JPH0395635U - - Google Patents
Info
- Publication number
- JPH0395635U JPH0395635U JP1990001721U JP172190U JPH0395635U JP H0395635 U JPH0395635 U JP H0395635U JP 1990001721 U JP1990001721 U JP 1990001721U JP 172190 U JP172190 U JP 172190U JP H0395635 U JPH0395635 U JP H0395635U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- insulating film
- circuit
- wiring
- embedding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/981—Auxiliary members, e.g. spacers
- H10W72/983—Reinforcing structures, e.g. collars
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
第１図ａ，ｂは本考案の第１の実施例の平面図
及びＡ−Ａ′線断面図、第２図ａ，ｂは本考案の
第２の実施例の平面図及びＢ−Ｂ′線断面拡大図
である。 １……シリコン基板、２……パツド電極、３…
…開孔部、４……配線引出し部、６……パツシベ
ーシヨン酸化膜、７……フイールド酸化膜、８…
…溝、９……窒化シリコン膜、１０……アルミニ
ウム配線。
及びＡ−Ａ′線断面図、第２図ａ，ｂは本考案の
第２の実施例の平面図及びＢ−Ｂ′線断面拡大図
である。 １……シリコン基板、２……パツド電極、３…
…開孔部、４……配線引出し部、６……パツシベ
ーシヨン酸化膜、７……フイールド酸化膜、８…
…溝、９……窒化シリコン膜、１０……アルミニ
ウム配線。
Claims (1)
- 半導体基板上に設けた絶縁膜と、前記絶縁膜の
表面に設けた溝と、前記溝内に金属膜の一部を埋
込んで設けた配線又はパツド電極を備えたことを
特徴とする半導体集積回路。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990001721U JPH0395635U (ja) | 1990-01-12 | 1990-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990001721U JPH0395635U (ja) | 1990-01-12 | 1990-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0395635U true JPH0395635U (ja) | 1991-09-30 |
Family
ID=31505615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990001721U Pending JPH0395635U (ja) | 1990-01-12 | 1990-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0395635U (ja) |
-
1990
- 1990-01-12 JP JP1990001721U patent/JPH0395635U/ja active Pending