced.

■ A CIP object was wrapped in stainless steel foil with a thickness of 100, 200, or 300 μm, and the metal foil was overlapped, leaving one spot, and welded by running a seam welder in a straight line.

■ The area not welded above was made into a deaeration hole and the pipe connected to the vacuum pump was inserted. Then, the vacuum pump was activated to degas the air in the metal foil (in addition, the surface of the shape was
BN was applied as a mold release agent).

■ With the vacuum pump running, the one remaining degassing hole was sealed and welding was completed.

■ The metal foil capsule prepared in the above procedure was placed in a HIP machine and molded.

Temperature 1250℃ x Pressure 2000kgf/cni x 1
The temperature was raised in advance under the condition of hr retention.

■ After HIP shaping, cut the metal foil capsule l1 42 I dismantled it and removed the precepts.

The density and properties of the high-profile products were the same as those of the conventional products in the case of stainless steel foils of any thickness.

(Second Embodiment) The following procedure is followed as shown in FIG. 2m (21 F31 141).

■ Polytetrafluoroethylene (hereinafter abbreviated as PTFE) is molded using cold isostatic pressing to form a 40φXIOOI
Created a + precept form.

■ The CIP molded body was wrapped in 50 ltm thick aluminum foil, and the ends were fixed with a pressing jig.

(2) The capsule wrapped in the aluminum foil and the pressing jig were fixed in a vacuum chamber for electron beam welding (hereinafter abbreviated as EBW).

■ After heating the inside of the vacuum chamber to 150°C and sufficiently increasing the degree of vacuum, EBW was performed.

■ The aluminum capsule made by the above procedure is
I put it in an IP device and performed the precept.

Temperature 370°C x Pressure 1000kgf/cffl X3
A boosting advance pattern was used under the condition of hr maintenance.

■ After the I{IP precept form, the capsule was removed with a scissor and the molded product was taken out. The pores remaining when forming C■P have disappeared, and the density is the same as that of conventional products (only fired)
It was equal to or higher than ``2''.

(Third Example) ■ Ti-AI powder (Ti 61%) was filled into a rubber mold and molded using cold isostatic pressing at a molding pressure of 1000 kgf/cffl for 3 minutes to form a 40φXIOOI+
I made a hollow body with the same dimensions.

■ Wrap ceramic paper around this CIP molded body, and wrap the outside with 100 μm stainless steel foil. Ceramic paper was used to prevent the Tt-AI CTP molded body from joining with the stainless steel foil, making it easier to remove the capsule after HIP molding.

(2) The above capsule was fixed with the holding jig used in the second specific example, and fixed in a vacuum chamber for EBW.

(2) The capsule portion in the vacuum chamber was heated to 400° C., and after the degree of vacuum was sufficiently increased, EBW was performed.

■　43 stainless steel capsules made using the above procedure 44 1 {　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　Installed in an IP device and performed some precepts.

One type is temperature 1050°C x pressure 1500kgf/ci
A temperature increase advance pattern was used under the condition of holding X 2 hr.

■ After HTP shaping, the capsule does not bond or fuse with the molded product due to the use of ceramic paper.
It was easily removed with scissors.

(Fourth example) The clamping device shown in FIGS. 4(1) to (3) is used.

■ Ultra-high molecular weight polyethylene (hereinafter referred to as U I { M W
- Powder (abbreviated as PE) is molded into a powder with a diameter of 60 mm using a mold press.
It was molded into a precept-shaped body with a thickness of 5 mm.

■ This precept-shaped body was placed in a bag made of lead foil with a thickness of 100 μm, the ends were sufficiently secured with a clamp jig, and edge welding was performed using a light beam (extrusion allowance: 2n).

■ The lead foil capsule prepared in the above procedure was placed in an HIP machine and molded.

Certain conditions are temperature 160℃, pressure 1000kgf/cJ
The pressure was increased in advance by holding for 30 minutes.

■ After the HIP ritual, the capsule was removed with scissors and a shaped item was taken out. The pores that remained during CIP molding had disappeared, and the density had increased to the same level or higher than that of conventional products (compressed or shaped products).

The welding conditions are as follows.

Light beam lamp manual power = 80 amperes Welding speed: 800 degrees/min Argon gas flow rate: 2 off/min (fifth embodiment) Using the clamping device shown in FIGS. 4 (1) to (3).

■ A boria ξ (nylon 6) shaped body (commercially available) with a diameter of 30 mm and a height of 10 inches was prepared.

■ The above precept-shaped body was filled into a lead foil capsule with a thickness of 100 μm.

■ The protrusion of the capsule end was set to 2n, and the capsule was sufficiently fixed with a clamp jig.

■ The end of the capsule, which was fixed with a clamp jig, was welded using a light beam.

■ The capsule was tampered with a WIP device. The precept conditions are
The temperature was maintained at 120°C x 1000 kgf/cnl x 1 hr.

■ After WIP shaping, the capsule foil was removed with scissors and the precept-shaped product was taken out. As a result of measuring the tensile strength of the shaped product, it was found to be 650 kgf/ before WIP treatment (commercial product).
It had increased by about 10% from ca to 720 kgf/ctK.

The welding conditions are as follows.

An apparatus with a light beam lamp input of 280 amperes, a welding speed of 600 mm/min, an argon gas flow rate of 2Q1/m'rn (Sixth Embodiment, Fig. 4, 14)) was used.

■ Cellulose powder is made into a diameter of 30mm using a CIP device.
A molded body with a height of 80 mm and a height of 80 mm was molded.

■ The above molded body is placed in a bag made from lead foil with a thickness of 100 μm, and a clamping jig is placed inside a chamber whose upper part is closed with a transparent plate made of quartz glass, leaving the final welded part intact. Fixed with.

■ While keeping the chamber and capsule inside a vacuum,
When the temperature reached 0-2 Torr, a light beam was emitted through a transparent plate of quartz glass.

■ Place the table with the clamp jig inside the chamber at a height of 800 mm.
Light beam welding was performed by moving at a speed of /min.

■ The capsule prepared in the above procedure was placed in a HIP device and a precept was performed.

Warning conditions are 230℃ x 2000kgf/cnl x
It was held for 10 minutes.

■ After the HIP test, the lead foil was removed and the molded product was taken out. In the molded body itself, the voids remaining when forming the CIPrN2 type had disappeared, and the density was also improved.

The welding conditions are as follows.

Light beam lamp input: 100 amps welding speed
: 800 mm/min (7th example) Using the clamping jig shown in Fig. 6 (1) to (3), Fig. 4 1
4) was used.

(2) Using a CTP device, a 30 mm diameter and 100+n height molding body was prepared from aluminium-based ceramic ceramic powder under conditions of maintaining a molding pressure of 1500 kgf/cot x 1 min.

(2) The CIP molded body was placed in a bag made of stainless steel foil with a thickness of 100 μm, and the overlapped portions were sufficiently fixed using a copper 47 48 clamp jig, and welding was performed by simultaneous fusing and cutting.

Welding by simultaneous fusing and cutting was performed in the chamber only at the final weld. The capsule and the copper clamp jig were placed in a chamber, and the vacuum level was reduced to 10'' Torr while keeping the chamber and the inside of the capsule in a vacuum. Then, a light beam was emitted through a transparent plate of quartz glass, and the jig was automatically fed for welding.

The slit width at this time was 41 m, the welding conditions were a light beam lamp input of 120 amperes, and a welding speed of 50 m.
It was set to 0 mm/min.

■ HI the stainless steel foil capsule created by the above procedure.
I put it in the P device and performed the precept.

Molding conditions are temperature 1250℃, pressure 2000kgf/cn
The temperature was raised in advance and held for t x 1 hr.

■ After the HIP precept, the capsule was removed with scissors and the precept crystal was taken out. Of course, the pores remaining during the CIP process disappeared, and when the characteristics of the formed body, such as density and strength, were evaluated, it was found to be equivalent to those using conventional capsules.

(Eighth Example) Fig. 7 F11 (Execution was carried out using the apparatus shown in Fig. 5 using a clamp jig of 21).

(2) Lead zirconate titanate ceramic ceramic powder was shaped into a compact with a diameter of 30 mm and a thickness of approximately 51 m using a mold press.

■ Sandwich the molded body between 100 μm thick stainless steel foils, and use a magnetic clamping device to secure the molded body to the I
It was clamped in the state shown in Figure L12.

Note that BNt53 powder was used between the molded body and the stainless steel foil to prevent the reaction between the ceratan sox and the stainless steel foil.

■ The clamp jig described in "2" was placed on a rotary table, and the slit portion was welded using a light beam welder.

■ The capsule created using the above procedure was placed in a HIP device and a precept was performed.

A9 50 Molding conditions are 1050℃, 1000kgf/cnl 1
The time was kept.

■ After the HIP test, the stainless steel foil was removed and the molded product was taken out. The molded body itself was sufficiently sintered, and its density was equal to or higher than that of conventional capsule-free HIP molded products.

The welding conditions were a lamp manual power of 140 amperes and a welding speed of 50 mm/min.

(Ninth Embodiment) The following procedure is used as shown in FIG. 3 fil +2+ +31 +41.

■ As a treatment system, Ni-^l intermetallic compound powder (particle size of 325 mesh or less) was pressed into a diameter of 3 mm using a mold press.
It was shaped into a molded body of 0i+m and 3mm thick.

■ This precept-shaped body is made of two 100 μm thick stainless steel sheets (
StlS3 (14) sandwiched between foils, Figure 7 +11
The stainless steel foil was brought into close contact using a magnet 1 type clamping device shown in (2). At this time, the gap between the two sheets of stainless steel foil was about 5 μm at its largest.

(2) A capsule was fabricated by overlapping and welding stainless steel foil using a light beam welding method at a distance of about 25 meters (801 m in diameter) from the end of the molded body.

■ At this time, while welding, the stainless steel foil slightly outside the welded area was removed by fusing. As a result, the capsule became disc-shaped.

■ Place the capsule produced in this way in a HIP device and heat it for 2 hours at 1300℃ and 1000kgf/self.
P treatment was performed. After the HIP treatment, the end of the capsule was cut with metal scissors, the stainless steel foil attached to the material to be treated was removed, and the sintered body was taken out.The density of the sintered body was measured. I confirmed that there is. The sintered body had shrunk almost uniformly and was very beautiful, except for the linear marks that appeared at the joints of the stainless steel foil.

(10th Example) After performing the procedure shown in FIG. 3 (1) (21 (3)), the experiment was carried out using the apparatus shown in FIG. 14.

(2) As a material to be treated, Econol bark powder was molded using a mold press to produce a 51 52 molded body with a diameter of 3 Q mm and a thickness of approximately 5 ml.

■ This precept-shaped body was sandwiched between two sheets of aluminum foil having a thickness of 50 μm, and the circumference of the precept-shaped body was tightly attached using a magnetic clamp device. At this time, the gap between the two pieces of argonium foil was about 0.5 μm at its largest.

(2) The capsule was clamped with a clamp device and placed in a vacuum chamber, and the inside of the vacuum chamber was evacuated (vacuum level: 10-'' Torr).

Lap welding was performed by introducing a YAG laser beam through a quartz window while rotating the entire vacuum chamber on a turntable-type positioner.

The YAG laser beam is a pulsed laser beam, with a beam intensity of 60 W and a welding speed of 1 cm/sec, taking into account the beam opposition of aluminum foil and heat dissipation due to thermal conduction.
Welding was performed in step c.

After welding, the capsule is removed from the vacuum chamber and H
The sample was placed in a P apparatus and subjected to HIP treatment at 360° C. and 1500 kgf/ci for 1 hour. After the HIP treatment, the aluminum foil was cut with an old-fashioned knife and the sintered body was taken out.

■ This sintered body was fractured and the structure was observed using a scanning electron microscope. As a result, it was confirmed that it was a dense sintered body without pores.

(Eleventh Example) According to the procedure shown in FIG. 8 (11 (21 (31) 141).

■ The capsule is made of stainless steel (StlS) with a thickness of 100 μm.
3 (14) foil was used as a material and shaped into an envelope shape with a width of 3 Q mm and a length of 150 nm using a light beam welding machine.

■ The object to be subjected to attack is alumina powder AI-1605G (trade name, manufactured by Showa Light Kinzokuen) using a mold or press to form a 30x5 shape.
A plate-shaped body of 0x5 (ms) was manufactured and its entire surface was coated with BN powder.

(2) The object to be shaped was put into the capsule through the opening, and a mild steel vacuum deaeration pipe having an outer diameter of IOms and an inner diameter of 8 mm was airtightly connected to the opening using an epoxy adhesive.

■ After confirming that the adhesive has solidified, connect the vacuum pump hose to the pipe to evacuate the inside of the capsule, and when the degree of vacuum reaches 10-” Torr, remove the molded object and the pipe. The metal foil between the two was clamped as shown in Figure S, and lap welded using a light beam welder.

At this time, the metal foil on the pipe side was simultaneously cut.

■ The capsule containing the broken precept form in this way was placed in a HIP machine and heated at 1350°C and 1500k.
g f /ctl, H f P treatment for 1 hour was performed.

■ After the HIP treatment, the capsules were cut using a metal cutter to collect the sintered Argona.

It was confirmed that this Alkuna had a true density of 3.98 g/cTl. The shape is approximately 23.5X43X
4.2 (mu), and had a substantially similar contracted shape.

(12th Example) ■ A ring with an outer diameter of 250 u, an inner diameter of B5 is, and a thickness of 5 m is formed from cemented carbide powder using a CIP device under a pressure of 1000 kgf.
/cJ, sentenced on condition of holding for 1 minute.

(2) The above CTP shape was covered with ceramic paper, and about 5 sheets of 30 x 30 x 0.1t (+n) titanium foil were placed on the outside, and then wrapped in 150 μm stainless steel foil.

Titanium foil was used to remove oxygen gas generated from adsorbed gas during I-{IP molding.

■ Welding was performed by simultaneously fusing and cutting after the overlapped parts were sufficiently fixed with a copper clamp jig.

Welding by simultaneous cutting and cutting was performed in a vacuum chamber only at the final weld.

The capsule and the copper clamp jig were placed in a vacuum chamber, and the degree of vacuum was reduced to 10 −2 Torr while maintaining the chamber and the inside of the capsule in a vacuum. A light beam was then emitted through a transparent plate of quartz glass, and the l jig was automatically fed for welding.

■ HIP the stainless steel foil capsule created using the above procedure.
It was placed in a device and molded.

Certain conditions are temperature 1300℃, pressure 1000K+RF/
The temperature was increased prior to cIAx1 hr maintenance.

■ After HTP molding, the capsule was removed with a scissors and the precept-shaped product was taken out. When properties such as density and strength of the molded body were evaluated, it was found to be equivalent to conventional materials.

(13th Example) ■ Polytetrafluoroethylene (hereinafter abbreviated as PTFE55 56) was molded by cold isostatic pressing to form a 40φXI
Created an OOI+ Kai-form.

(2) A CIP object was wrapped in aluminum foil with a thickness of 100 μm, and one piece of titanium foil measuring 30×30×0.1 t+n was set inside the aluminum foil.

■ A certain capsule is made from the above aluminum foil in a vacuum (
(room temperature) YAG welding.

■ HI the argonium capsule made by the above procedure.
I put it in the P device and performed the precept.

A pressure increasing pattern was used under the conditions that the temperature was 370°C and the pressure was maintained at 1000 kgf/cJX3 hr.

■ After the HIP precept, the capsule was removed using Haza 5, and the precept was taken out. The pores that remained during CIP molding had disappeared, and the density had increased to the same level or higher than that of conventional products. In addition, by placing titanium foil inside the capsule,
It was possible to remove some air, adsorbed moisture, and adsorbed gas that remained inside the capsule.

(First Comparative Example) ■ A CRPF;C body was prepared in the same manner as in the second example, and wrapped in 25 μm thick argonium foil.

■ HIP test was also conducted under the same conditions (3 tests)
.

(2) After I-IIP molding, the capsule was removed and the molded product was taken out.

Some of the pores that remained during the CIP process remained as they were, and the density did not increase compared to that of Example 2.

In addition, after filling the capsules, the aluminum foil was damaged during transportation, and some capsules failed before HrP.

Furthermore, as a result of SEM observation of the 25 μm thick aluminum foil, small pinholes were found, and due to this, the capsule could not be kept sufficiently airtight. The 50 μm thick argonium foil had no holes and no airtightness problems.

(Second Comparative Example) ■ A CIP object was prepared in the same manner as in the first example and wrapped in stainless steel foil having a thickness of 400 μm.

■ During welding, the inside of the capsule was vacuum degassed, but the metal foil itself could not be neatly placed along the outside of the CIP molded body. Therefore, after the HIP treatment, the molded product was not deformed uniformly, and the density inside the molded product was uneven depending on the position.

Further, since the thickness was 400 μm, the capsule could not be easily removed with a metal cutter as in Example 1, so it was processed by cutting, which took time.

(Effect of the invention) The present invention is as described above, and in the present method invention, the wall thickness is 30 mm.
Since the capsule is made of a thin metal foil of ~300 μm, it contracts uniformly following the material to be treated when hydrostatic pressure is applied. Therefore, the material to be treated is not distorted due to non-uniform shrinkage.

In addition, metal foil can be easily cut with metal cutting scissors, etc., and can be easily removed from the material to be treated. Since Nj is easy to perform, it is easy to remove the capsule after the hydrostatic pressure treatment.

In addition, since the capsule is constructed by sandwiching the material to be processed between metal foils, making the peripheral part of the shrine tightly adhered, and then welding the contact parts, the degree of freedom in the shape of the metal foil relative to the shape of the material to be processed is increased. It is large, and there is no need to manufacture a capsule for each shrine to be treated.

Furthermore, since the metal foil is in close contact with the material to be treated, there is no need to fill the area around the material to be treated with a secondary pressure medium.

The capsule does not deform unevenly during hydrostatic pressurization and does not distort the processed material, and the process of encapsulating the processed material in the capsule is simple, making it possible to handle cases where the processed material has a complex shape. The material to be treated can be easily taken out after being subjected to hydrostatic pressure.

According to the present device invention, the present method invention can be carried out efficiently.

It should be understood that the invention may be carried out in other ways without departing from its spirit or essential characteristics.

Accordingly, the preferred embodiments described herein are illustrative and not restrictive.

59 60 The scope of the invention is indicated by the appended claims, and all modifications that come within the meaning of those claims are intended to be included in the invention.

[Brief explanation of drawings]

Figure 1 (1.1 (21) 141 is a conceptual diagram showing the capsule production process according to the first embodiment of the present invention, and Figure 1 (1) shows the capsule used in the present invention and the object to be treated. Figure 1 (2) is a perspective view during vacuum degassing. Figure 1 (3) is a perspective view when the capsule is fully recovered. Figure 1 (14) is a cross section of the hot isostatic pressurization device. Figure 2 (11 f2l f31 is a conceptual diagram showing the capsule making process according to the second specific example of the present invention, and Figure 2 (1) shows a state where the metal foil sandwiching the material to be treated is clamped. Perspective view. Figure 2 (2) is a sectional view showing a state in which the metal foil sandwiching the material to be treated is clamped. Figure 2 (3) is a perspective view when the capsule is completed. Figure 3 (11 f21 (31) 141 is the third part of the present invention
FIG. 2 is a conceptual diagram showing a capsule production process according to a specific example,
FIG. 3(1) is a perspective view of the material to be treated. FIG. 3(2) is a perspective view of the metal foil. FIG. 3 (3) is a sectional view showing a state in which the metal foil sandwiching the material to be treated is clamped. FIG. 3 14) is a partially sectional front view of an apparatus for carrying out the present invention by light beam welding. Figure 4 (11 (21 (31 +41 is the fourth figure of the present invention)
FIG. 2 is a conceptual diagram showing a capsule creation process according to a specific example,
FIG. 4 is a perspective view showing the capsule in a clamped state. FIG. 4(2) is a sectional view of a main part showing a state in which welding is performed in an inert gas atmosphere. FIG. 4(3) is an enlarged cross-sectional view of the circle in FIG. 4(2). FIG. 4 14) is a partially sectional front view of an apparatus for implementing the present invention by light beam welding. FIG. 5 is a partially sectional front view of an apparatus for carrying out the method of the present invention, which performs light beam welding within a vacuum damper. Figure 6 (+l (21) is a conceptual diagram showing a process of manufacturing a Cub 61 n9 cell according to the fifth specific example of the present invention 191, and Figure 6 (1) is a perspective view showing a state in which the capsule is clamped. Figure 6 (2) is a cross-sectional view of the main part showing the state of welding in an inert gas atmosphere. Figure 6 (3) is an enlarged cross-sectional view of the circle in Figure 6 (2). (1.1 (21 is Magneso I used in the present invention)
FIG. 7 (1) is a front cross-sectional view of the type clamp device. FIG. 7(2) is a plan view. Figure 8 (1.1 (21 F31 F41) is a conceptual diagram showing the capsule preparation process according to the sixth embodiment of the present invention, and Figure 8 (1) shows the capsule used in the present invention and the material to be treated. Fig. 8 (2) is a perspective view of the vacuum degassing 11, 1. Fig. 8 (3) is a perspective view showing the operation of enclosing the material to be treated in the capsule by welding. Fig. 8 (14) ) is a perspective view of a completed capsule n.'l. Figure 9 is an enlarged cross-sectional view when the capsules are overlapped and welded in the sixth embodiment of the present invention. Figure 10 is a perspective view of a completed capsule n.'l. Figure 10 is a perspective view of a completed capsule n.'l. A sectional view showing the state. Fig. 11 is a sectional view showing a state in which the material to be processed is sealed in a metal foil container having a storage recess. Fig. 12 is a sectional view showing a state in which the material to be processed is sealed in a metal foil container having a large number of storage recesses. A perspective view showing the state. Fig. 13 is a partially sectional front view of an apparatus for performing laser beam welding, which is an apparatus for implementing the method of the present invention. Fig. 14 is an apparatus for implementing the method of the present invention, and FIG. 15 is a partially sectional front view of an apparatus for performing laser beam welding in a vacuum chamber. FIG. Figure 16 is a conceptual diagram showing an overview of the conventional method. Figure 17 is a conceptual diagram showing an outline of another conventional method. Figure 18 F11 F2) is a conceptual diagram of tsuzugo-like contraction, which is a problem with the conventional method. . 10 30 121 ...capsule, 11,31,4
1.72, 126, 15163 64 ... material to be treated, 12, 42.42a, 71, 122.
122a, 153... Metal foil, 43... Clamp device (means), 44... Welding means, 49, 175...
-Moving device (means), 80,182...Vacuum chamber, 113,114.116...Magneso 1. Patent applicant: Kobe Steel, Ltd. 1/65 JP-A-3-940 (12 (21)) 1. Indication of the case: 1990 Patent Application No. 26478 2. Name of the invention: Warm or hot isostatic pressing method Capsule manufacturing method and device 3. Relationship with the case of the person making the amendment Patent applicant name (119) Kobe Steel, Ltd. 4, Representative Hitonishi 577 Address 1013 Mikuriya, Higashiosaka-shi, Osaka Telephone (16)
(782) 6917 ・6918 No. 6. Number of claims reduced by amendment 1 (17. Subject of amendment/Claims column of specification/Detailed explanation of invention column 8. Contents of amendment Next Page 8. Contents of amendment (11) The claims of the specification are corrected as shown in the attached sheet. (2) From page 14, line 20 of the specification to page 17, line 9
In the line ``Also characterized by (Claim (17)
)). ' is corrected as follows. In addition, in order to achieve the above-mentioned second object, the present device invention takes the following technical measures. That is, the present device invention provides a clamp for tightly contacting the metal foil containing the material to be processed. means; a beam welding means for welding the metal foil with its beam axis substantially perpendicular to the foil surface of the metal foil; either one direction of the beam welding means or the workpiece; and a moving means connected to the beam welding means or the workpiece on a plane substantially parallel to the foil surface of the metal foil (claim (6)). )). 2. Also, a clamping means for closely contacting the metal foil containing the target shrine; a vacuum chamber having an irradiation window and capable of housing the clamping means therein; disposed outside the vacuum chamber, a beam welding means for welding the metal foil by irradiating the metal foil with a beam through the irradiation window with the axis of the beam substantially perpendicular to the box surface of the metal cage; the beam welding; 1,000 moving steps connected to either the beam welding means or the material to be processed, and for moving the beam welding means or the material to be processed on a plane substantially parallel to the metal foil. (Claim +71) J2, Claim +1.1 A material to be treated such as a powder or a powder compact,
The first one is housed in a metal foil with a thickness of 30 μm to 300 μm.
A method for manufacturing a capsule in a warm or hot isostatic pressing method, characterized by comprising: step; a second step of manufacturing a capsule by enclosing the material to be treated in a metal foil by welding the metal foil; . {2) The material to be treated, such as powder or powder compact, is
A first step of housing the material in a metal foil having a thickness of m to 300 μm; A second step of manufacturing a capsule by enclosing the material to be treated in the metal foil by welding the metal foil in an inert gas atmosphere; A method for manufacturing a capsule using a warm or hot isostatic pressing method, characterized by comprising: (3) The material to be treated, such as powder or powder compact, is
A first step of storing the material in a metal foil with a thickness of m to 300 μm; a second step of placing the metal foil containing the material to be treated in a vacuum chamber having an irradiation window; a third step of dragging the inside of the vacuum chamber under vacuum. step; a fourth step of manufacturing a capsule by welding the metal foil with a 1:1 beam entering through the irradiation window and encapsulating the ashes to be treated within the metal foil; A method for manufacturing capsules using warm or hot isostatic pressing. 14) The material to be treated, such as powder or powder compact, is
The first step of storing the metal foil in the metal foil with a thickness of m to 300 μm; 2 steps; a 3rd step of manufacturing a capsule by encapsulating the material to be treated in a metal foil by welding the close contact portion of the metal foil; How to make capsules. (5) The material to be treated, such as powder or powder compact, is
The first step of storing in a bag-shaped metal foil with a thickness of 71i to 300 μm; inserting a vacuum degassing pipe into the opening of the bag-shaped metal foil,
A second step of airtightly sealing the opening; A third step of vacuum degassing through the vacuum degassing pipe; Welding the metal foil overlappingly between the material to be treated and the vacuum degassing pipe to be treated. A method for manufacturing a capsule in a warm or hot isostatic pressing method, comprising: a fourth step of manufacturing a capsule by encapsulating the material in a metal foil. Or, let's say, ``a hand that is placed on a flat surface like a gold coin; a capsule in the law.

Claims (1)

[Claims] (1) The material to be treated, such as powder or powder compact, is
A first step of storing the material in a metal foil having a thickness of m to 300 μm; a second step of enclosing the material to be treated in the metal foil by welding the metal foil to produce a capsule; A method for manufacturing capsules using warm or hot isostatic pressing. (2) The material to be treated, such as powder or powder compact, is
A first step of housing the material in a metal foil having a thickness of m to 300 μm; A second step of manufacturing a capsule by enclosing the material to be treated in the metal foil by welding the metal foil in an inert gas atmosphere; A method for manufacturing a capsule using a warm or hot isostatic pressing method, characterized by comprising: (3) The material to be treated, such as powder or powder compact, is
A first step of storing the material in a metal foil having a thickness of m to 300 μm; A second step of placing the metal foil containing the material to be treated in a vacuum chamber having an irradiation window; A second step of evacuating the inside of the vacuum chamber. 3 steps; a 4th step of manufacturing a capsule by welding the metal foil with a beam incident through the irradiation window and encapsulating the material to be treated within the metal foil; Capsule manufacturing method using hot isostatic pressing. 14) The material to be treated, such as powder or powder compact, is
A first step of storing the metal foil in a metal foil having a thickness of m to 300 μm; a second step of closely adhering the metal foil around the peripheral portion of the material to be treated so that the gap is 1/10 or less of the thickness of the metal foil. A capsule in a warm or hot isostatic pressing method, characterized in that it consists of step: a third step of manufacturing a capsule by enclosing the material to be treated in a metal foil by welding the close contact part of the metal foil. production method. (5) The material to be treated, such as powder or powder compact, is
The first container is housed in a bag-shaped metal foil with a thickness of m to 300 μm.
Step: Insert a vacuum deaeration pipe into the opening of the bag-shaped metal foil,
A second step of airtightly sealing the opening; A third step of vacuum degassing through the vacuum degassing pipe; Welding the metal foil over and over between the material to be treated and the vacuum degassing pipe to be treated. A method for manufacturing a capsule in a warm or hot isostatic pressing method, comprising: a fourth step of manufacturing a capsule by encapsulating the material in a metal foil. (6) Warm or hot heating according to claim (5), characterized in that when sealing the opening of the bag-shaped metal foil, the metal foil and the vacuum degassing pipe are sealed using an adhesive. A method for manufacturing capsules using the hydrostatic pressurization method. (7) Claim (1) characterized in that, when the material to be treated is housed in the metal foil, a coating layer made of a hard-to-sinter ceramic is interposed between the material to be treated and the metal foil.
A method for manufacturing a capsule in the warm or hot isostatic pressing method described in (5). (8) Claim (1) characterized in that the material to be treated is covered with ceramic paper when the material to be treated is housed in the metal foil.
) to (5), the method for manufacturing a capsule using the warm or hot isostatic pressing method. (9) Warm or heat according to claims (1) to (5), characterized in that when the material to be treated is housed in the metal foil, the zirconium foil is housed in the metal foil together with the material to be treated. A method for manufacturing capsules using the hydrostatic pressurization method. (10) Warm or heated according to claims (1) to (5), characterized in that when the material to be treated is housed in the metal foil, the titanium foil is housed in the metal foil together with the material to be treated. A method for manufacturing capsules using the hydrostatic pressurization method. (11) Claim characterized in that the metal foil consists of a container-shaped metal foil having a storage recess and a flat metal foil.
1) A method for manufacturing a capsule using the warm or hot isostatic pressing method described in (5). (12) A clamping means for closely contacting the metal foil containing the material to be treated; and a beam welding means for welding the metal foil with the axis of the beam substantially perpendicular to the foil surface of the metal foil. ; a moving means connected to either the beam welding means or the workpiece in one direction and moving the beam welding means or the workpiece on a plane substantially parallel to the foil surface of the metal foil; A capsule manufacturing device in a warm or hot isostatic press method, characterized by comprising; (13) A clamping means for closely contacting the metal foil containing the material to be treated; a vacuum chamber having an irradiation window and capable of housing the clamping means therein; beam welding means for welding the metal foil by irradiating the metal foil with a beam through the irradiation window, with the axis of the beam substantially perpendicular to the surface of the foil; The method is characterized by comprising a moving means connected to either one of the treated materials and for moving the beam welding means or the treated material on a plane substantially parallel to the foil surface of the metal foil. Capsule manufacturing equipment using warm or hot isostatic pressing. (14) A capsule manufacturing apparatus using a warm or hot isostatic pressing method according to claim 12 or 13, wherein the beam welding means is a light beam welder. (15) A capsule manufacturing apparatus using a warm or hot isostatic press method according to claim 12 or 13, wherein the beam welding means is a laser beam welder. (16) A capsule manufacturing apparatus using a warm or hot isostatic press method according to claim 12 or 13, wherein the beam welding means is an electron beam welding machine. (17) Claim (12) or (13) characterized in that the clamping means utilizes the magnetic force of a magnet.
) Capsule manufacturing apparatus using the warm or hot isostatic pressing method described in ).