JPH0397855U - - Google Patents
Info
- Publication number
- JPH0397855U JPH0397855U JP685090U JP685090U JPH0397855U JP H0397855 U JPH0397855 U JP H0397855U JP 685090 U JP685090 U JP 685090U JP 685090 U JP685090 U JP 685090U JP H0397855 U JPH0397855 U JP H0397855U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- ion
- substrate
- metal
- irradiation device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP685090U JPH0397855U (2) | 1990-01-26 | 1990-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP685090U JPH0397855U (2) | 1990-01-26 | 1990-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0397855U true JPH0397855U (2) | 1991-10-09 |
Family
ID=31510522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP685090U Pending JPH0397855U (2) | 1990-01-26 | 1990-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0397855U (2) |
-
1990
- 1990-01-26 JP JP685090U patent/JPH0397855U/ja active Pending
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